Abstract
In recent years the distribution of Lab-on-a-chip devices as well as micro-total analysis systems in applications such as analytical chemistry, biochemistry, biotechnology, microsystems technology, or clinical diagnostics has increased significantly. In order to allow multiple assays to be carried out on this devices components that enable fast tests and quantitative measurements are needed. The first systems which fulfilled these requirements were paper based devices. The development of these systems was based on chromatographic techniques. The basic principle is already known as so termed spot tests since the 1930s. The trend to take more and more applications out of the laboratory to the user started the development of a large number of platforms for point of care devices. These platforms can be driven by different ways, e.g., pressure, capillary flow, or electro kinetic effects. Complex applications need additional fluidic components such as pumps, valves, sensors, or mixers. In this chapter different fluidic platforms as well as fluidic components will be described. Applications of platforms and integrated components are exemplarily demonstrated by means of case studies.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Similar content being viewed by others
References
Abe K, Kotera K, Suzuki K, Citterio D (2010) Inkjet-printed paperfluidic immuno-chemical sensing device. Anal Bioanal Chem 398(2):885–893
Abe K, Suzuki K, Citterio D (2008) Inkjet-printed microfluidic multianalyte chemical sensing paper. Anal Chem 80(18):6928–6934
Adams ML, Johnston ML, Scherer A, Quake SR (2005) Polydimethylsiloxane based microfluidic diode. J Micromech Microeng 15(8):1517
Ahmed D, Mao X, Juluri BK, Huang TJ (2009) A fast microfluidic mixer based on acoustically driven sidewall-trapped microbubbles. Microfluid Nanofluid 7(5):727–731
Ahn CH, Allen MG (1995) Fluid micropumps based on rotary magnetic actuators. In: IEEE micro electro mechanical systems workshop (MEMS’95), Amsterdam, Netherlands. IEEE, Washington, DC, pp 408–412
Ahn CH, Jin-Woo C, Beaucage G, Nevin JH, Jeong-Bong L, Puntambekar A, Lee JY (2004) Disposable smart lab on a chip for point-of-care clinical diagnostics. Proc IEEE 92(1):154–173
Ahn S-H, Kim Y-K (1997) Fabrication and experiment of planar micro ion drag pump. In: International conference on solid state sensors and actuators, 1997 TRANSDUCERS’97 Chicago, 1997. IEEE, Washington, DC, pp 373–376
Anderson RC, Bogdan GJ, Bamiv Z, Dawes TD, Winkler J, Roy K (1997) Microfluidic bischemical analysis system. In: Transducers 1997 - international conference on solid state sensors and actuators, 16–19 Jun 1997. IEEE, Washington, DC, pp 477–480. doi:10.1109/SENSOR.1997.613690
Andersson H, van der Wijngaart W, Enoksson P, Stemme G (2000) Micromachined flow-through filter-chamber for chemical reactions on beads. Sensors Actuators B Chem 67(1–2):203–208
Andersson H, van der Wijngaart W, Griss P, Niklaus F, Stemme G (2001a) Hydrophobic valves of plasma deposited octafluorocyclobutane in DRIE channels. Sens Actuators B 75(1–2):136–141
Andersson H, van der Wijngaart W, Nilsson P, Enoksson P, Stemme G (2001b) A valve-less diffuser micropump for microfluidic analytical systems. Sens Actuators B 72(3):259–265
Andersson H, van der Wijngaart W, Stemme G (2001c) Micromachined filter-chamber array with passive valves for biochemical assays on beads. Electrophoresis 22(2):249–257
Atten P, Seyed-Yagoobi J (2003) Electrohydrodynamically induced dielectric liquid flow through pure conduction in point/plane geometry. IEEE Trans Dielectr Electr Insul 10(1):27–36
Bae B, Kee H, Kim S, Lee Y, Sim T, Kim Y, Park K (2003) In vitro experiment of the pressure regulating valve for a glaucoma implant. J Micromech Microeng 13(5):613
Baldi A, Gu YD, Loftness PE, Siegel RA, Ziaie B (2003) A hydrogel-actuated environmentally sensitive microvalve for active flow control. J Microelectromech Syst 12(5):613–621
Barbaro M, Bonfiglio A, Raffo L, Alessandrini A, Facci P, BarakBarak I (2006) A CMOS, fully integrated sensor for electronic detection of DNA hybridization. IEEE Electron Device Letters 27(7):595–597
Bart SF, Tavrow LS, Mehregany M, Lang JH (1990) Microfabricated electrohydrodynamic pumps. Sensors Actuators A Phys 21(1):193–197
Barth PW (1995) Silicon microvalves for gas flow control. In: The 8th international conference on solid-state sensors and actuators, Eurosensors IX, Transducers’95, 25–29 Jun 1995. IEEE, Washington, DC, pp 276–279. doi:10.1109/SENSOR.1995.721799
Bau HH, Zhong J, Yi M (2001) A minute magneto hydro dynamic (MHD) mixer. Sens Actuators B 79(2):207–215
Beebe DJ, Moore JS, Bauer JM, Yu Q, Liu RH, Devadoss C, Jo B-H (2000) Functional hydrogel structures for autonomous flow control inside microfluidic channels. Nature 404(6778):588–590
Belgrader P, Okuzumi M, Pourahmadi F, Borkholder DA, Northrup MA (2000) A microfluidic cartridge to prepare spores for PCR analysis. Biosens Bioelectron 14(10):849–852
Benard WL, Kahn H, Heuer AH, Huff MA (1998) Thin-film shape-memory alloy actuated micropumps. J Microelectromech Syst 7(2):245–251
Berger M, Welle A, Gottwald E, Rapp M, Länge K (2010) Biosensors coated with sulfated polysaccharides for the detection of hepatocyte growth factor/scatter factor in cell culture medium. Biosens Bioelectron 26(4):1706–1709
Berglund RN, Liu BYH (1973) Generation of monodisperse aerosol standards. Environ Sci Technol 7(2):147–153
Berthier E, Beebe DJ (2007) Flow rate analysis of a surface tension driven passive micropump. Lab Chip 7(11):1475–1478
Bessoth F, deMello AJ, Manz A (1999) Microstructure for efficient continuous flow mixing. Anal Commun 36(6):213–215
Biddiss E, Erickson D, Li D (2004) Heterogeneous surface charge enhanced micromixing for electrokinetic flows. Anal Chem 76(11):3208–3213
Bien DCS, Mitchell SJN, Gamble HS (2003) Fabrication and characterization of a micromachined passive valve. J Micromech Microeng 13(5):557
Bocong Y, Boxiong W, Werner Karl S (2010) A thermopneumatically actuated bistable microvalve. J Micromech Microeng 20(9):095024
Böhm S, Olthuis W, Bergveld P (1999a) An integrated micromachined electrochemical pump and dosing system. Biomed Microdevices 1(2):121–130
Böhm S, Olthuis W, Bergveld P (1999b) A plastic micropump constructed with conventional techniques and materials. Sensors Actuators A Phys 77(3):223–228
Bökenkamp D, Desai A, Yang X, Tai Y-C, Marzluff EM, Mayo SL (1998) Microfabricated silicon mixers for submillisecond quench-flow analysis. Anal Chem 70(2):232–236
Branebjerg J, Gravesen P, Krog JP, Nielsen CR (1996) Fast mixing by lamination. In: The ninth annual international workshop on micro electro mechanical systems, 1996, MEMS’96, Proceedings. An investigation of micro structures, sensors, actuators, machines and systems. IEEE, Washington, DC, pp 441–446
Branebjerg J, Jensen OS, Laursen NG, Leistiko O, Soeberg H (1991) A micromachined flow sensor for measuring small liquid flows. In: Transducers 1991 - international conference on solid-state sensors and actuators, 24–27 June 1991. IEEE, Washington, DC, pp 41–44. doi:10.1109/SENSOR.1991.148793
Brody JP, Yager P (1997) Diffusion-based extraction in a microfabricated device. Sensors Actuators A Phys 58(1):13–18
Burns MA, Mastrangelo CH, Sammarco TS, Man FP, Webster JR, Johnsons B, Foerster B, Jones D, Fields Y, Kaiser AR (1996) Microfabricated structures for integrated DNA analysis. Proc Natl Acad Sci 93(11):5556–5561
Burtis CA, Mailen JC, Johnson WF, Scott CD, Tiffany TO, Anderson NG (1972) Development of a miniature fast analyzer. Clin Chem 18(8):753–761
Carlen ET, Mastrangelo CH (2002) Surface micromachined paraffin-actuated microvalve. J Microelectromech Syst 11(5):408–420
Carrozza MC, Croce N, Magnani B, Dario P (1995) A piezoelectric-driven stereolithography-fabricated micropump. J Micromech Microeng 5(2):177
Clausell-Tormos J, Lieber D, Baret J-C, El-Harrak A, Miller OJ, Frenz L, Blouwolff J, Humphry KJ, Köster S, Duan H (2008) Droplet-based microfluidic platforms for the encapsulation and screening of mammalian cells and multicellular organisms. Chem Biol 15(5):427–437
Colgate E, Matsumoto H (1990) An investigation of electrowetting‐based microactuation. J Vac Sci Technol A 8(4):3625–3633
