Abstract
There is a variety of sensing instruments making use of acoustic waves (often shear waves) near interfaces. Among the concepts shared between the QCM and these instruments are the mass sensitivity and the acoustic reflectivity as a central intermediate parameter. The kHz resonators measure viscoelastic parameters at frequencies more relevant to most applications than MHz frequencies. On the other hand, they are less sensitive. Smaller resonators operating at higher frequencies tend to have better mass-sensitivity.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Mason, W.P., Baker, W.O., McSkimin, H.J., Heiss, J.H.: Measurement of shear elasticity and viscosity of liquids at ultrasonic frequencies. Phys. Rev. 75(6), 936–946 (1949)
Alig, I., Lellinger, D., Sulimma, J., Tadjbakhsch, S.: Ultrasonic shear wave reflection method for measurements of the viscoelastic properties of polymer films. Rev. Sci. Instrum. 68(3), 1536–1542 (1997)
Wang, X.J., Subramaniam, K.V., Lin, F.B.: Ultrasonic measurement of viscoelastic shear modulus development in hydrating cement paste. Ultrasonics 50(7), 726–738 (2010)
Alig, I., Steeman, P.A.M., Lellinger, D., Dias, A.A., Wienke, D.: Polymerization and network formation of UV curable materials monitored by hyphenated real-time ultrasound reflectometry and near-infrared spectroscopy (RT US/NIRS). Prog. Org. Coat. 55(2), 88–96 (2006)
Wegener, M., Oehler, H., Lellinger, D., Alig, I.: Note: piezoelectric polymers as transducers for the ultrasonic-reflection method and the application in mechanical property-screening of coatings. Rev. Sci. Instrum. 83(1), 3 (2012)
Alig, I., Oehler, H., Lellinger, D., Tadjbach, S.: Monitoring of film formation, curing and ageing of coatings by an ultrasonic reflection method. Prog. Org. Coat. 58(2–3), 200–208 (2007)
Lellinger, D., Tadjbach, S., Alig, I.: Determination of the elastic moduli of polymer films by a new ultrasonic reflection method. Macromol. Symp. 184, 203–213 (2002)
Kiry, F., Martinoty, P.: Ultrasonic investigation of anisotropic viscosities in a nematic liquid-crystal. J. De Phys. 38(2), 153–157 (1977)
Martinoty, P., Candau, S.: Determination of viscosity coefficients of a nematic liquid crystal using a shear waves reflectance technique. Mol. Cryst. Liq. Cryst. 14(3–4), 243 (1971)
Alig, I., Tadjbakhsch, S., Floudas, G., Tsitsilianis, C.: Viscoelastic contrast and kinetic frustration during poly(ethylene oxide) crystallization in a homopolymer and a triblock copolymer. Comparison of ultrasonic and low-frequency rheology. Macromolecules 31(20), 6917–6925 (1998)
Alig, I., Tadjbakhsch, S., Hadjichristidis, N., Floudas, G.: Order-to-disorder transition in a diblock copolymer studied at ultrasonic frequencies with a shear wave reflection technique. Europhys. Lett. 52(3), 291–296 (2000)
Baron, T., Lebrasseur, E., Bassignot, F., Martin, G., Pétrini, V., Ballandras, S.: High-overtone bulk acoustic resonator. In: Beghi, M.G. (ed.) Modeling and Measurement Methods for Acoustic Waves and for Acoustic Microdevices. Intech, Rijeka (2013). www.intechopen.com/books/modeling-and-measurement-methods-for-acoustic-waves-and-for-acoustic-microdevices/high-overtone-bulk-acoustic-resonator
Huang, H.C., Knox, J.D., Turski, Z., Wargo, R., Hanak, J.J.: Fabrication of submicron LiNbO3 transducers for microwave acoustic (bulk) delay-lines. Appl. Phys. Lett. 24(3), 109–111 (1974)
Gachon, D., Courjon, E., Martin, G., Gauthier-Manuel, L., Jeannot, J.-C., Daniau, W., Ballandras, S.: Fabrication of high frequency bulk acoustic wave resonator using thinned single-crystal lithium niobate. Ferroelectrics 362(1), 30–40 (2010) www.tandfonline.com/doi/abs/10.1080/00150190801997872
Rabus, D., Martin, G., Carry, E., Ballandras, S.: Eight channel embedded electronic open loop interrogation for multi sensor measurements. Proc. Eur. Freq. Time Forum (EFTF) 436–442 (2012)
