MEMS System-Level Modeling and Simulation in Smart Systems

  • Gerold SchröpferEmail author
  • Gunar Lorenz
  • Arnaud Krust
  • Benoît Vernay
  • Stephen Breit
  • Alexandre Mehdaoui
  • Alessandro Sanginario


MEMS are miniaturized sensors or actuators and are essential to enabling “smart systems” to interact with their physical environment. These devices add the “ears,” “eyes,” “noses,” and “touch” to these systems. The system-level modeling of MEMS requires considering not only the multi-physical behavior of these devices but also their electronic readout circuitry and packaging. This chapter describes a methodology for MEMS system-level design and its implementation in commercially available software. We introduce the Coventor MEMS+® environment for creating system-aware MEMS models, an approach based on a library of 3-D, high-order parametric finite elements. Model-order reduction techniques are employed to reduce the complexity of the multi degree-of-freedom models, to speed up simulation time and to provide a path for designing MEMS together with electronic hardware. The influence of the package surrounding the MEMS device can be simulated by combining traditional finite element simulations with the new methodology of MEMS+. Finally, we discuss the virtual co-development of embedded software and MEMS hardware.


Integrate Circuit Proof Mass Hardware Description Language Integrate Circuit Design Reduction Matrix 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer International Publishing Switzerland 2016

Authors and Affiliations

  • Gerold Schröpfer
    • 1
    Email author
  • Gunar Lorenz
    • 1
  • Arnaud Krust
    • 1
  • Benoît Vernay
    • 1
  • Stephen Breit
    • 1
  • Alexandre Mehdaoui
    • 1
  • Alessandro Sanginario
    • 2
  1. 1.CoventorParisFrance
  2. 2.IITTorinoItaly

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