Abstract
This paper describes the development of a new serial sectioning system that has been designed to collect microstructural, crystallographic, and chemical information from volumes in excess of 1 mm3. The system integrates a robotic multi-platen mechanical polishing system with a modern SEM that enables the acquisition of multi-modal data—scanning electron images, EBSD and hyperspectral EDS map—at each section. Selected details of the system construction as well as an initial demonstration of the system capabilities are presented.
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© 2012 TMS (The Minerals, Metals & Materials Society)
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Uchic, M. et al. (2012). An Automated Multi-Modal Serial Sectioning System for Characterization of Grain-Scale Microstructures in Engineering Materials. In: De Graef, M., Poulsen, H.F., Lewis, A., Simmons, J., Spanos, G. (eds) Proceedings of the 1st International Conference on 3D Materials Science. Springer, Cham. https://doi.org/10.1007/978-3-319-48762-5_30
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DOI: https://doi.org/10.1007/978-3-319-48762-5_30
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-48573-7
Online ISBN: 978-3-319-48762-5
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