The SPM Scanner Head Based on Piezoelectric Unimorph Disc

Conference paper
Part of the Advances in Intelligent Systems and Computing book series (AISC, volume 519)


The piezoelectric unimorph discs have been recently proposed as a lateral/vertical actuator with nano-scale resolution to be used in a scanning probe microscope scanner head as an alternative for typically used piezo-tube scanners. Here, we reconsider this proposal by investigating deflections of the unimorph piezoelectric disc under voltage bias with a non-contact high resolution optical 3D profiler. The observation shows that high accuracy of X, Y, Z displacement is possible and that unimorph with two opposing electrodes deflects into tilted parabolic shape instead of expected S-shape.


Scanning probe microscope SPM Piezoelectric scanner Unimorph disk Optical profiler 


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Copyright information

© Springer International Publishing AG 2017

Authors and Affiliations

  1. 1.Institute of Metrology and Biomedical Engineering, Faculty of MechatronicsWarsaw University of TechnologyWarsawPoland

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