Simulation of FIB-SEM Images for Segmentation of Porous Microstructures
FIB tomography yields high quality 3D images materials microstructures at the nanometer scale combining serial sectioning using a focused ion beam with scanning electron microscopy (SEM). However, SEM images represent the projection of a slice of unknown thickness. In FIB tomography of highly porous media this leads to shine-through-artifacts preventing automatic segmentation of the solid component. To overcome these difficulties, we simulate the SEM process. Monte-Carlo techniques yield accurate results, but are too slow for FIB-SEM requiring hundreds of SEM images for one dataset. Nevertheless, a quasi analytic description of the specimen and acceleration techniques cut down the computing time by orders of magnitude, allowing the simulation of FIB-SEM data. Based on simulated FIB-SEM image data, segmentation methods for the 3D microstructure of highly porous media from the FIB-SEM data can be developed and evaluated. Finally successful segementation enables quantitative analysis and numerical simulations of macroscopic properties.
Keywordsscanning electron microscopy materials microstructures Boolean model FIB tomography quantitative analysis Monte-Carlo simulation
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