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The Origin of Defects Induced in Ultra-Pure Germanium by Electron Beam Deposition

  • Sergio M. M. Coelho
  • Juan F. R. Archilla
  • F. Danie Auret
  • Jackie M. Nel
Chapter
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 221)

Abstract

The creation of point defects in the crystal lattices of various semiconductors by subthreshold events has been reported on by a number of groups. These observations have been made in great detail using sensitive electrical techniques but there is still much that needs to be clarified. Experiments using Ge and Si were performed that demonstrate that energetic particles, the products of collisions in the electron beam, were responsible for the majority of electron-beam deposition (EBD) induced defects in a two-step energy transfer process. Lowering the number of collisions of these energetic particles with the semiconductor during metal deposition was accomplished using a combination of static shields and superior vacuum resulting in devices with defect concentrations lower than \( 10^{11}\) cm\(^{-3}\), the measurement limit of our deep level transient spectroscopy (DLTS) system. High energy electrons and photons that samples are typically exposed to were not influenced by the shields as most of these particles originate at the metal target thus eliminating these particles as possible damage causing agents. It remains unclear how packets of energy that can sometimes be as small of 2 eV travel up to a \(\upmu \)m into the material while still retaining enough energy, that is, in the order of 1 eV, to cause changes in the crystal. The manipulation of this defect causing phenomenon may hold the key to developing defect free material for future applications.

Keywords

Energetic Particle Defect Concentration Phonon Spectrum Deep Level Transient Spectroscopy Harmonic Approximation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgments

This project has been financed by the South African National Research Foundation. J.F.R.A. acknowledges financial support from the project FIS2008-04848 from Ministerio de Ciencia e Innovación (MICINN).

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Copyright information

© Springer International Publishing Switzerland 2015

Authors and Affiliations

  • Sergio M. M. Coelho
    • 1
  • Juan F. R. Archilla
    • 2
  • F. Danie Auret
    • 1
  • Jackie M. Nel
    • 1
  1. 1.Department of PhysicsUniversity of PretoriaPretoriaSouth Africa
  2. 2.Group of Nonlinear PhysicsDepartamento de Física Aplicada I, Universidad de SevillaSevillaSpain

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