Crevillén AG, Hervás M, López MA, González MC, Escarpa A (2007) Real sample analysis on microfluidic devices. Talanta 74(3):342–357
Curcio M, Roeraade J (2002) Continuous segmented-flow polymerase chain reaction for high-throughput miniaturized DNA amplification. Anal Chem 75(1):1–7
Chakraborty I, Tang WC, Bame DP, Tang TK (2000) MEMS micro-valve for space applications. Sensors Actuators A Phys 83(1–3):188–193
Chen C-H, Santiago JG (2002) A planar electroosmotic micropump. J Microelectromech Syst 11(6):672–683
Chen IJ, Eckstein EC, Lindner E (2009) Computation of transient flow rates in passive pumping micro-fluidic systems. Lab Chip 9(1):107–114
Chen JZ, Darhuber AA, Troian SM, Wagner S (2004) Capacitive sensing of droplets for microfluidic devices based on thermocapillary actuation. Lab Chip 4(5):473–480
Chen ZY, Wang J, Qian SZ, Bau HH (2005) Thermally-actuated, phase change flow control for microfluidic systems. Lab Chip 5(11):1277–1285
Cheng C-M, Martinez AW, Gong J, Mace CR, Phillips ST, Carrilho E, Mirica KA, Whitesides GM (2010) Paper-based ELISA. Angew Chem Int Ed 49(28):4771–4774
Cheung K, Gawad S, Renaud P (2005) Impedance spectroscopy flow cytometry: on‐chip label‐free cell differentiation. Cytometry A 65(2):124–132
Chin CD, Linder V, Sia SK (2012) Commercialization of microfluidic point-of-care diagnostic devices. Lab Chip 12(12):2118–2134
Cho HJ, Oh KW, Ahn CH, Boolchand P, Tae-Chul N (2001) Stress analysis of silicon membranes with electroplated permalloy films using Raman scattering. IEEE Trans Magn 37(4):2749–2751
Cho ST, Wise KD (1993) A high-performance microflowmeter with built-in self test. Sensors Actuators A Phys 36(1):47–56
Choi J-W, Oh K, Han A, Wijayawardhana CA, Lannes C, Bhansali S, Schlueter K, Heineman W, Halsall HB, Nevin J, Helmicki A, Henderson HT, Ahn C (2001) Development and characterization of microfluidic devices and systems for magnetic bead-based biochemical detection. Biomed Microdevices 3(3):191–200
Choi K, Ng AH, Fobel R, Wheeler AR (2012) Digital microfluidics. Annu Rev Anal Chem 5:413–440
Chou H-P, Unger M, Quake S (2001) A microfabricated rotary pump. Biomed Microdevices 3(4):323–330
Chow AW (2002) Lab-on-a-chip: opportunities for chemical engineering. AIChE J 48(8):1590–1595
Chung S, Kim J, Wang K, Han D-C, Chang J-K (2003) Development of MEMS-based cerebrospinal fluid shunt system. Biomed Microdevices 5(4):311–321
Darabi J, Rada M, Ohadi M, Lawler J (2002) Design, fabrication, and testing of an electrohydrodynamic ion-drag micropump. J Microelectromech Syst 11(6):684–690
Dario P, Croce N, Carrozza MC, Varallo G (1996) A fluid handling system for a chemical microanalyzer. J Micromech Microeng 6(1):95
Dasgupta PK, Liu S (1994) Auxiliary electroosmotic pumping in capillary electrophoresis. Anal Chem 66(19):3060–3065
Davidsson R, Genin F, Bengtsson M, Laurell T, Emnéus J (2004) Microfluidic biosensing systems Part I. Development and optimisation of enzymatic chemiluminescent μ-biosensors based on silicon microchips. Lab Chip 4(5):481–487
de Jong J, Lammertink RGH, Wessling M (2006) Membranes and microfluidics: a review. Lab Chip 6(9):1125–1139
Deféver T, Druet M, Rochelet-Dequaire M, Joannes M, Grossiord C, Limoges B, Marchal D (2009) Real-time electrochemical monitoring of the polymerase chain reaction by mediated redox catalysis. J Am Chem Soc 131(32):11433–11441
Delapierre G (1989) Micro-machining: a survey of the most commonly used processes. Sensors Actuators 17(1–2):123–138
Dertinger SK, Chiu DT, Jeon NL, Whitesides GM (2001) Generation of gradients having complex shapes using microfluidic networks. Anal Chem 73(6):1240–1246
Deshmukh AA, Liepmann D, Pisano AP (2000) Continuous micromixer with pulsatile micropumps. In: Technical digest of the IEEE solid state sensor and actuator workshop (Hilton Head Island, SC). IEEE, Washington, DC
Dongeun H, Wei G, Yoko K, James BG, Shuichi T (2005) Microfluidics for flow cytometric analysis of cells and particles. Physiol Meas 26(3):R73
Döpper J, Clemens M, Ehrfeld W, Jung S, Kaemper K, Lehr H (1997) Micro gear pumps for dosing of viscous fluids. J Micromech Microeng 7(3):230
Du L, Zhe J (2011) A high throughput inductive pulse sensor for online oil debris monitoring. Tribol Int 44(2):175–179
Duffy DC, Gillis HL, Lin J, Sheppard NF, Kellogg GJ (1999) Microfabricated centrifugal microfluidic systems: characterization and multiple enzymatic assays. Anal Chem 71(20):4669–4678
Duffy DC, McDonald JC, Schueller OJA, Whitesides GM (1998) Rapid prototyping of microfluidic systems in poly(dimethylsiloxane). Anal Chem 70(23):4974–4984
Easley CJ, Karlinsey JM, Bienvenue JM, Legendre LA, Roper MG, Feldman SH, Hughes MA, Hewlett EL, Merkel TJ, Ferrance JP, Landers JP (2006) A fully integrated microfluidic genetic analysis system with sample-in–answer-out capability. Proc Natl Acad Sci 103(51):19272–19277
El Moctar AO, Aubry N, Batton J (2003) Electro-hydrodynamic micro-fluidic mixer. Lab Chip 3(4):273–280
Erickson KA, Wilding P (1993) Evaluation of a novel point-of-care system, the i-STAT portable clinical analyzer. Clin Chem 39(2):283–287
Esashi M, Shoji S, Nakano A (1989) Normally closed microvalve and mircopump fabricated on a silicon wafer. Sensors Actuators 20(1–2):163–169
Fahrenberg J, Bier W, Maas D, Menz W, Ruprecht R, Schomburg WK (1995) A microvalve system fabricated by thermoplastic molding. J Micromech Microeng 5(2):169
Fair RB (2007) Digital microfluidics: is a true lab-on-a-chip possible? Microfluid Nanofluid 3(3):245–281
Feigl F (1935) Qualitative Analyse mit hilfe von Tuepfelreaktionen : theoretische Grundlagen, praktische Ausfuehrung und Anwendung. Akademische Verlagsgesellschaft, Leipzig
Feng G-H, Chou Y-C (2011) Fabrication and characterization of thermally driven fast turn-on microvalve with adjustable backpressure design. Microelectron Eng 88(2):187–194
Fletcher PDI, Haswell SJ, Pombo-Villar E, Warrington BH, Watts P, Wong SYF, Zhang X (2002) Micro reactors: principles and applications in organic synthesis. Tetrahedron 58(24):4735–4757
Folta JA, Raley NF, Hee EW (1992) Design, fabrication and testing of a miniature peristaltic membrane pump. In: Solid-state sensor and actuator workshop, 1992 5th technical digest, 22–25 June 1992. IEEE, Washington, DC, pp 186–189. doi:10.1109/solsen.1992.228296
Fréchette LG, Jacobson SA, Breuer KS, Ehrich FF, Ghodssi R, Khanna R, Wong CW, Zhang X, Schmidt MA, Epstein AH (2000) Demonstration of a microfabricated high-speed turbine supported on gas bearings. DTIC document
Fredrickson CK, Fan ZH (2004) Macro-to-micro interfaces for microfluidic devices. Lab Chip 4(6):526–533
Fu C, Rummler Z, Schomburg W (2003) Magnetically driven micro ball valves fabricated by multilayer adhesive film bonding. J Micromech Microeng 13(4):S96
Fu LM, Yang RJ, Lin CH, Chien YS (2005) A novel microfluidic mixer utilizing electrokinetic driving forces under low switching frequency. Electrophoresis 26(9):1814–1824
Fuhr G (1997) From micro field cages for living cells to Brownian pumps for submicron particles. In: Proceedings of the 1997 international symposium on micromechatronics and human science, 1997. IEEE, Washington, DC, pp 1–4
Fuhr G, Hagedorn R, Muller T, Benecke W, Wagner B (1992) Microfabricated electrohydrodynamic (EHD) pumps for liquids of higher conductivity. J Microelectromech Syst 1(3):141–146
Fuhr G, Schnelle T, Wagner B (1994) Travelling wave-driven microfabricated electrohydrodynamic pumps for liquids. J Micromech Microeng 4(4):217
Fujii T, Sando Y, Higashino K, Fujii Y (2003) A plug and play microfluidic device. Lab Chip 3(3):193–197
Funfak A, Brösing A, Brand M, Köhler JM (2007) Micro fluid segment technique for screening and development studies on Danio rerio embryos. Lab Chip 7(9):1132–1138
Gass V, van der Schoot BH, Jeanneret S, de Rooij NF (1994) Integrated flow-regulated silicon micropump. Sensors Actuators A Phys 43(1–3):335–338
Geng X, Yuan H, Oguz HN, Prosperetti A (2001) Bubble-based micropump for electrically conducting liquids. J Micromech Microeng 11(3):270
Gerlach T (1998) Microdiffusers as dynamic passive valves for micropump applications. Sensors Actuators A Phys 69(2):181–191
Gerlach T, Wurmus H (1995) Working principle and performance of the dynamic micropump. Sensors Actuators A Phys 50(1–2):135–140
