Abstract
Three-dimensional integrated circuits (3D-ICs), which contain multiple layers of active devices, have the potential to dramatically enhance chip performance, functionality, and device packing density. They also provide for microchip architecture and may facilitate the integration of heterogeneous materials, devices, and signals and offer a promising solution for reducing both silicon footprint and interconnect length without shrinking the transistors. However, before these advantages can be realized, key technology and CAD challenges of 3D-ICs must be addressed. More specifically, the process required to build circuits with multiple layers of active devices and CAD tools used for design and validation of such circuits. Several such methodologies and CAD tools associated with the design fabrication of 3-D ICs are discussed in this chapter. Few successful 3D-IC design methods and CAD tools and benefits of applying 3D design to the future reconfigurable systems are also discussed in this chapter.
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G. Moore, Cramming more components onto integrated circuits. Proc. IEEE 86(2), 82–85 (1998)
A. Rahman, A. Fan, J. Chung, R. Reif, Wire-length distribution of three-dimensional integrated circuits, in Proceedings of the IEEE International Interconnect Technology Conference, pp. 233–235, May 1999
A. Rahman, R. Reif, System level performance evaluation of three-dimensional integrated circuits. IEEE Trans. Very Large Scale (VLSI) Syst. 8, 671–678 (2000)
D. Stroobandt, J. Van Campenhout, Accurate interconnection lengths in three-dimensional computer systems. IEICE Trans. Inform. Syst. Spec. Issue Phys. Des. Deep Sub-micron 10(1), 99–105 (2000)
J.W. Joyner, Impact of three-dimensional architectures on interconnects in gigascale integration. IEEE Trans. Very Large Scale (VLSI) Syst. 9, 922–928 (2001)
J.W. Joyner, P. Zarkesh-Ha, J.D. Meindl, A Stochastic global net-length distribution for a three-dimensional system-on-a-chip (3D-SoC), in Proceedings IEEE International ASIC/SOC Conference, pp. 147–151, Sep 2001
R. Zhang, K. Roy, C.-K. Koh, D.B. Janes, Stochastic interconnect modeling, power trends, and performance characterization of 3-D circuits. IEEE Trans. Elect. Devices 48, 638–652 (2001)
J.W. Joyner, J.D. Meindl, Opportunities for reduced power distribution using three-dimensional integration, in Proceedings of the IEEE International Interconnect Technology Conference, pp. 148–150, June 2002
B.S. Cherkauer, E.G. Friedman, A unified design methodology for CMOS tapered buffers. IEEE Trans. Very Large Scale (VLSI) Syst. 3, 99–111 (1995)
K. Banerjee, S.K. Souri, P. Kapour, K.C. Saraswat, 3D-ICs: A novel chip design paradigm for improving deep-submicrometer interconnect performance and systems-on-chip integration. Proc. IEEE 89, 602–633 (2001)
M. Koyanagi et al., Future system-on-silicon LSI chips. IEEE Micro 18, 17–22 (1998)
V.K. Jain, S. Bhanja, G.H. Chapman, L. Doddannagari, A highly reconfigurable computing array: DSP plane of a 3D heterogeneous SoC, in Proceedings of the IEEE International System on Chip Conference, pp. 243–246, Sep 2005
V.F. Pavlidis, E.G. Friedman, Three-Dimensional Integrated Circuit Design Morgen Kaufmann (2009). ISBN: 978-0-12-374343-5
R.J. Gutmann et al., Three-dimensional (3D) ICs: a technology platform for integrated systems and opportunities for new polymeric adhesives, in Proceedings of IEEE International Conference on Polymers Adhesives Microelectron. Photon, pp. 173–180, Oct 2001
