Abstract
Atomic force microscope (AFM) – is device widely used in many scientific fields for nano-scale surface scanning. AFM also can be used to probe mechanical stiffness, electrical conductance, resistivity, magnetism and other properties. The main limitation of AFM implementation is relatively low scanning speed. This speed depends from dynamical characteristics of AFM sensor and from surface roughness of scanned sample. Our research is focused on increasing scanning speed of AFM microscope assuming AFM mechanical sensor as sensitive dynamic system. Our proposed method enables increase of scanning speed by modifying some features of mechanical sensor by adding non-linear force to the surface of cantilever of AFM sensor. Proposed method is modelled theoretically using Simulink features. This paper presents research of mechanical sensor of AFM. After performed research, obtained results are presented on graphical form. At the end of paper discussion presented and conclusions are drawn.
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Bučinskas, V., Dzedzickis, A., Šutinys, E., Šešok, N., Iljin, I. (2017). Experimental Research of Improved Sensor of Atomic Force Microscope. In: Szewczyk, R., Kaliczyńska, M. (eds) Recent Advances in Systems, Control and Information Technology. SCIT 2016. Advances in Intelligent Systems and Computing, vol 543. Springer, Cham. https://doi.org/10.1007/978-3-319-48923-0_64
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DOI: https://doi.org/10.1007/978-3-319-48923-0_64
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