Simulation and Verification of Tip-Induced Polarization During Kelvin Probe Force Microscopy Measurements on Film Capacitors

  • D. A. Nielsen
  • V. N. PopokEmail author
  • K. Pedersen
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 186)


Kelvin probe force microscopy (KPFM) is widely used as characterization tool on functional heterostructures and components but it often suffers from measurement artifacts on such structures because the presence of the biased cantilever tip transforms the actual surface potential. In this work we have developed a physics-based finite element model of KPFM measurements on dielectrics in order to investigate the impact of tip-induced polarization. The model is compared with experiments on film capacitors, where it is found that tip-induced polarization is a significant contributor to the potential profiles obtained by KPFM.


Kelvin probe force microscopy Tip-induced polarization Electrostatic modelling 



This work is a part of the research activity within the Center of Reliable Power Electronics (CORPE) funded by the Innovation Fund Denmark.


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Copyright information

© Springer International Publishing AG 2017

Authors and Affiliations

  1. 1.Department of Physics and NanotechnologyAalborg UniversityAalborgDenmark

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