Ghindilis AL, Smith MW, Schwarzkopf KR, Roth KM, Peyvan K, Munro SB, Lodes MJ, Stöver AG, Bernards K, Dill K, McShea A (2007) CombiMatrix oligonucleotide arrays: genotyping and gene expression assays employing electrochemical detection. Biosens Bioelectron 22(9–10):1853–1860
Glasgow I, Aubry N (2003) Enhancement of microfluidic mixing using time pulsing. Lab Chip 3(2):114–120
Go JS, Shoji S (2004) A disposable, dead volume-free and leak-free in-plane PDMS microvalve. Sensors Actuators A Phys 114(2–3):438–444
Gobby D, Angeli P, Gavriilidis A (2001) Mixing characteristics of T-type microfluidic mixers. J Micromech Microeng 11(2):126
Goetz H, Kuschel M, Wulff T, Sauber C, Miller C, Fisher S, Woodward C (2004) Comparison of selected analytical techniques for protein sizing, quantitation and molecular weight determination. J Biochem Biophys Methods 60(3):281–293
Goll C, Bacher W, Büstgens B, Maas D, Ruprecht R, Schomburg WK (1997) An electrostatically actuated polymer microvalve equipped with a movable membrane electrode. J Micromech Microeng 7(3):224
Gorkin R, Park J, Siegrist J, Amasia M, Lee BS, Park J-M, Kim J, Kim H, Madou M, Cho Y-K (2010) Centrifugal microfluidics for biomedical applications. Lab Chip 10(14):1758–1773
Gravesen P, Branebjerg J, Jensen OS (1993) Microfluidics-a review. J Micromech Microeng 3(4):168
Greenacre CB, Flatland B, Souza MJ, Fry MM (2008) Comparison of avian biochemical test results with abaxis VetScan and Hitachi 911 analyzers. J Avian Med Surg 22(4):291–299
Grover WH, Skelley AM, Liu CN, Lagally ET, Mathies RA (2003) Monolithic membrane valves and diaphragm pumps for practical large-scale integration into glass microfluidic devices. Sens Actuators B 89(3):315–323
Gruhl FJ, Länge K (2014) Surface acoustic wave (SAW) biosensor for rapid and label-free detection of penicillin G in milk. Food Anal Methods 7(2):430–437
Gu W, Zhu X, Futai N, Cho BS, Takayama S (2004) Computerized microfluidic cell culture using elastomeric channels and Braille displays. Proc Natl Acad Sci U S A 101(45):15861–15866
Guan J-G, Miao Y-Q, Zhang Q-J (2004) Impedimetric biosensors. J Biosci Bioeng 97(4):219–226
Gui L, Liu J (2004) Ice valve for a mini/micro flow channel. J Micromech Microeng 14(2):242–246
Gui L, Yu BY, Ren CL, Huissoon JP (2011) Microfluidic phase change valve with a two-level cooling/heating system. Microfluid Nanofluid 10(2):435–445
Guttenberg Z, Müller H, Habermüller H, Geisbauer A, Pipper J, Felbel J, Kielpinski M, Scriba J, Wixforth A (2005) Planar chip device for PCR and hybridization with surface acoustic wave pump. Lab Chip 5(3):308–317
Haeberle S, Zengerle R (2007) Microfluidic platforms for lab-on-a-chip applications. Lab Chip 7(9):1094–1110
Handique K, Burke D, Mastrangelo C, Burns M (2001) On-chip thermopneumatic pressure for discrete drop pumping. Anal Chem 73(8):1831–1838
Hannig C, Dirschka M, Länge K, Neumaier S, Rapp BE (2010) Synthesis and application of photo curable perfluoropolyethers as new material for microfluidics. Procedia Engineering 5:866–869
Hao R, Wang D, Zhang X, Zuo G, Wei H, Yang R, Zhang Z, Cheng Z, Guo Y, Cui Z (2009) Rapid detection of Bacillus anthracis using monoclonal antibody functionalized QCM sensor. Biosens Bioelectron 24(5):1330–1335
Hartshorne H, Backhouse CJ, Lee WE (2004) Ferrofluid-based microchip pump and valve. Sens Actuators B 99(2–3):592–600
Hasegawa T, Nakashima K, Omatsu F, Ikuta K (2008) Multi-directional micro-switching valve chip with rotary mechanism. Sensors Actuators A Phys 143(2):390–398
Hatch A, Kamholz AE, Holman G, Yager P, Bohringer KF (2001) A ferrofluidic magnetic micropump. J Microelectromech Syst 10(2):215–221
He B, Burke BJ, Zhang X, Zhang R, Regnier FE (2001) A picoliter-volume mixer for microfluidic analytical systems. Anal Chem 73(9):1942–1947
Heckele M, Schomburg WK (2004) Review on micro molding of thermoplastic polymers. J Micromech Microeng 14(3):R1–R14
Hessel V, Hardt S, Löwe H, Schönfeld F (2003) Laminar mixing in different interdigital micromixers: I. Experimental characterization. AIChE J 49(3):566–577
Hinsmann P, Frank J, Svasek P, Harasek M, Lendl B (2001) Design, simulation and application of a new micromixing device for time resolved infrared spectroscopy of chemical reactions in solution. Lab Chip 1(1):16–21
Hong C-C, Chang P-H, Lin C-C, Hong C-L (2010a) A disposable microfluidic biochip with on-chip molecularly imprinted biosensors for optical detection of anesthetic propofol. Biosens Bioelectron 25(9):2058–2064
Hong C-C, Choi J-W, Ahn C (2001) A novel in-plane passive micromixer using Coanda effect. In: Ramsey JM, Berg A (eds) Micro total analysis systems. Springer, Dordrecht, The Netherlands, pp 31–33. doi:10.1007/978-94-010-1015-3_11
Hong C-C, Choi J-W, Ahn CH (2004) A novel in-plane passive microfluidic mixer with modified Tesla structures. Lab Chip 4(2):109–113
Hong J, Choi JS, Han G, Kang JK, Kim C-M, Kim TS, Yoon DS (2006) A Mach-Zehnder interferometer based on silicon oxides for biosensor applications. Anal Chim Acta 573–574:97–103
Hong T-F, Ju W-J, Wu M-C, Tai C-H, Tsai C-H, Fu L-M (2010b) Rapid prototyping of PMMA microfluidic chips utilizing a CO2 laser. Microfluid Nanofluid 9(6):1125–1133
Horade M, Mizuta Y, Kaji N, Higashiyama T, Arata H (2012) Plant-on-a-chip microfluidic-system for quantitative analysis of pollen tube guidance by signaling molecule: towards cell-to-cell communication study. In: Proc microTAS, 2012, pp 1027–1029
Hua SZ, Sachs F, Yang DX, Chopra HD (2002) Microfluidic actuation using electrochemically generated bubbles. Anal Chem 74(24):6392–6396
Huang LR, Cox EC, Austin RH, Sturm JC (2004) Continuous particle separation through deterministic lateral displacement. Science 304(5673):987–990
Huang M-Z, Yang R-J, Tai C-H, Tsai C-H, Fu L-M (2006) Application of electrokinetic instability flow for enhanced micromixing in cross-shaped microchannel. Biomed Microdevices 8(4):309–315
Huang S-B, Wu M-H, Cui Z, Cui Z, Lee G-B (2008) A membrane-based serpentine-shape pneumatic micropump with pumping performance modulated by fluidic resistance. J Micromech Microeng 18(4):045008
Huang X, Gordon MJ, Zare RN (1988) Current-monitoring method for measuring the electroosmotic flow rate in capillary zone electrophoresis. Anal Chem 60(17):1837–1838
Huh YS, Choi JH, Huh KA, Park TJ, Hong YK, Kim do H, Hong WH, Lee SY (2007) Microfluidic cell disruption system employing a magnetically actuated diaphragm. Electrophoresis 28(24):4748–4757
Jang J, Lee SS (2000) Theoretical and experimental study of MHD (magnetohydrodynamic) micropump. Sensors Actuators A Phys 80(1):84–89
Jen C-P, Lin Y-C (2002) Design and simulation of bi-directional microfluid driving systems. J Micromech Microeng 12(2):115
Jensen K (1998) Chemical kinetics: smaller, faster chemistry. Nature 393(6687):735–737
Jensen KF (2006) Silicon-based microchemical systems: characteristics and applications. MRS Bull 31(02):101–107
Jeon N, Chiu D, Wargo C, Wu H, Choi I, Anderson J, Whitesides G (2002) Microfluidics section: design and fabrication of integrated passive valves and pumps for flexible polymer 3-dimensional microfluidic systems. Biomed Microdevices 4(2):117–121
Jeong OC, Konishi S (2008) Fabrication of a peristaltic micro pump with novel cascaded actuators. J Micromech Microeng 18(2):025022
Jeong OC, Yang SS (2000) Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm. Sensors Actuators A Phys 83(1–3):249–255
Jeong S-i, Seyed-Yagoobi J (2002) Experimental study of electrohydrodynamic pumping through conduction phenomenon. J Electrost 56(2):123–133
Jerman H (1994) Electrically activated normally closed diaphragm valves. J Micromech Microeng 4(4):210
Jiang F, Drese K, Hardt S, Küpper M, Schönfeld F (2004) Helical flows and chaotic mixing in curved micro channels. AIChE J 50(9):2297–2305
Johnson RD, Badr IHA, Barrett G, Lai S, Lu Y, Madou MJ, Bachas LG (2001) Development of a fully integrated analysis system for ions based on ion-selective optodes and centrifugal microfluidics. Anal Chem 73(16):3940–3946
Johnston I, Tracey M, Davis J, Tan C (2005) Microfluidic solid phase suspension transport with an elastomer-based, single piezo-actuator, micro throttle pump. Lab Chip 5(3):318–325
Joo B-S, Huh J-S, Lee D-D (2007) Fabrication of polymer SAW sensor array to classify chemical warfare agents. Sens Actuators B 121(1):47–53
