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Research of Modified Mechanical Sensor of Atomic Force Microscope

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Part of the book series: Springer Proceedings in Mathematics & Statistics ((PROMS,volume 182))

Abstract

Atomic force microscope (AFM) is a remarkable device for nanoscale surface scanning. Among several positive features, speed of a scanning limits implementation of AFM. This paper proposes method that enables to increase a speed of scanning by modifying some features of mechanical sensor by adding a nonlinear force to lever of a mechanical sensor of AFM. Proposed method is modeled theoretically, using Simulink features by realizing original algorithm, and researched experimentally, using original modification of AFM sensor. Original results are obtained after a research is performed. Finally, comparison of results of original and modified AFM scans is made and corresponding conclusions are drawn.

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Correspondence to Vytautas Bučinskas .

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Bučinskas, V., Dzedzickis, A., Šešok, N., Šutinys, E., Iljin, I. (2016). Research of Modified Mechanical Sensor of Atomic Force Microscope. In: Awrejcewicz, J. (eds) Dynamical Systems: Theoretical and Experimental Analysis. Springer Proceedings in Mathematics & Statistics, vol 182. Springer, Cham. https://doi.org/10.1007/978-3-319-42408-8_4

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