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Atmospheric PECVD Growth of Vertically-Oriented Graphene

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Vertically-Oriented Graphene

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Abstract

Vertically-oriented graphene (VG) sheets have the potential for many exciting energy and environmental applications due to their unique morphology and properties. However, it is necessary to realize the large-scale synthesis of this novel material at a low cost before we can make it economically viable for its widespread applications. It is theoretically suggested and experimentally proven that the productivity of VG is dependent on pressure, and atmospheric pressure growth could improve the efficiency and lower the cost of VG production. In the first part of this chapter, we examine how the operating pressure affects the VG production in the plasma-enhanced chemical vapor deposition (PECVD). It is also important to have the capability to grow VG on different substrates so that VG can be integrated into devices/systems for specific applications. Fortunately, the successful synthesis of VG on different substrates in PECVD processes has been realized, which is introduced in the second part of this chapter.

Part of this chapter was adapted from our review article “Plasma-Enhanced Chemical Vapor Deposition Synthesis of Vertically-oriented Graphene Nanosheets,” Nanoscale, 5(12), 5180–5204, 2013 (DOI: 10.1039/C3NR33449J)—Reproduced by permission of The Royal Society of Chemistry.

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Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, Department of Materials Science and Engineering, University of Wisconsin-Milwaukee, Milwaukee, WI, USA

    Junhong Chen

  2. State Key Laboratory of Clean Energy Utilization, College of Energy Engineering, Zhejiang University, Hangzhou, Zhejiang, China

    Zheng Bo

  3. Department of Mechanical Engineering, University of Alaska Anchorage, Anchorage, AK, USA

    Ganhua Lu

Authors
  1. Junhong Chen
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  2. Zheng Bo
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  3. Ganhua Lu
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Correspondence to Junhong Chen .

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Chen, J., Bo, Z., Lu, G. (2015). Atmospheric PECVD Growth of Vertically-Oriented Graphene. In: Vertically-Oriented Graphene. Springer, Cham. https://doi.org/10.1007/978-3-319-15302-5_5

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