Axis Cross-Coupling Reduction on a High Bandwidth XY Flexure Stage
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Flexure stages are widely used in the field of micro and nanopositioning because of their repeatability and precision, which is due to the lack of joints that induces uncertainty. In the present Twork, a XY flexure stage has been analyzed and redesigned to reduce the axis cross-coupling, which is due to a parasitic motion in the amplification stage of the mechanism. The performed modifications result in a high reduction of the undesired motion, while maintaining a similar amplification and natural frequencies. The main advantage of the redesign is that the cross-coupling reduction is achieved mechanically, instead of using the position control loops.
KeywordsMicro/Nanopositioning Flexure stage Compliant mechanisms Mechatronics
The authors of this paper wish to acknowledge the finance received from the Spanish Government via the Ministerio de Educacion y Ciencia (Project DPI2011-22955), the ERDF of the European Union, the Government of the Basque Country (Project GIC07/78, IT445-10), and the University of the Basque Country (Project EHUA13/30 and ZABALDUZ program). Thanks are also addressed to Mikel Abasolo for his assessments regarding the use of ANSYS and meshing and to EGILE Corporation XXI for their high valuable recommendations.
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