M. Healy et al., Multiobjective microarchitectural floorplanning for 2-D and 3-D ICs. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 26, 38–52 (2007)
P. Garrou, C. Bower, P. Ramm, Handbook of 3D Integration (Wiley-VCH, New York, 2008). ISBN: 978-3-527-32034-9
R. Tummula, M. Swaminathan, System-On-Package: Miniaturization of the Entire System (McGraw-Hill, New York, 2008)
J.H. Lau, Critical issues of 3D IC integration, IMAPS transactions. J. Microelectron. Electron. Packag. (First Quarter Issue), 35–43 (2010)
J.H. Lau, Heart and Soul of 3D IC Integration, posted at 3D InCites on June 29 (2010), http://www.semineedle.com/posting/34277. Accessed 29 June 2010
K.W. Guarini, A.T. Topol, M. Ieong, R. Yu, L. Shi, M.R. Newport, D.J. Frank, Electrical integrity of state-of-the-art 0.13\(\upmu \)m SOI CMOS devices and circuits transferred for Three-dimensional (3D) Integrated Circuit (IC) fabrication, in IEDM Technical Digest, pp. 943–945, 2002
R. Berridge, R.M. Averill III, A.E. Barish, M.A. Bowen, P.J. Camporese, J. DiLullo, P.E. Dudley, IBM POWER6 microprocessor physical design and design methodology. IBM J. Res. Dev. 51(6), 685–714 (2007)
Y. Orii, T. Nishio, Ultra-thin POP technologies using 50 \(\mu \)m pitch flip chip C4 interconnections, in Presented at the Electronic Components and Technology Conference (ECTC) (Reno, NV, 2007)
J.J.Q. Lu, R. Gutmann, T. Matthias, P. Lindner, Aligned wafer bonding for 3-D interconnect, http://www.reed-electronics.com/semiconductor/article/CA630263. Accessed Aug 2005
K. Takahaski, Y. Taguchi, M. Tomisaka, H. Yonemara, M. Hoshino, M. Ueno, Y. Egawa, Process integration of 3D chip stack with vertical interconnection, in Proceedings of the 54th Electronic Components and Technology Conference, pp. 601–609, 1–4 June 2004
M. Umemoto, K. Tanida, Y. Nemoto, M. Hoshino, K. Kojima, Y. Shirai, K. Takahashi, High performance vertical interconnection for high-density 3D chip stacking package. in Proceedings of the 54th Electronic Components and Technology Conference, pp. 616–623, 1–4 June 2004
M. Feil, C. Adler, D. Hemmetzberger, M. Konig, K. Bock, The challenge of ultra thin chip assembly, in Proceedings of the 54th Electronic Components and Technology Conference, pp. 35–40, 1–4 June 2004
M. Hutter, F. Hohnke, H. Oppermann, M. Klein, and G. Engelmann, Assembly and reliability of flip chip solder joints using miniaturized Au/Sn bumps, in Proceedings of the 54th Electronic Components and Technology Conference, pp. 49–57 (2004)
V. Kripeshm, S. Yoon, S.W. Yoon, V.P. Ganesh, N. Khan, M.D. Rotaru, W. Fang, M.K. Iyer, Three-dimensional system-in-package using stacked silicon platform technology. IEEE Trans. Adv. Packag. 28(3), 377–386 (2005)
H. Ikeda, M. Kawano, T. Mitsuhashi, Stacked memory chip technology development, in SEMI Technology Symposium (STS) 2005 Proceedings, Session 9, pp. 37–42 (2005)
S. Gupta, M. Hilbert, S. Hong, R. Patti, Techniques for Producing 3D ICs with High-Density Interconnect (Tezzaron Semiconductor Naperville, IL, 2005)
R. Patti, Advances in 3D memory and logic devices, in IMAPS International Conference on Device Packaging, TAI3 (Scottsdale, AZ, 2010)
D. Min Jang, C. Ryu, K. Yong Lee, B. Hoon Cho, J. Kim, T. Sung Oh, W. Jong Lee, J. Yu, Development and evaluation of 3-D SiP with vertically interconnected Through Silicon Vias (TSV), in Proceedings 57th Electronic Components and Technology Conference, ECTC-07, Reno, NV, pp. 847–852 (2007)