Pijolat, M., Reinhardt, A., Defay, E., Deguet, C., Mercier, D., Aid, M., Moulet, J., Ghyselen, B., Gachon, D., Ballandras, S.: Large Qf product for HBAR using smart cut transfer of LiNbO3 thin layers onto LiNbO3 substrate. Proc. IEEE Ultrason. Symp. 201–204 (2008)
Mansfeld, G.D.: Theory of high overtone bulk acoustic wave resonator as a gas sensor. In: Proceedings of 13th International Conference on Microwaves, Radar and Wireless Communications (MIKON) (2000)
Valtorta, D., Mazza, E.: Measurement of rheological properties of soft biological tissue with a novel torsional resonator device. Rheol. Acta 45(5), 677–692 (2006)
Stroop, R., Uribe, D.O., Martinez, M.O., Brokelmann, M., Hemsel, T., Wallaschek, J.: Tactile tissue characterisation by piezoelectric systems. J. Electroceram. 20(3–4), 237–241 (2008)
Stokich, T.M., Radtke, D.R., White, C.C., Schrag, J.L.: An instrument for precise measurement of viscoelastic properties of low-viscosity dilute macromolecular solutions at Frequencies from 20 to 500 khz. J. Rheol. 38(4), 1195–1210 (1994)
http://www.flucon.de/. Accessed 28 Feb 2013
Kirschenmann, L., Pechhold, W.: Piezoelectric rotary vibrator (PRV)—a new oscillating rheometer for linear viscoelasticity. Rheol. Acta 41(4), 362–368 (2002)
Pechhold, W., Mayer, U., Raju, G.B., Guillon, O.: Piezo rotary and axial vibrator (PRAV) characterization of a fresh coating during its drying. Rheol. Acta 50(3), 221–229 (2011)
Crassous, J.J., Regisser, R., Ballauff, M., Willenbacher, N.: Characterization of the viscoelastic behavior of complex fluids using the piezoelastic axial vibrator. J. Rheol. 49(4), 851–863 (2005)
Vadillo, D.C., Tuladhar, T.R., Mulji, A.C., Mackley, M.R.: The rheological characterization of linear viscoelasticity for ink jet fluids using piezo axial vibrator and torsion resonator rheometers. J. Rheol. 54(4), 781–795 (2010)
Grate, J.W., Martin, S.J., White, R.M.: Acoustic-wave microsensors. 1. Anal. Chem. 65(21), A940–A948 (1993)
Martin, S.J., Frye, G.C., Senturia, S.D.: Dynamics and response of polymer-coated surface-acoustic-wave devices—effect of viscoelastic properties and film resonance. Anal. Chem. 66(14), 2201–2219 (1994)
Reindl, L., Scholl, G., Ostertag, T., Scherr, H., Wolff, U., Schmidt, F.: Theory and application of passive SAW radio transponders as sensors. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 45(5), 1281–1292 (1998)
Rock, F., Barsan, N., Weimar, U.: Electronic nose: current status and future trends. Chem. Rev. 108(2), 705–725 (2008)
http://us.msasafety.com/CBRNE-Detectors/CBRNE-Detectors/HAZMATCAD%26reg%3B-and-HAZMATCAD%26reg%3B-Plus/p/000400000200001000. Accessed 11 May 2013
Yeo, L.Y., Friend, J.R.: Ultrafast microfluidics using surface acoustic waves. Biomicrofluidics 3(1), 012002 (2009)
Friend, J., Yeo, L.Y.: Microscale acoustofluidics: microfluidics driven via acoustics and ultrasonics. Rep. Prog. Phys. 83(2), 647–704 (2011)
Josse, F., Bender, F., Cernosek, R.W.: Guided shear horizontal surface acoustic wave sensors for chemical and biochemical detection in liquids. Anal. Chem. 73(24), 5937–5944 (2001)
Saha, K., Bender, F., Gizeli, E.: Comparative study of IgG binding to proteins G and A: nonequilibrium kinetic and binding constant determination with the acoustic waveguide device. Anal. Chem. 75(4), 835–842 (2003)
Fu, Y.Q., Luo, J.K., Du, X.Y., Flewitt, A.J., Li, Y., Markx, G.H., Walton, A.J., Milne, W.I.: Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review. Sens. Actuators B Chem. 143(2), 606–619 (2010)
Martin, F., Newton, M.I., McHale, G., Melzak, K.A., Gizeli, E.: Pulse mode shear horizontal-surface acoustic wave (SH-SAW) system for liquid based sensing applications. Biosens. Bioelectron. 19(6), 627–632 (2004)
Lange, K., Rapp, B.E., Rapp, M.: Surface acoustic wave biosensors: a review. Anal. Bioanal. Chem. 391(5), 1509–1519 (2008)
http://saw-instruments.com/index.php. Accessed 20 Sept 2013
Pohl, A.: A review of wireless SAW sensors. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 47(2), 317–332 (2000)
