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MEMS—Micro-Electromechanical Sensors for the Internet of Everything

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CHIPS 2020 VOL. 2

Part of the book series: The Frontiers Collection ((FRONTCOLL))

Abstract

Automotive safety applications were the cradle of the MEMS market over many years. Their persistent improvement in cost and size launched the wide application of MEMS in consumer applications as well, starting from year 2009, outpassing in numbers the automotive MEMS volume within only 3 years. The consumer MEMS annual growth rate today is 18 %. Following a steep learning-curve, their form factor was reduced by more than 10-times within 5 years. Concurrently, cost, embodied materials and energy consumption of MEMS devices came down to an extent that basic integrated units contain now a multitude of sensors, with 9 degrees-of-freedom, by 2013. Virtually unlimited new applications which are strong in sensors emerge, enabling the Internet-of-Everything.

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References

  1. Marek, J., Gómez, U. M.: MEMS (Micro-Electro-Mechanical Systems) for automotive and consumer electronics, Chap. 14. In Hoefflinger, B. (ed), CHIPS 2020—A Guide to the Future of Nanoelectronics. Springer, Berlin (2012). doi:10.1007/978-3-642-23096-7_14

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  2. IHS iSupply MEMS Market Tracker—Q3 (2012)

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  3. Marek, J.: Emergence of sensor swarms for the Internet-of-Things, 23 Oct, 2013

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  4. Laermer, F.: BOSCH-DRIE shaping MEMS, Invited Keynote to Hiltonhead Workshop, June 2010

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With respect to any examples or hints given herein, any typical values stated herein and/or any information regarding the application of the device, Bosch Sensortec hereby disclaims any and all warranties and liabilities of any kind, including without limitation warranties of non-infringement of intellectual property rights or copyrights of any third party. The information given in this document shall in no event be regarded as a guarantee of conditions or characteristics. They are provided for illustrative purposes only and no evaluation regarding infringement of intellectual property rights or copyrights or regarding functionality, performance or error has been made.

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Correspondence to Jiri Marek .

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Marek, J., Hoefflinger, B., Gomez, UM. (2016). MEMS—Micro-Electromechanical Sensors for the Internet of Everything. In: Höfflinger, B. (eds) CHIPS 2020 VOL. 2. The Frontiers Collection. Springer, Cham. https://doi.org/10.1007/978-3-319-22093-2_15

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