M. Sadaka, I. Radu, L. di Cioccio, 3D Integration: advantages, enabling technologies and applications, in IEEE International Conference on IC Design and Technology (ICICDT), Grenoble, France, pp. 106–109 (2010)
S.J. Koester et al., Wafer level 3D integration technology. IBM J. Res. Technol. IBM Res. Dev. 52(6), 585–597 (2008)
D.E. Goldberg et al., Genetic Algorithms in Search, Optimization, and Machine Learning (Addison-Wesley, Reading, 1989)
A. Harter et al., Three-Dimensional Integrated Circuit Layout (Cambridge University Press, Cambridge, 1991)
C. Ryu et al., High frequency electrical circuit model of chip-to-chip vertical via interconnection for 3-D chip stacking package, in Proceedings of IEEE Topical Meeting Electrical Performance of Electronic Packaging, pp. 151–154, Oct 2005
D.M. Jang et al., Development and evaluation of 3-D SiP with Vertically Interconnected Through Silicon Vias (TSV), in Proceedings of the IEEE International Electronic Components Technology Conference, pp. 847–850, June 2007
V.F. Pavlidis, E.G. Friedman, Interconnect delay minimization through interlayer via placement in 3-D ICs, in Proceedings of the ACM Great Lakes Symposium on VLSI, pp. 20–25, Apr 2005
S. Tayu, S. Ueno, On the complexity of three-dimensional channel routing, in Proceedings of the IEEE International Symposium on Circuits Systems, pp. 3399–3402, May 2007
C. Addo-Quaye, Thermal-aware mapping and placement for 3-D NoC designs, in Proceedings of the IEEE International SOC Conference, pp. 25–28, Sep 2005
D. Hyun Kim, S. Mukhopadhyay, S. Kyu Lim, Through-silicon-via aware interconnect prediction and optimization for 3D stacked ICs, in ACM/IEEE International Workshop on System Level Interconnect Prediction (2009)
J.U. Knickerbocker et al., Three-dimensional silicon integration. IBM J. Res. Dev. 52(6) (2008)
T.-Y. Chiang, S.J. Souri, C.O. Chui, K.C. Saraswat, Thermal analysis of heterogeneous 3D-ICs with various integration scenarios, in Proceedings of IEEE International Electron Devices Meeting, pp. 681–684, Dec 2001
C.C. Liu, J. Zhang, A.K. Datta, S. Tiwari, Heating effects of clock drivers in bulk, SOI, and 3D CMOS. IEEE Trans. Elect. Device Lett. 23(12), 716–728 (2002)
G. Digele, S. Lindenkreuz, E. Kasper, Fully coupled dynamic electro-thermal simulation, IEEE Trans. Very Large Scale (VLSI) Syst. 5, 250–257 (1997)
Z. Tan, M. Furmanczyk, M. Turowski, A. Przekwas, CFD-micromesh: a fast geometrical modeling and mesh generation tool for 3D microsystem simulations, in Proceedings of the International Conference on Modeling Simulation Microsystems, pp. 712–715, March 2000
P. Wilkerson, M. Furmanczyk, M. Turowski, Compact thermal model analysis for 3-D integrated circuits, in Proceedings of the International Conference on Mixed Design Integration of Circuits Systems, pp. 277–282, June 2004
M.B. Kleiner, S.A. Kahn, P. Ramn, W. Weber, Thermal analysis of vertically integrated circuits, in Proceedings of IEEE International Electron Devices Meeting, pp. 487–490, Dec 1995
T. Zhang, Y. Zhang, S. Sapatnekar, Temperature-aware routing in 3D-ICs, in Proceedings of the IEEE Asia South Pacific Design Automation Conference, pp. 309–314, Jan 2006
X. Zhao, D. Lewis, H.H.S. Lee, S. Kyu Lim, Pre-bond testable low-power clock tree design for 3D stacked ICs, in IEEE International Conference on Computer-Aided Design (2009)