Jorgenson JW, Lukacs KD (1981) Free-zone electrophoresis in glass capillaries. Clin Chem 27(9):1551–1553
Ju W-J, Fu L-M, Yang R-J, Lee C-L (2012) Distillation and detection of SO2 using a microfluidic chip. Lab Chip 12(3):622–626
Judy JW, Tamagawa T, Polla DL (1991) Surface-machined micromechanical membrane pump. In: Micro electro mechanical systems, 1991, MEMS’91, proceedings An investigation of micro structures, sensors, actuators, machines and robots, 30 Jan–2 Feb 1991. IEEE, Washington, DC, pp 182–186. doi:10.1109/memsys.1991.114792
Jun TK (1998) Valveless pumping using traversing vapor bubbles in microchannels. J Appl Phys 83(11):5658–5664
Juncker D, Schmid H, Drechsler U, Wolf H, Wolf M, Michel B, de Rooij N, Delamarche E (2002) Autonomous microfluidic capillary system. Anal Chem 74(24):6139–6144
Kahn H, Huff MA, Heuer AH (1998) The TiNi shape-memory alloy and its applications for MEMS. J Micromech Microeng 8(3):213
Kang TG, Kwon TH (2004) Colored particle tracking method for mixing analysis of chaotic micromixers. J Micromech Microeng 14(7):891
Kataoka DE, Troian SM (1999) Patterning liquid flow on the microscopic scale. Nature 402(6763):794–797
Kawakatsu T, Kikuchi Y, Nakajima M (1997) Regular-sized cell creation in microchannel emulsification by visual microprocessing method. J Amer Oil Chem Soc 74(3):317–321
Kawakatsu T, Trägårdh G, Kikuchi Y, Nakajima M, Komori H, Yonemoto T (2000) Effect of microchannel structure on droplet size during crossflow microchannel emulsification. J Surfact Deterg 3(3):295–302
Kazuo H, Ryutaro M (2000) A pneumatically-actuated three-way microvalve fabricated with polydimethylsiloxane using the membrane transfer technique. J Micromech Microeng 10(3):415
Khan MF, Schmid S, Larsen PE, Davis ZJ, Yan W, Stenby EH, Boisen A (2013) Online measurement of mass density and viscosity of pL fluid samples with suspended microchannel resonator. Sens Actuators B 185:456–461
Khoo M, Liu C (2001) Micro magnetic silicone elastomer membrane actuator. Sensors Actuators A Phys 89(3):259–266
Kim DS, Lee SW, Kwon TH, Lee SS (2004) A barrier embedded chaotic micromixer. J Micromech Microeng 14(6):798
Kim J, Baek J, Lee K, Park Y, Sun K, Lee T, Lee S (2006) Photopolymerized check valve and its integration into a pneumatic pumping system for biocompatible sample delivery. Lab Chip 6(8):1091–1094
Kim J, Byun D, Mauk MG, Bau HH (2009) A disposable, self-contained PCR chip. Lab Chip 9(4):606–612
Kim P, Kwon KW, Park MC, Lee SH, Kim SM, Suh KY (2008) Soft lithography for microfluidics: a review. Biochip Journal 2:1–11
Kirby BJ, Shepodd TJ, Hasselbrink EF Jr (2002) Voltage-addressable on/off microvalves for high-pressure microchip separations. J Chromatogr A 979(1–2):147–154
Klintberg L, Karlsson M, Stenmark L, Schweitz J-Å, Thornell G (2002) A large stroke, high force paraffin phase transition actuator. Sensors Actuators A Phys 96(2–3):189–195
Knight JB, Vishwanath A, Brody JP, Austin RH (1998) Hydrodynamic focusing on a silicon chip: mixing nanoliters in microseconds. Phys Rev Lett 80(17):3863
Koch M, Chatelain D, Evans AGR, Brunnschweiler A (1998) Two simple micromixers based on silicon. J Micromech Microeng 8(2):123
Koch M, Evans AGR, Brunnschweiler A (1997) Characterization of micromachined cantilever valves. J Micromech Microeng 7(3):221
Koch M, Witt H, Evans A, Brunnschweiler A (1999) Improved characterization technique for micromixers. J Micromech Microeng 9(2):156
Kohl M, Dittmann D, Quandt E, Winzek B (2000) Thin film shape memory microvalves with adjustable operation temperature. Sensors Actuators A Phys 83(1–3):214–219
Kohl M, Dittmann D, Quandt E, Winzek B, Miyazaki S, Allen DM (1999a) Shape memory microvalves based on thin films or rolled sheets. Mater Sci Eng A 273–275:784–788
Kohl M, Skrobanek KD, Miyazaki S (1999b) Development of stress-optimised shape memory microvalves. Sensors Actuators A Phys 72(3):243–250
Kohlrausch F (1897) Ueber Concentrations-Verschiebungen durch Elektrolyse im Innern von Lösungen und Lösungsgemischen. Ann Phys Chem 62:209–239
Kopf-Sill AR (2002) PROFILESuccesses and challenges of lab-on-a-chip. Lab Chip 2(3):42N–47N
Kortmann H, Blank LM, Schmid A (2011) Single cell analytics: an overview. In: High resolution microbial single cell analytics. Springer, Dordrecht, The Netherlands, pp 99–122
Kurosawa M, Watanabe T, Higuchi T (1995) Surface acoustic wave atomizer with pumping effect. In: Micro electro mechanical systems. IEEE, Washington, DC
Kwang-Seok Y, Il-Joo C, Bu J-U, Chang-Jin K, Euisik Y (2002) A surface-tension driven micropump for low-voltage and low-power operations. J Microelectromech Syst 11(5):454–461
Lagally E, Medintz I, Mathies R (2001) Single-molecule DNA amplification and analysis in an integrated microfluidic device. Anal Chem 73(3):565–570
Lagally ET, Simpson PC, Mathies RA (2000) Monolithic integrated microfluidic DNA amplification and capillary electrophoresis analysis system. Sens Actuators B 63(3):138–146
Länge K, Grimm S, Rapp M (2007) Chemical modification of parylene C coatings for SAW biosensors. Sens Actuators B 125(2):441–446
Länge K, Rapp BE, Rapp M (2008) Surface acoustic wave biosensors: a review. Anal Bioanal Chem 391(5):1509–1519
Lao AI, Lee TM, Hsing I, Ip NY (2000) Precise temperature control of microfluidic chamber for gas and liquid phase reactions. Sensors Actuators A Phys 84(1):11–17
Laser DJ, Goodson KE, Santiago JG, Kenny TW (2002) High-frequency actuation with silicon electroosmotic micropumps. In: Proc 2002 solid-state sensor, actuator, and microsystems workshop (Hilton Head Island, SC). IEEE, Washington, DC
Lee BS, Lee J-N, Park J-M, Lee J-G, Kim S, Cho Y-K, Ko C (2009) A fully automated immunoassay from whole blood on a disc. Lab Chip 9(11):1548–1555
Lee J, Moon H, Fowler J, Schoellhammer T, Kim C-J (2002) Electrowetting and electrowetting-on-dielectric for microscale liquid handling. Sensors Actuators A Phys 95(2–3):259–268
Lee S, Jeong O, Yang S (1998) The fabrication of a micro injector actuated by boiling and/or electrolysis. In: The eleventh annual international workshop on micro electro mechanical systems, 1998, MEMS 98. Proceedings. IEEE, Washington, DC, pp 51–56
Lefèvre F, Chalifour A, Yu L, Chodavarapu V, Juneau P, Izquierdo R (2012) Algal fluorescence sensor integrated into a microfluidic chip for water pollutant detection. Lab Chip 12(4):787–793
Legendre LA, Bienvenue JM, Roper MG, Ferrance JP, Landers JP (2006) A simple, valveless microfluidic sample preparation device for extraction and amplification of DNA from nanoliter-volume samples. Anal Chem 78(5):1444–1451
Legiret F-E, Sieben VJ, Woodward EMS, Abi Kaed Bey SK, Mowlem MC, Connelly DP, Achterberg EP (2013) A high performance microfluidic analyser for phosphate measurements in marine waters using the vanadomolybdate method. Talanta 116:382–387
Lemoff AV, Lee AP (2000) An AC magnetohydrodynamic micropump. Sens Actuators B 63(3):178–185
Lemoff AV, Lee AP, Miles RR, McConaghy CF (1999) An AC magnetohydrodynamic micropump: towards a true integrated microfluidic system. In: 10th International conference on solid-state sensors and actuator, 1999. IEEE, Washington, DC, pp 1126–1129
Lewis GG, Robbins JS, Phillips ST (2013) Point-of-care assay platform for quantifying active enzymes to femtomolar levels using measurements of time as the readout. Anal Chem 85(21):10432–10439
Li B, Chen Q, Lee D-G, Woolman J, Carman GP (2005) Development of large flow rate, robust, passive micro check valves for compact piezoelectrically actuated pumps. Sensors Actuators A Phys 117(2):325–330
Li H, Roberts D, Steyn J, Turner K, Carretero J, Yaglioglu O, Su Y, Saggere L, Hagood N, Spearing S (2000) A high frequency high flow rate piezoelectrically driven MEMS micropump. In: Proceedings IEEE solid state sensors and actuators workshop, Hilton Head. IEEE, Washington, DC
Li X, Tian J, Garnier G, Shen W (2010) Fabrication of paper-based microfluidic sensors by printing. Colloids Surf B Biointerfaces 76(2):564–570
Lichtenberg J, de Rooij NF, Verpoorte E (2002) Sample pretreatment on microfabricated devices. Talanta 56(2):233–266
Lien K-Y, Lee W-C, Lei H-Y, Lee G-B (2007) Integrated reverse transcription polymerase chain reaction systems for virus detection. Biosens Bioelectron 22(8):1739–1748
