Abstract
Nanoindentation tests were conducted on chromium nitride thin films deposited on two different substrates: silicon and Zr-based metallic glass. The coatings have a thickness of 300 nm and are deposited by RF sputtering using a chromium target. The plastic deformation of the CrN coatings were investigated by cyclic indentation tests at various loading rates. The plastic behaviour was studied in the case of the two used substrates. It is shown that the films deposited on silicon substrate show higher values of hardness and reduced elastic modulus as well as an increase of the plastic and wear resistance with the indentation depth. Furthermore, we found that these CrN films deposited on silicon substrate exhibit higher irreversible plastic deformation compared to the films prepared on bulk metallic glass substrate under cyclic indentation tests conducted at low loading rate of 100μN/s.
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Jellad, A. (2015). A Study of the Plastic Deformation of CrN Coatings Deposited by RF Sputtering. In: Chouchane, M., Fakhfakh, T., Daly, H., Aifaoui, N., Chaari, F. (eds) Design and Modeling of Mechanical Systems - II. Lecture Notes in Mechanical Engineering. Springer, Cham. https://doi.org/10.1007/978-3-319-17527-0_36
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DOI: https://doi.org/10.1007/978-3-319-17527-0_36
Publisher Name: Springer, Cham
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