J. Yang, K. Athikulwongse, Y.J. Lee, S. Kyu Lim, D. Pan, TSV stress aware timing analysis with applications to 3D-IC layout optimization, in ACM Design Automation Conference (2010)
R.H.J.M. Otten et al., Automatic floorplan design, in Proceedings of IEEE/ACM Design Automation Conference, pp. 261–267, June 1982
X. Hong et al., Corner block list: an effective and efficient topological representation of non-slicing floorplan, in Proceedings IEEE/ACM International Conference on Computer-Aided Design, pp. 8–11, Nov 2000
E.F.Y. Yong, C.C.N. Chu, C.S. Zion, Twin binary sequences: a non-redundant representation for general non-slicing floorplan. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 22, 457–469 (2003)
H. Yamazaki, K. Sakanushi, S. Nakatake, Y. Kajitani, The 3D-packing by meta data structure and packing heuristics. IEICE Trans. Fundam. Electron. Commun. Comput. Sci. E83-A(4), 639–645 (2000)
Y. Deng, W.P. Maly, Interconnect characteristics of 2.5-D system integration scheme, in Proceedings of the IEEE International Symposium Physical Design, pp. 341–345, Apr 2001
L. Cheng, L. Deng, D.F. Wong, Floorplanning for 3-D VLSI design, in Proceedings of the IEEE International Asia South Pacific Design Automation Conference, pp. 405–411, Jan 2005
Z. Li et al., Hierarchical 3D floorplanning algorithm for wire length optimization. IEEE Trans. Circuits Syst. I Regul. Pap. 53(12), 2637–2646 (2006)
P. Zhou, Y. Ma, Z. Li, R. Dick, L. Shang, H. Zhou, X. Hong, Q. Zhou, 3D-STAF: scalable temperature and leakage aware floorplanning for three-dimensional integrated circuits, in Proceedings of the ICCAD, pp. 590–597 (2007)
J. Cong, J. Wie, Y. Zhang, A thermal-driven floorplanning algorithm for 3D-ICs, in Proceedings of ICCAD, pp. 306–313 (2004)
L. Cheng, L. Deng, M.D.F. Wong, Floorplanning for 3D-VLSI design, in IEEE International Asia South Pacific Design Automation Conference (ASPDAC), pp. 405–411 (2005)
M.W. Newman et al., Fabrication and electrical characterization of 3D vertical interconnects, in Proceedings of the IEEE International Electronic Components Technology Conference, pp. 394–398, June 2006
W.-C. Lo et al., An innovative chip-to-wafer and wafer-to-wafer stacking, in Proceedings of the IEEE International Electronic Components Technology Conference, pp. 409–414, June 2006
B. Goplen, S. Sapatnekar, Placement of thermal vias in 3D-ICs using various thermal objectives. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 25, 692–709 (2006)
M. Ohmura et al., An initial placement algorithm for 3D VLSI, in Proceedings of IEEE International Symposium on Circuits Systems, vol. IV, pp. 195–198, May 1998
T. Tanprasert et al., An analytical 3D placement that preserves routing space, in Proceedings of the IEEE International Symposium on Circuits Systems, vol. III, pp. 69–72, May 2000
Y. Deng, W.P. Maly, Interconnect characteristics of 2.5D system integration scheme, in Proceedings of the ACM International Symposium on Physical Design, pp. 171–175, Apr 2001
I. Kaya, M. Olbrich, E. Barke, 3D Placement considering vertical interconnects, in Proceedings of the IEEE International SOC Conference, pp. 257–258, Sep 2003
S.T. Obenaus, T.H. Szymanski, Gravity: fast placement for 3-D VLSI. ACM Trans. Des. Autom. Electron. Syst. 8(3), 298–315 (2003)
W.R. Davis et al., Demystifying 3D-ICs: the pros and cons of going vertical. IEEE Des. Test Comput. 22 (2005)
H. Eisenmann, F.M. Johannnes, Generic global placement and floorplanning, in Proceedings of IEEE/ACM Design Automation Conference, pp. 269–274, June 1998