Lin C-F, Lee G-B, Wang C-H, Lee H-H, Liao W-Y, Chou T-C (2006) Microfluidic pH-sensing chips integrated with pneumatic fluid-control devices. Biosens Bioelectron 21(8):1468–1475
Lin C-H, Wang Y-N, Fu L-M (2012) Integrated microfluidic chip for rapid DNA digestion and time-resolved capillary electrophoresis analysis. Biomicrofluidics 6(1):012818
Lin T-Y, Hu C-H, Chou T-C (2004) Determination of albumin concentration by MIP-QCM sensor. Biosens Bioelectron 20(1):75–81
Liu B-F, Ozaki M, Hisamoto H, Luo Q, Utsumi Y, Hattori T, Terabe S (2004a) Microfluidic chip toward cellular ATP and ATP-conjugated metabolic analysis with bioluminescence detection. Anal Chem 77(2):573–578
Liu L, Chen X, Niu X, Wen W, Sheng P (2006) Electrorheological fluid-actuated microfluidic pump. Appl Phys Lett 89(8):083505-083505–083503
Liu RH, Bonanno J, Yang J, Lenigk R, Grodzinski P (2004b) Single-use, thermally actuated paraffin valves for microfluidic applications. Sens Actuators B 98(2–3):328–336
Liu RH, Stremler MA, Sharp KV, Olsen MG, Santiago JG, Adrian RJ, Aref H, Beebe DJ (2000) Passive mixing in a three-dimensional serpentine microchannel. J Microelectromech Syst 9(2):190–197
Liu RH, Yang J, Lenigk R, Bonanno J, Grodzinski P (2004c) Self-contained, fully integrated biochip for sample preparation, polymerase chain reaction amplification, and DNA microarray detection. Anal Chem 76(7):1824–1831
Liu RH, Yu Q, Beebe DJ (2002) Fabrication and characterization of hydrogel-based microvalves. J Microelectromech Syst 11(1):45–53
London A, Epstein A, Kerrebrock J (2001) High-pressure bipropellant microrocket engine. J Propuls Power 17(4):780–787
Lu L-H, Ryu K, Liu C (2001) A novel microstirrer and arrays for microfluidic mixing. In: Ramsey JM, Berg A (eds) Micro total analysis systems 2001. Springer, Dordrecht, The Netherlands, pp 28–30. doi:10.1007/978-94-010-1015-3_10
Lu L-H, Ryu KS, Liu C (2002) A magnetic microstirrer and array for microfluidic mixing. J Microelectromech Syst 11(5):462–469
Lui C, Stelick S, Cady N, Batt C (2010) Low-power microfluidic electro-hydraulic pump (EHP). Lab Chip 10(1):74–79
Luque A, Quero JM, Hibert C, Flückiger P, Gañán-Calvo AM (2005) Integrable silicon microfluidic valve with pneumatic actuation. Sensors Actuators A Phys 118(1):144–151
Lloyd DK (1996) Capillary electrophoretic analyses of drugs in body fluids: sample pretreatment and methods for direct injection of biofluids. J Chromatogr A 735(1–2):29–42
Madou MJ, Kellogg GJ (1998) LabCD: a centrifuge-based microfluidic platform for diagnostics. In: Proc. SPIE 3259, systems and technologies for clinical diagnostics and drug discovery, pp 80–93
Marseille O, Habib N, Reul H, Rau G (1998) Implantable micropump system for augmented liver perfusion. Artif Organs 22(6):458–460
Martinez AW, Phillips ST, Butte MJ, Whitesides GM (2007) Patterned paper as a platform for inexpensive, low-volume, portable bioassays. Angew Chem Int Ed 46(8):1318–1320
Martinez AW, Phillips ST, Whitesides GM (2008) Three-dimensional microfluidic devices fabricated in layered paper and tape. Proc Natl Acad Sci 105(50):19606–19611
Mason TG, Bibette J (1997) Shear rupturing of droplets in complex fluids. Langmuir 13(17):4600–4613
McKnight TE, Culbertson CT, Jacobson SC, Ramsey JM (2001) Electroosmotically induced hydraulic pumping with integrated electrodes on microfluidic devices. Anal Chem 73(16):4045–4049
Meckes A, Behrens J, Kayser O, Benecke W, Becker T, Müller G (1999) Microfluidic system for the integration and cyclic operation of gas sensors. Sensors Actuators A Phys 76(1–3):478–483
Mehta G, Mehta K, Sud D, Song J, Bersano-Begey T, Futai N, Heo YS, Mycek M-A, Linderman J, Takayama S (2007) Quantitative measurement and control of oxygen levels in microfluidic poly(dimethylsiloxane) bioreactors during cell culture. Biomed Microdevices 9(2):123–134
Melin J, Giménez G, Roxhed N, van der Wijngaart W, Stemme G (2004a) A fast passive and planar liquid sample micromixer. Lab Chip 4(3):214–219
Melin J, Roxhed N, Gimenez G, Griss P, van der Wijngaart W, Stemme G (2004b) A liquid-triggered liquid microvalve for on-chip flow control. Sens Actuators B 100(3):463–468
Mengeaud V, Josserand J, Girault HH (2002) Mixing processes in a zigzag microchannel: finite element simulations and optical study. Anal Chem 74(16):4279–4286
Meyvantsson I, Warrick JW, Hayes S, Skoien A, Beebe DJ (2008) Automated cell culture in high density tubeless microfluidic device arrays. Lab Chip 8(5):717–724
Mikkers FEP, Everaerts FM, Verheggen TPEM (1979) High-performance zone electrophoresis. J Chromatogr A 169:11–20
Minas G, Martins JS, Ribeiro JC, Wolffenbuttel RF, Correia JH (2004) Biological microsystem for measuring uric acid in biological fluids. Sensors Actuators A Phys 110(1–3):33–38
Mirica KA, Weis JG, Schnorr JM, Esser B, Swager TM (2012) Mechanical drawing of gas sensors on paper. Angew Chem Int Ed 51(43):10740–10745
Miyake R, Tsuzuki K, Takagi T, Imai K (1997) A highly sensitive and small flow-type chemical analysis system with integrated absorptiometric micro-flowcell. In: Tenth annual international workshop on micro electro mechanical systems, 1997, MEMS’97, Proceedings. IEEE, Washington, DC, pp 102–107
Mizoguchi H, Ando M, Mizuno T, Takagi T, Nakajima N (1992) Design and fabrication of light driven micropump. In: Micro electro mechanical systems, 1992, MEMS’92, Proceedings. An investigation of micro structures, sensors, actuators, machines and robot, 4–7 Feb 1992. IEEE, Washington, DC, pp 31–36. doi:10.1109/memsys.1992.187686
Moroney R, White R, Howe R (1991) Ultrasonically induced microtransport. In: Micro electro mechanical systems, 1991, MEMS’91, Proceedings. An investigation of micro structures, sensors, actuators, machines and robots. IEEE, Washington, DC, pp 277–282
Münchow G, Dadic D, Doffing F, Hardt S, Drese K-S (2005) Automated chip-based device for simple and fast nucleic acid amplification. Expert Rev Mol Diagn 5(4):613–620
Munson MS, Yager P (2004) Simple quantitative optical method for monitoring the extent of mixing applied to a novel microfluidic mixer. Anal Chim Acta 507(1):63–71
Myers FB, Henrikson RH, Bone J, Lee LP (2013) A handheld point-of-care genomic diagnostic system. PLoS One 8(8):e70266
Nagrath S, Sequist LV, Maheswaran S, Bell DW, Irimia D, Ulkus L, Smith MR, Kwak EL, Digumarthy S, Muzikansky A (2007) Isolation of rare circulating tumour cells in cancer patients by microchip technology. Nature 450(7173):1235–1239
Nakashima T, Shimizu M (1993) Preparation of monodispersed O/W emulsion by porous glass membrane. Kagaku Kogaku Ronbunshu 19:984
Neagu CR, Gardeniers GE, Elwenspoek M, Kelly JJ (1996) An electrochemical microactuator: principle and first results. J Microelectromech Syst 5(1):2–9
Neumann C, Voigt A, Pires L, Rapp BE (2013) Design and characterization of a platform for thermal actuation of up to 588 microfluidic valves. Microfluid Nanofluid 14(1–2):177–186
Newman JD, Turner APF (2005) Home blood glucose biosensors: a commercial perspective. Biosens Bioelectron 20(12):2435–2453
Nguyen N-T, Huang X (2001) Miniature valveless pumps based on printed circuit board technique. Sensors Actuators A Phys 88(2):104–111
Nguyen N-T, Meng AH, Black J, White RM (2000) Integrated flow sensor for in situ measurement and control of acoustic streaming in flexural plate wave micropumps. Sensors Actuators A Phys 79(2):115–121
Nguyen N-T, Wu Z (2005) Micromixers—a review. J Micromech Microeng 15(2):R1
Nguyen TT, Goo NS, Nguyen VK, Yoo Y, Park S (2008) Design, fabrication, and experimental characterization of a flap valve IPMC micropump with a flexibly supported diaphragm. Sensors Actuators A Phys 141(2):640–648
Niu X, Lee Y-K (2003) Efficient spatial-temporal chaotic mixing in microchannels. J Micromech Microeng 13(3):454
Norbert S, Thomas F, Helmut W (1996) A modular microfluid system with an integrated micromixer. J Micromech Microeng 6(1):99
Oddy M, Santiago J, Mikkelsen J (2001) Electrokinetic instability micromixing. Anal Chem 73(24):5822–5832
Ogden S, Boden R, Hjort K (2010) A latchable valve for high-pressure microfluidics. J Microelectromech Syst 19(2):396–401
Oh KW, Ahn CH (2006) A review of microvalves. J Micromech Microeng 16(5):R13–R39
Oh KW, Park C, Namkoong K, Kim J, Ock K-S, Kim S, Kim Y-A, Cho Y-K, Ko C (2005) World-to-chip microfluidic interface with built-in valves for multichamber chip-based PCR assays. Lab Chip 5(8):845–850
