Abstract
In the course of miniaturisation the demand of novel manufacturing methods and tailored machine tools is ever-increasing. For manufacturing metallic micro-components the laser chemical machining presents a promising approach for a localised and smooth material processing. Its applied low laser power densities (<100 kW/cm2) open up the opportunity of using optical diffractive elements for a maskless beam shaping. In this work, Digital Micromirror Device technology (DMD) and laser processing are combined for the first time in a laser chemical machining procedure. A novel compact machining module is presented, which enables large angle illumination of DMD with diffraction efficiencies up to 9.6%. It is shown that the direct amplitude modulation is affected by optical distortions and inhomogeneous intensity profiles. As result, the material removal cannot be allocated to the related shaping. To overcome these limitations, an optical modelling of the DMD-pattern was performed taking into account the device tilting. Thus a highly accurate beam shaping has been achieved.
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Hsu, T.-R.: Miniaturisation—A paradigm shift in advanced manufacturing and education. In: IEEE/ASME International Conference on Advanced Manufacturing Technologies and Education in the 21st Century (2002)
Vollertsen, F., Biermann, D., Hansen, H.N., Jawahir, I.S., Kuzma, K.: Size effects in manufacturing of metallic components. CIRP Ann.: Manuf. Technol. 58, 566–587 (2009)
Wulfsberg, J.P., Redlich, T., Kohrs, P.: Square foot manufacturing—a new concept for micromanufacturing. Prod. Eng. Res. Devel. 4(1), 75–83 (2010)
Vollertsen, F.: Categories of size effects. Prod. Eng. Res. Dev. 2(4), 377–383 (2008)
Bäuerle, D.: Laser Processing and Chemistry, 4th edn. Springer, Berlin (2011)
Wulfsberg, J.P., Hilpert, S.E., Ostendorf, A., Samm, K.: Fundamentals of Laser Assisted Microforming. BIAS Verlag, Strahltechnik 25, 89–98 (2003)
Li, L., Achara, C.: Chemical assisted laser machining for the minimization of recast and heat-affected zone. CIRP Ann: Manuf. Technol. 53, 175–178 (2004)
Mehrafsun, S.: Laser-induced chemical machining. In: Micro Metal Forming, pp. 258–267. Springer, Berlin (2013)
Stephen, A.: Electrochemical laser-jet process for the micro structuring of metals. BIAS Verlag, Strahltechnik 46 (2011)
Sun, C., Fang, N., Wu, D.M., Zhang, X.: Projection micro-stereolithography using digital micro-mirror dynamic mask. Sens. Actuators A 121, 113–120 (2005)
Heath, D.J., Feinaeugle, M., grant-Jacob, J.A., Mills, B., Eason, R.W.: Dynamic spatial pulse shaping via a digital micromirror device for patterned laser-induced forward transfer of solid polymer films. Opt. Mater. Express 5(5), 1129–1136 (2015)
Sontheimer, A.B.: Digital micromirror device (DMD) Hinge memory lifetime reliability modeling. In: 40th Annual International Reliability Physics Symposium, pp. 118–121 (2002)
Blanche, P.A., Carothers, D., Wissinger, J., Peyghambarian, N.: Digital micromirror device as a diffractive reconfigurable optical switch for telecommunication. J. Micro/Nanolithogr. MEMS MOEMS 13(1), 011104 (2014)
Brown, B.R., Lohmann, A.W.: Computer-generated binary holograms. IBM J. Res. Dev. 13(2), 160–168 (1969)
Mills, B., Feinaeugle, M., Sones, C.L., Rizvi, N., Eason, R.W.: Sub-micron-scale femtosecond laser ablation using a digital micromirror device. J. Micromech. Microeng. 23, 035005 (2013)
Messaoudi, H., Mehrafsun, S., Vollertsen, F.: Influence of the etchant on material removal geometry in laser chemical machining. In: Proceedings of the 4th International Conference on Nanomanufacturing (nanoMan2014) Bremen (2014)
Zhang, S., Zhong, H., Asoubar, D., Wyrowski, F., Kuhn, M.: Tilt operator for electromagnetic fields and its application to propagation through plane interfaces. In: Optical Systems Design 2012, Proceedings of SPIE, vol. 8550, p. 85503l (2012)
Messaoudi, H., Thimiecke, F., Falldorf, C., Bergmann, R.B., Vollertsen, F.: Distortion-free laser beam shaping for material processing using a digital micromirror device, to be published (2016)
Ren, Y.X., Lu, R.D., Gong, L.: Tailoring light with a digital micromirror device. Ann. Phys. 527(7–8), 447–470 (2015)
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Messaoudi, H., Vollertsen, F. (2017). Compact Module for Maskless and Simultaneous 2D Laser Chemical Machining. In: Wulfsberg, J., Sanders, A. (eds) Small Machine Tools for Small Workpieces. Lecture Notes in Production Engineering. Springer, Cham. https://doi.org/10.1007/978-3-319-49269-8_4
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DOI: https://doi.org/10.1007/978-3-319-49269-8_4
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