B. Goplen, S. Sapatnekar, Efficient thermal placement of standard cells in 3D-ICs using a force directed approach, in Proceedings of the IEEE/ACM International Conference on Computer-Aided Design, pp. 86–89, Nov 2003
MCNC Benchmarks, http://er.cs.ucla.edu/benchmarks/ibm-place
IBM-PLACE Benchmarks, http://www.cbl.ncsu.edu/pub/Benchmark_dirs/LayoutSynth92
B. Black et al., Die stacking (3D) microarchitecture, Proceedings of IEEE/ACM International Symponsium on Micro-architecture, pp. 469–479, Dec 2006
B. Goplen, S. Sapatnekar, Thermal via placement in 3D-ICs, in ISPD, pp. 167–174 (2005)
Z. Li et al., Efficient thermal via planning approach and its application in 3D floorplanning. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 26, 645–658 (2007)
R.J. Enbody, G. Lynn, K.H. Tan, Routing the 3D chip, in Proceedings of IEEE/ACM Design Automation Conference, pp. 132–137, June 1991
C.C. Tong, C. Wu, Routing in a three-dimensional chip. IEEE Trans. Comput. 44(1), 106–117 (1995)
J. Minz, S.K. Lim, Block-level 3D global routing with an application to 3D packaging. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 25, 2248–2257 (2006)
A. Hashimoto, J. Stevens, Wire routing by optimizing channel assignment within large apertures, in Proceedings of IEEE/ACM Design Automation Conference, pp. 155–169, June 1971
T. Ohtsuki, E. HorbstT, Advances in CAD for VLSI: Logic Design and Simulation (The University of Michigan, North-Holland, 1986). ISBN: 444878920, 9780444878922
J. Cong, M. Xie, Y. Zhang, An enhanced multilevel routing system, in Proceedings of the IEEE/ACM International Conference on Computer-Aided Design, pp. 51–58, Nov 2002
J. Cong, Y. Zhang, Thermal driven multilevel routing for 3D-ICs, in Proceedings of the IEEE Asia and South Pacific Design Automation Conference, pp. 121–126, June 2005
J. Cong, Y. Zhang, Thermal via planning for 3D-ICs, in Proceedings of the IEEE/ACM International Conference on Computer-Aided Design, pp. 744–751, Nov 2005
D. Milojevic, R. Radojcic, R. Carpenter, P. Marchal, Pathfinding: a design methodology for fast exploration and optimisation of 3D-stacked integrated circuits, in International Symposium on System-on-Chip, 2009. SOC 2009, pp. 118–123 (2009)
M. Hogan, D. Petranovic, Robust verification of 3D-ICs: Pros, Cons and Recommendations, in IEEE International Conference on 3D System Integration, 2009. 3DIC, pp. 1–6, 28–30 Sept 2009
J.H. Wu, Through-substrate Interconnects for 3-D Integration and RF systems. Ph.D. dissertation, MIT, Cambridge, MA, Oct 2006
I. Savidis, E.G. Friedman, Electrical modeling and characterization of 3-D vias, in Proceedings of the IEEE International Symposium on Circuits Systems, pp. 784–787, May 2008
I. Savidis, E.G. Friedman, Closed-form expressions of 3-D via resistance, inductance,and capacitance. IEEE Trans. Electron Devices 56(9), 1873–1881 (2009)
D. Hyun Kim, K. Athikulwongse, S. Kyu Lim, A study of through-silicon-via impact on the 3D stacked IC layout, in IEEE International Conference on Computer-Aided Design (2009)
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Pangracious, V., Marrakchi, Z., Mehrez, H. (2015). Three-Dimensional Integration: A More Than Moore Technology. In: Three-Dimensional Design Methodologies for Tree-based FPGA Architecture. Lecture Notes in Electrical Engineering, vol 350. Springer, Cham. https://doi.org/10.1007/978-3-319-19174-4_2
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