Ohori T, Shoji S, Miura K, Yotsumoto A (1998) Partly disposable three-way microvalve for a medical micro total analysis system (μTAS). Sensors Actuators A Phys 64(1):57–62
Olsson A, Stemme G, Stemme E (1995) A valve-less planar fluid pump with two pump chambers. Sensors Actuators A Phys 47(1–3):549–556
Olsson A, Stemme G, Stemme E (2000) Numerical and experimental studies of flat-walled diffuser elements for valve-less micropumps. Sensors Actuators A Phys 84(1–2):165–175
Pal R, Yang M, Johnson BN, Burke DT, Burns MA (2004) Phase change microvalve for integrated devices. Anal Chem 76(13):3740–3748
Pal R, Yang M, Lin R, Johnson B, Srivastava N, Razzacki S, Chomistek K, Heldsinger D, Haque R, Ugaz V (2005) An integrated microfluidic device for influenza and other genetic analyses. Lab Chip 5(10):1024–1032
Pamme N (2007) Continuous flow separations in microfluidic devices. Lab Chip 7(12):1644–1659
Papageorgiou DT (1995) On the breakup of viscous liquid threads. Physics of Fluids (1994-present) 7(7):1529–1544
Park S-J, Kim JK, Park J, Chung S, Chung C, Chang JK (2004) Rapid three-dimensional passive rotation micromixer using the breakup process. J Micromech Microeng 14(1):6
Peige S, Zeno R, Werner Karl S (2004) Polymer micro piezo valve with a small dead volume. J Micromech Microeng 14(2):305
Peirs J, Reynaerts D, Van Brussel H (2000) Design of miniature parallel manipulators for integration in a self-propelling endoscope. Sensors Actuators A Phys 85(1–3):409–417
Petersen NJ, Mogensen KB, Kutter JP (2002) Performance of an in-plane detection cell with integrated waveguides for UV/Vis absorbance measurements on microfluidic separation devices. Electrophoresis 23(20):3528–3536
Petralia S, Verardo R, Klaric E, Cavallaro S, Alessi E, Schneider C (2013) In-Check system: a highly integrated silicon Lab-on-Chip for sample preparation, PCR amplification and microarray detection of nucleic acids directly from biological samples. Sens Actuators B 187:99–105
Pfleging W, Torge M, Bruns M, Trouillet V, Welle A, Wilson S (2009) Laser- and UV-assisted modification of polystyrene surfaces for control of protein adsorption and cell adhesion. Appl Surf Sci 255(10):5453–5457
Pickup JC, Shaw GW, Claremont DJ (1989) In vivo molecular sensing in diabetes mellitus: an implantable glucose sensor with direct electron transfer. Diabetologia 32(3):213–217
Pires L, Sachsenheimer K, Kleintschek T, Waldbaur A, Schwartz T, Rapp BE (2013) Online monitoring of biofilm growth and activity using a combined multi-channel impedimetric and amperometric sensor. Biosens Bioelectron 47:157–163
Piruska A, Nikcevic I, Lee SH, Ahn C, Heineman WR, Limbach PA, Seliskar CJ (2005) The autofluorescence of plastic materials and chips measured under laser irradiation. Lab Chip 5(12):1348–1354
Pollack M, Shenderov A, Fair R (2002) Electrowetting-based actuation of droplets for integrated microfluidics. Lab Chip 2(2):96–101
Pu Q, Oyesanya O, Thompson B, Liu S, Alvarez JC (2006) On-chip micropatterning of plastic (Cylic Olefin Copolymer, COC) microfluidic channels for the fabrication of biomolecule microarrays using photografting methods. Langmuir 23(3):1577–1583
Puckett LG, Dikici E, Lai S, Madou M, Bachas LG, Daunert S (2004) Investigation into the applicability of the centrifugal microfluidics platform for the development of protein–ligand binding assays incorporating enhanced green fluorescent protein as a fluorescent reporter. Anal Chem 76(24):7263–7268
Ramsey R, Ramsey J (1997) Generating electrospray from microchip devices using electroosmotic pumping. Anal Chem 69(6):1174–1178
Rapp BE, Carneiro L, Laenge K, Rapp M (2009) An indirect microfluidic flow injection analysis (FIA) system allowing diffusion free pumping of liquids by using tetradecane as intermediary liquid. Lab Chip 9(2):354–356
Rapp BE, Gruhl FJ, Länge K (2010) Biosensors with label-free detection designed for diagnostic applications. Anal Bioanal Chem 398(6):2403–2412
Rapp BE, Schickling B, Prokop J, Piotter V, Rapp M, Laenge K (2011) Design and integration of a generic disposable array-compatible sensor housing into an integrated disposable indirect microfluidic flow injection analysis system. Biomed Microdevices 13(5):909–922
Rapp R, Schomburg WK, Maas D, Schulz J, Stark W (1994) LIGA micropump for gases and liquids. Sensors Actuators A Phys 40(1):57–61
Rasmussen A, Zaghloul ME (1999) The design and fabrication of microfluidic flow sensors. In: Proceedings of the 1999 I.E. international symposium on circuits and systems, 1999, ISCAS’99. IEEE, Washington, DC, pp 136–139
Recknor JB, Sakaguchi DS, Mallapragada SK (2006) Directed growth and selective differentiation of neural progenitor cells on micropatterned polymer substrates. Biomaterials 27(22):4098–4108
Rehm JE, Shepodd TJ, Hasselbrink EF (2001) Mobile flow control elements for high-pressure micro-analytical systems fabricated using in-situ polymerization. In: Ramsey JM, Berg A (eds) Micro total analysis systems. Springer, Dordrecht, The Netherlands, pp 227–229. doi:10.1007/978-94-010-1015-3_98
Rich CA, Wise KD (2003) A high-flow thermopneumatic microvalve with improved efficiency and integrated state sensing. J Microelectromech Syst 12(2):201–208
Richter A, Kuckling D, Howitz S, Gehring T, Arndt KF (2003) Electronically controllable microvalves based on smart hydrogels: magnitudes and potential applications. J Microelectromech Syst 12(5):748–753
Richter A, Plettner A, Hofmann K, Sandmaier H (1991) A micromachined electrohydrodynamic (EHD) pump. Sensors Actuators A Phys 29(2):159–168
Richter A, Sandmaier H (1990) An electrohydrodynamic micropump. In: Micro electro mechanical systems, 1990 Proceedings. An investigation of micro structures, sensors, actuators, machines and robots. IEEE, Washington, DC, pp 99–104
Rife J, Bell M, Horwitz J, Kabler M, Auyeung R, Kim W (2000) Miniature valveless ultrasonic pumps and mixers. Sensors Actuators A Phys 86(1):135–140
Roberts DC, Hanqing L, Steyn JL, Yaglioglu O, Spearing SM, Schmidt MA, Hagood NW (2003) A piezoelectric microvalve for compact high-frequency, high-differential pressure hydraulic micropumping systems. J Microelectromech Syst 12(1):81–92
Rogge T, Rummler Z, Schomburg WK (2004) Polymer micro valve with a hydraulic piezo-drive fabricated by the AMANDA process. Sensors Actuators A Phys 110(1–3):206–212
Ross D, Gaitan M, Locascio L (2001) Temperature measurement and control in microfluidic systems. In: Ramsey JM, Berg A (eds) Micro total analysis systems. Springer, Dordrecht, The Netherlands, pp 239–241. doi:10.1007/978-94-010-1015-3_102
Ryu S, Yoo I, Song S, Yoon B, Kim J-M (2009) A thermoresponsive fluorogenic conjugated polymer for a temperature sensor in microfluidic devices. J Am Chem Soc 131(11):3800–3801
Saarela V, Franssila S, Tuomikoski S, Marttila S, Ostman P, Sikanen T, Kotiaho T, Kostiainen R (2006) Re-usable multi-inlet PDMS fluidic connector. Sensors Actuators B Chem 114(1):552–557
Sabourin D, Snakenborg D, Dufva M (2009) Interconnection blocks: a method for providing reusable, rapid, multiple, aligned and planar microfluidic interconnections. J Micromech Microeng 19(3):035021
Sadler DJ, Oh KW, Ahn CH, Bhansali S, Henderson HT (1999) A new magnetically actuated microvalve for liquid and gas control applications. In: Proceedings of Transducers, 1999. pp 1812–1815
Sammarco TS, Burns MA (1999) Thermocapillary pumping of discrete drops in microfabricated analysis devices. AIChE J 45(2):350–366
Santiago JG, Wereley ST, Meinhart CD, Beebe DJ, Adrian RJ (1998) A particle image velocimetry system for microfluidics. Exp Fluids 25(4):316–319
Satyanarayana S, McCormick DT, Majumdar A (2006) Parylene micro membrane capacitive sensor array for chemical and biological sensing. Sens Actuators B 115(1):494–502
Sauer-Budge AF, Mirer P, Chatterjee A, Klapperich CM, Chargin D, Sharon A (2009) Low cost and manufacturable complete microTAS for detecting bacteria. Lab Chip 9(19):2803–2810
Scott A, Au AK, Vinckenbosch E, Folch A (2013) A microfluidic D-subminiature connector. Lab Chip 13:2036–2039
Schabmueller CGJ, Koch M, Mokhtari ME, Evans AGR, Brunnschweiler A, Sehr H (2002) Self-aligning gas/liquid micropump. J Micromech Microeng 12(4):420
