Abstract
Cross-coupling effect severely hinder fast and accurate tracking for parallel piezo nanopositioning stages. In this paper, a data-driven feedforward decoupling filter (DDFDF) is proposed to reduce the cross-coupling caused errors. Traditional control methods for coupled system could achieve good performance on the premise that the dynamic model is accurate and no non-minimum phase zeros exist. The proposed method is totally data-driven with the advantage of no need for accurate identified model and model structure by Gauss-Newton gradient-based algorithm. The DDFDF for eliminating cross-coupling errors was verified on a 2-DOF coupled nanopositioning stage through simulations. Results show the effectiveness of the proposed controller by comparing with open-loop simulations and the well-designed feedback controller.
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Acknowledgments
This research was sponsored by National Natural Science Foundation of China (NSFC, Grant No.51375349).
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Feng, Z., Ling, J., Ming, M., Xiao, X. (2016). Data-Driven Feedforward Decoupling Filter Design for Parallel Nanopositioning Stages. In: Kubota, N., Kiguchi, K., Liu, H., Obo, T. (eds) Intelligent Robotics and Applications. ICIRA 2016. Lecture Notes in Computer Science(), vol 9834. Springer, Cham. https://doi.org/10.1007/978-3-319-43506-0_61
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DOI: https://doi.org/10.1007/978-3-319-43506-0_61
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