Recent progresses in R&D of methods to fabricate inch-sized diamond wafers

  • Hideaki Yamada
  • Akiyoshi Chayahara
  • Yoshiaki Mokuno
  • Nobuteru Tsubouchi
  • Shin-ichi Shikata
Chapter

Abstract

To realize industrial use of excellent characteristics of single-crystal diamond, we have developed techniques to fabricate the wafers with inch-size area. Artificial growth of the bulk crystals and a lift-off process to synthesize the freestanding wafers from the seed wafers can be successfully conducted. In this paper, motive forces of our research as well as presented status of related techniques are briefly summarized, as well as our recent progresses.

Keywords

Single crystal diamond Wide band gap materials Microwave plasma Inch size wafer Lift-off process with ion implantation 

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Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  • Hideaki Yamada
    • 1
  • Akiyoshi Chayahara
    • 1
  • Yoshiaki Mokuno
    • 1
  • Nobuteru Tsubouchi
    • 1
  • Shin-ichi Shikata
    • 1
  1. 1.Diamond Research LaboratoryNational Institute of Advanced Industrial Science and Technology (AIST)IkedaJapan

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