Schönfeld F, Hessel V, Hofmann C (2004) An optimised split-and-recombine micro-mixer with uniform ‘chaotic’ mixing. Lab Chip 4(1):65–69
Schumacher S, Nestler J, Otto T, Wegener M, Ehrentreich-Förster E, Michel D, Wunderlich K, Palzer S, Sohn K, Weber A (2012) Highly-integrated lab-on-chip system for point-of-care multiparameter analysis. Lab Chip 12(3):464–473
Sen M, Wajerski D, Gad-el-Hak M (1996) A novel pump for MEMS applications. J Fluid Eng Trans ASME 118(3):624–627
Shikida M, Sato K, Tanaka S, Kawamura Y, Fujisaki Y (1994) Electrostatically driven gas valve with high conductance. J Microelectromech Syst 3(2):76–80
Sim WY, Yoon HJ, Jeong OC, Yang SS (2003) A phase-change type micropump with aluminum flap valves. J Micromech Microeng 13(2):286
Sin A, Reardon CF, Shuler ML (2004) A self-priming microfluidic diaphragm pump capable of recirculation fabricated by combining soft lithography and traditional machining. Biotechnol Bioeng 85(3):359–363
Singh MK, Anderson PD, Meijer HE (2009) Understanding and optimizing the SMX static mixer. Macromol Rapid Commun 30(4–5):362–376
Smithies O (1955) Zone electrophoresis in starch gels - group variations in the serum proteins of normal human adults. Biochem J 61(4):629–641
Smits JG (1985) Piezoelectric micropump for peristaltic fluid displacements. NL 8302860
Smits JG (1990) Piezoelectric micropump with three valves working peristaltically. Sensors Actuators A Phys 21(1–3):203–206
Song H, Bringer MR, Tice JD, Gerdts CJ, Ismagilov RF (2003) Experimental test of scaling of mixing by chaotic advection in droplets moving through microfluidic channels. Appl Phys Lett 83(22):4664–4666
Spencer WJ, Corbett WT, Dominguez LR, Shafer BD (1978) An electronically controlled piezoelectric insulin pump and valves. IEEE Trans Sonics Ultrasonics 25(3):153–156
Star A, Tu E, Niemann J, Gabriel J-CP, Joiner CS, Valcke C (2006) Label-free detection of DNA hybridization using carbon nanotube network field-effect transistors. Proc Natl Acad Sci U S A 103(4):921–926
Strohmeier O, Emperle A, Roth G, Mark D, Zengerle R, von Stetten F (2013) Centrifugal gas-phase transition magnetophoresis (GTM) - a generic method for automation of magnetic bead based assays on the centrifugal microfluidic platform and application to DNA purification. Lab Chip 13(1):146–155
Stroock AD, Dertinger SK, Ajdari A, Mezić I, Stone HA, Whitesides GM (2002) Chaotic mixer for microchannels. Science 295(5555):647–651
Studer V, Jameson R, Pellereau E, Pépin A, Chen Y (2004) A microfluidic mammalian cell sorter based on fluorescence detection. Microelectron Eng 73–74:852–857
Su Y-C, Lin L (2004) A water-powered micro drug delivery system. J Microelectromech Syst 13(1):75–82
Sundararajan N, Kim D, Berlin AA (2005) Microfluidic operations using deformable polymer membranes fabricated by single layer soft lithography. Lab Chip 5(3):350–354
Suzuki H, Ho C-M (2002) A magnetic force driven chaotic micro-mixer. In: The fifteenth IEEE international conference on micro electro mechanical systems, 2002. IEEE, Washington, DC, pp 40–43
Suzuki H, Yoneyama R (2003) Integrated microfluidic system with electrochemically actuated on-chip pumps and valves. Sens Actuators B 96(1–2):38–45
Suzuki K, Fujiki I, Hagura Y (1998) Preparation of corn oil/water and water/corn oil emulsions using PTFE membranes. Food Sci Tech Int Tokyo 4(2):164–167
Takagi H, Maeda R, Ozaki K, Parameswaran M, Mehta M (1994) Phase transformation type micro pump. In: Proceedings, 5th international symposium on micro machine and human science, 1994. IEEE, Washington, DC, p 199
Takao H, Miyamura K, Ebi H, Ashiki M, Sawada K, Ishida M (2005) A MEMS microvalve with PDMS diaphragm and two-chamber configuration of thermo-pneumatic actuator for integrated blood test system on silicon. Sensors Actuators A Phys 119(2):468–475
Tan F, Leung PHM, Z-b L, Zhang Y, Xiao L, Ye W, Zhang X, Yi L, Yang M (2011) A PDMS microfluidic impedance immunosensor for E. coli O157:H7 and Staphylococcus aureus detection via antibody-immobilized nanoporous membrane. Sens Actuators B 159(1):328–335
Tas N, Berenschot J, Lammerink T, Elwenspoek M, Van den Berg A (2002) Nanofluidic bubble pump using surface tension directed gas injection. Anal Chem 74(9):2224–2227
Teh S-Y, Lin R, Hung L-H, Lee AP (2008) Droplet microfluidics. Lab Chip 8(2):198–220
Terray A, Oakey J, Marr DW (2002) Microfluidic control using colloidal devices. Science 296(5574):1841–1844
Terry SC, Jerman JH, Angell JB (1979) Gas-chromatographic air analyzer fabricated on a silicon-wafer. IEEE Trans Electron Devices 26(12):1880–1886
Teymoori MM, Abbaspour-Sani E (2005) Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications. Sensors Actuators A Phys 117(2):222–229
Thomas L Jr, Bessman S (1975) Prototype for an implantable micropump powdered by piezoelectric disk benders. Trans Am Soc Artif Int Organs 21:516
Thorsen T, Maerkl SJ, Quake SR (2002) Microfluidic large-scale integration. Science 298(5593):580–584
Thorsen T, Roberts RW, Arnold FH, Quake SR (2001) Dynamic pattern formation in a vesicle-generating microfluidic device. Phys Rev Lett 86(18):4163–4166
Tice JD, Lyon AD, Ismagilov RF (2004) Effects of viscosity on droplet formation and mixing in microfluidic channels. Anal Chim Acta 507(1):73–77
Tice JD, Song H, Lyon AD, Ismagilov RF (2003) Formation of droplets and mixing in multiphase microfluidics at low values of the reynolds and the capillary numbers. Langmuir 19(22):9127–9133
Tiensuu A-L, Öhman O, Lundbladh L, Larsson O (2000) Hydrophobic valves by ink-jet printing on plastic CDs with integrated microfluidics. In: Berg A, Olthuis W, Bergveld P (eds) Micro total analysis systems. Springer, Dordrecht, The Netherlands, pp 575–578. doi:10.1007/978-94-017-2264-3_135
Tovar AR, Lee AP (2009) Lateral cavity acoustic transducer. Lab Chip 9(1):41–43
Truckenmüller R, Rummler Z, Schaller T, Schomburg K (2002) Low-cost thermoforming of micro fluidic analysis chips. J Micromech Microeng 12(4):375–379
Tsai J-H, Lin L (2002) Active microfluidic mixer and gas bubble filter driven by thermal bubble micropump. Sensors Actuators A Phys 97:665–671
Tsai JH, Liwei L (2002) A thermal-bubble-actuated micronozzle-diffuser pump. J Microelectromech Syst 11(6):665–671
Tsai R-T, Wu C-Y (2011) An efficient micromixer based on multidirectional vortices due to baffles and channel curvature. Biomicrofluidics 5(1):014103
Tsao T, Moroney R, Martin B, White R (1991) Electrochemical detection of localized mixing produced by ultrasonic flexural waves. In: Ultrasonics symposium, 1991, Proceedings. IEEE, Washington, DC, pp 937–940
Umbanhowar PB, Prasad V, Weitz DA (1999) Monodisperse emulsion generation via drop break off in a coflowing stream. Langmuir 16(2):347–351
Unger MA, Chou HP, Thorsen T, Scherer A, Quake SR (2000) Monolithic microfabricated valves and pumps by multilayer soft lithography. Science 288(5463):113–116
Van de Pol FCM, Van Lintel HTG, Elwenspoek M, Fluitman JHJ (1990) A thermopneumatic micropump based on micro-engineering techniques. Sensors Actuators A Phys 21(1–3):198–202
van der Wijngaart W, Ask H, Enoksson P, Stemme G (2002) A high-stroke, high-pressure electrostatic actuator for valve applications. Sensors Actuators A Phys 100(2–3):264–271
van Kan JA, Zhang C, Perumal Malar P, van der Maarel JRC (2012) High throughput fabrication of disposable nanofluidic lab-on-chip devices for single molecule studies. Biomicrofluidics 6(3):36502
van Lintel HTG, van De Pol FCM, Bouwstra S (1988) A piezoelectric micropump based on micromachining of silicon. Sensors Actuators 15(2):153–167
van Oudheusden BW (1992) Silicon thermal flow sensors. Sensors Actuators A Phys 30(1–2):5–26
Veenstra T, Lammerink T, Elwenspoek M, Van Den Berg A (1999) Characterization method for a new diffusion mixer applicable in micro flow injection analysis systems. J Micromech Microeng 9(2):199
Vella SJ, Beattie P, Cademartiri R, Laromaine A, Martinez AW, Phillips ST, Mirica KA, Whitesides GM (2012) Measuring markers of liver function using a micropatterned paper device designed for blood from a fingerstick. Anal Chem 84(6):2883–2891
Vrouwe EX, Luttge R, van den Berg A (2004) Direct measurement of lithium in whole blood using microchip capillary electrophoresis with integrated conductivity detection. Electrophoresis 25(10–11):1660–1667
Wagner B, Quenzer HJ, Hoerschelmann S, Lisec T, Juerss M (1996) Bistable microvalve with pneumatically coupled membranes. In: The ninth annual international workshop on micro electro mechanical systems (MEMS 1996), 11–15 Feb 1996. IEEE, Washington, DC, pp 384–388. doi:10.1109/MEMSYS.1996.494012
Waibel G, Kohnle J, Cernosa R, Storz M, Schmitt M, Ernst H, Sandmaier H, Zengerle R, Strobelt T (2003) Highly integrated autonomous microdosage system. Sensors Actuators A Phys 103(1–2):225–230
Waldbaur A, Carneiro B, Hettich P, Wilhelm E, Rapp BE (2013a) Computer-aided microfluidics (CAMF): from digital 3D-CAD models to physical structures within a day. Microfluid Nanofluid 15(5):625–635
Waldbaur A, Kittelmann J, Radtke CP, Hubbuch J, Rapp BE (2013b) Microfluidics on liquid handling stations (μF-on-LHS): an industry compatible chip interface between microfluidics and automated liquid handling stations. Lab Chip 13(12):2337–2343
Waldbaur A, Rapp H, Länge K, Rapp BE (2011) Let there be chip – towards rapid prototyping of microfluidic devices: one-step manufacturing processes (cover article). Anal Methods 3(12):2681–2716
Waldbaur A, Waterkotte B, Schmitz K, Rapp BE (2012) Maskless projection lithography for the fast and flexible generation of grayscale protein patterns. Small 8(10):1570–1578
Walker G, Ozers M, Beebe D (2004) Cell infection within a microfluidic device using virus gradients. Sens Actuators B 98(2):347–355
Walker GM, Beebe DJ (2002) A passive pumping method for microfluidic devices. Lab Chip 2(3):131–134
Wang H, Chen Y, Hassibi A, Scherer A, Hajimiri A (2009) A frequency-shift CMOS magnetic biosensor array with single-bead sensitivity and no external magnet. In: IEEE international, 2009, solid-state circuits conference-digest of technical papers, 2009, ISSCC 2009. IEEE, Washington, DC, pp 438–439
Wang H, Iovenitti P, Harvey E, Masood S (2002) Optimizing layout of obstacles for enhanced mixing in microchannels. Smart Mater Struct 11(5):662
Wang Y-C, Choi MH, Han J (2004) Two-dimensional protein separation with advanced sample and buffer isolation using microfluidic valves. Anal Chem 76(15):4426–4431
Wang Y, Zhe J, Chung BT, Dutta P (2008) A rapid magnetic particle driven micromixer. Microfluid Nanofluid 4(5):375–389
Wego A, Pagel L (2001) A self-filling micropump based on PCB technology. Sensors Actuators A Phys 88(3):220–226
Weigl BH, Kriebel J, Mayes KJ, Bui T, Yager P (1999) Whole blood diagnostics in standard gravity and microgravity by use of microfluidic structures (T-sensors). Microchim Acta 131(1–2):75–83
Wen CY, Yeh CP, Tsai CH, Fu LM (2009) Rapid magnetic microfluidic mixer utilizing AC electromagnetic field. Electrophoresis 30(24):4179–4186
Widmer HM (1983) Trends in industrial analytical-chemistry. Trac Trends Anal Chem 2(1):R8–R10
Wilhelm E, Neumann C, Duttenhofer T, Pires L, Rapp BE (2013a) Connecting microfluidic chips using a chemically inert, reversible, multichannel chip-to-world-interface. Lab Chip 13(22):4343–4351
Wilhelm E, Neumann C, Sachsenheimer K, Schmitt T, Lange K, Rapp BE (2013b) Rapid bonding of polydimethylsiloxane to stereolithographically manufactured epoxy components using a photogenerated intermediary layer. Lab Chip 13(12):2268–2271
Winkley J, Yanowski L, Hynes W (1937) A systematic semimicro procedure for the qualitative analysis of the commoner cations. Mikrochemie 21(1):102–115
Witek MA, Llopis SD, Wheatley A, McCarley RL, Soper SA (2006) Purification and preconcentration of genomic DNA from whole cell lysates using photoactivated polycarbonate (PPC) microfluidic chips. Nucleic Acids Res 34(10):e74
Woias P, Hauser K, Yacoub-George E (2000) An active silicon micromixer for μTAS applications. In: Berg A, Olthuis W, Bergveld P (eds) Micro total analysis systems. Springer, Dordrecht, The Netherlands, pp 277–282
Wong SH, Ward MC, Wharton CW (2004) Micro T-mixer as a rapid mixing micromixer. Sens Actuators B 100(3):359–379
Worgull M, Kolew A, Heilig M, Schneider M, Dinglreiter H, Rapp BE (2011) Hot embossing of high performance polymers. Microsyst Technol 17(4):585–592
Wu C-Y, Liao W-H, Tung Y-C (2011) Integrated ionic liquid-based electrofluidic circuits for pressure sensing within polydimethylsiloxane microfluidic systems. Lab Chip 11(10):1740–1746
Xing Y, Grosjean C, Yu-Chong T (1999) Design, fabrication, and testing of micromachined silicone rubber membrane valves. J Microelectromech Syst 8(4):393–402
Yamahata C, Lacharme F, Burri Y, Gijs MAM (2005) A ball valve micropump in glass fabricated by powder blasting. Sens Actuators B 110(1):1–7
Yan D, Yang C, Miao J, Lam Y, Huang X (2009) Enhancement of electrokinetically driven microfluidic T‐mixer using frequency modulated electric field and channel geometry effects. Electrophoresis 30(18):3144–3152
Yang B, Lin Q (2009) A latchable phase-change microvalve with integrated heaters. J Microelectromech Syst 18(4):860–867
Yang J, Liu Y, Rauch CB, Stevens RL, Liu RH, Lenigk R, Grodzinski P (2002) High sensitivity PCR assay in plastic micro reactors. Lab Chip 2(4):179–187
Yang X, Grosjean C, Tai Y-C, Ho C-M (1998) A MEMS thermopneumatic silicone rubber membrane valve. Sensors Actuators A Phys 64(1):101–108
Yang Z, Goto H, Matsumoto M, Maeda R (2000) Active micromixer for microfluidic systems using lead-zirconate-titanate(PZT)-generated ultrasonic vibration. Electrophoresis 21(1):116–119
Yaralioglu GG, Wygant IO, Marentis TC, Khuri-Yakub BT (2004) Ultrasonic mixing in microfluidic channels using integrated transducers. Anal Chem 76(13):3694–3698
Yardley SJS, Linkenheimer WH (1971) Osmotic fluid reservoir for osmotically activated long-term continuous injector device. United States Patent
Yasuda K (2000) Non-destructive, non-contact handling method for biomaterials in micro-chamber by ultrasound. Sens Actuators B 64(1):128–135
Ymeti A, Greve J, Lambeck PV, Wink T, Stephan WFM, Tom AM, Wijn RR, Heideman RG, Subramaniam V, Kanger JS (2006) Fast, Ultrasensitive Virus Detection Using a Young Interferometer Sensor. Nano Lett 7(2):394–397
Yoshida K, Kikuchi M, Park JH, Yokota S (2002) Fabrication of micro electro-rheological valves (ER valves) by micromachining and experiments. Sensors Actuators A Phys 95(2–3):227–233
Young EW, Berthier E, Guckenberger DJ, Sackmann E, Lamers C, Meyvantsson I, Huttenlocher A, Beebe DJ (2011) Rapid prototyping of arrayed microfluidic systems in polystyrene for cell-based assays. Anal Chem 83(4):1408–1417
Yu-Chuan S, Liwei L, Pisano AP (2002) A water-powered osmotic microactuator. J Microelectromech Syst 11(6):736–742
Zeng J, Banerjee D, Deshpande M, Gilbert JR, Duffy DC, Kellogg GJ (2000) Design analyses of capillary burst valves in centrifugal microfluidics. In: Proceedings of the micro total analysis systems symposium (lTAS 2000) May, 2000. pp 14–18
Zeng S, Chen C-H, Mikkelsen JC Jr, Santiago JG (2001) Fabrication and characterization of electroosmotic micropumps. Sens Actuators B 79(2–3):107–114
Zeng S, Chen C-H, Santiago JG, Chen J-R, Zare RN, Tripp JA, Svec F, Fréchet JM (2002) Electroosmotic flow pumps with polymer frits. Sens Actuators B 82(2):209–212
Zengerle R, Richter A, Sandmaier H (1992) A micro membrane pump with electrostatic actuation. In: Micro electro mechanical systems, 1992, MEMS’92, Proceedings An investigation of micro structures, sensors, actuators, machines and robot, 4–7 Feb 1992. IEEE, Washington, DC, pp 19–24. doi:10.1109/memsys.1992.187684
Zengerle R, Richter M (1994) Simulation of microfluid systems. J Micromech Microeng 4(4):192
Zengerle R, Ulrich J, Kluge S, Richter M, Richter A (1995) A bidirectional silicon micropump. Sensors Actuators A Phys 50(1–2):81–86
Zhao B, Moore JS, Beebe DJ (2001) Surface-directed liquid flow inside microchannels. Science 291(5506):1023–1026
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2015 Springer International Publishing Switzerland
About this chapter
Cite this chapter
Neumann, C., Rapp, B.E. (2015). Fluidic Platforms and Components of Lab-on-a-Chip devices. In: Castillo-León, J., Svendsen, W. (eds) Lab-on-a-Chip Devices and Micro-Total Analysis Systems. Springer, Cham. https://doi.org/10.1007/978-3-319-08687-3_5
Download citation
DOI: https://doi.org/10.1007/978-3-319-08687-3_5
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-08686-6
Online ISBN: 978-3-319-08687-3
eBook Packages: EngineeringEngineering (R0)