Zhou, X.F., Zhang, J., Jiang, T., Wang, X.H., Zhu, Z.Q.: Humidity detection by nanostructured ZnO: a wireless quartz crystal microbalance investigation. Sens. Actuators A Phys. 135(1), 209–214 (2007)
Ricco, A.J., Martin, S.J., Zipperian, T.E.: Surface acoustic-wave gas sensor based on film conductivity changes. Sens. Actuators 8(4), 319–333 (1985)
Jungwirth, M., Scherr, H., Weigel, R.: Micromechanical precision pressure sensor incorporating SAW delay lines. Acta Mech. 158(3–4), 227–252 (2002)
Berger, R., Gerber, C., Lang, H.P., Gimzewski, J.K.: Micromechanics: a toolbox for femtoscale science: “towards a laboratory on a tip”‘. Microelectron. Eng. 35(1–4), 373–379 (1997)
Varshney, M., Waggoner, P.S., Tan, C.P., Aubin, K., Montagna, R.A., Craighead, H.G.: Prion protein detection using nanomechanical resonator arrays and secondary mass labeling. Anal. Chem. 80(6), 2141–2148 (2008)
Waggoner, P.S., Varshney, M., Craighead, H.G.: Detection of prostate specific antigen with nanomechanical resonators. Lab Chip 9(21), 3095–3099 (2009)
Yang, Y.T., Callegari, C., Feng, X.L., Ekinci, K.L., Roukes, M.L.: Zeptogram-scale nanomechanical mass sensing. Nano Lett. 6(4), 583–586 (2006)
Wingqvist, G.: AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications—a review. Surf. Coat. Technol. 205(5), 1279–1286 (2010)
Wingqvist, G., Bjurstrom, J., Liljeholm, L., Yantchev, V., Katardjiev, I.: Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous media. Sens. Actuators B Chem. 123(1), 466–473 (2007)
Zuniga, C., Rinaldi, M., Khamis, S.M., Johnson, A.T., Piazza, G.: Nanoenabled microelectromechanical sensor for volatile organic chemical detection. Appl. Phys. Lett. 94(22), 223122 (2009)
Tang, P.K., Wang, P.H., Li, M.L., Lu, M.S.C.: Design and characterization of the immersion-type capacitive ultrasonic sensors fabricated in a CMOS process. J. Micromech. Microeng. 21(2), 129901 (2011)
Arlett, J.L., Roukes, M.L.: Ultimate and practical limits of fluid-based mass detection with suspended microchannel resonators. J. Appl. Phys. 108(8) , 084701 (2010)
Fanget, S., Hentz, S., Puget, P., Arcamone, J., Matheron, M., Colinet, E., Andreucci, P., Duraffourg, L., Myers, E., Roukes, M.L.: Gas sensors based on gravimetric detection—a review. Sens. Actuators B Chem. 160(1), 804–821 (2011)
Lange, D., Brand, O., Baltes, H.: CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications. Springer (2002)
Hölscher, H., Schwarz, U.D., Wiesendanger, R.: Calculation of the frequency shift in dynamic force microscopy. Appl. Surf. Sci. 140(3–4), 344–351 (1999)
Sader, J.E., Jarvis, S.P.: Accurate formulas for interaction force and energy in frequency modulation force spectroscopy. Appl. Phys. Lett. 84(10), 1801–1803 (2004)
Giessibl, F.J.: A direct method to calculate tip-sample forces from frequency shifts in frequency-modulation atomic force microscopy. Appl. Phys. Lett. 78(1), 123–125 (2001)
Dufour, I., Josse, F., Heinrich, S.M., Lucat, C., Ayela, C., Menil, F., Brand, O.: Unconventional uses of microcantilevers as chemical sensors in gas and liquid media. Sens. Actuators B Chem. 170, 115–121 (2012)
Chaste, J., Eichler, A., Moser, J., Ceballos, G., Rurali, R., Bachtold, A.: A nanomechanical mass sensor with yoctogram resolution. Nat. Nanotechnol. 7(5), 300–303 (2012)
http://www.ifcs-eftf2011.org/sites/ifcs-eftf2011.org/files/editor-files/Slides_Piazza.pdf. Accessed 18 June 2014
Rubiola, E.: Phase Noise and Frequency Stability in Oscillators. Cambridge University Press, New York (2010)
Lakin, K., Wang, J., Kline, G., Landin, A., Chen, Y., Hunt, J. Thin film resonators and filters. In: Ultrasonics Symposium Proceedings, pp. 466–475 (1982)
Wingqvist, G.: Thin-film electro-acoustic sensors based on AlN and its alloys: possibilities and limitations. Microsyst. Technol. Micro Nanosyst. Inf. Storage Process. Syst. 18(7–8), 1213–1223 (2012)
Ruby, R.: Review and comparison of bulk acoustic wave FBAR, SMR technology. In: 2007 IEEE Ultrasonics Symposium Proceedings, vols. 1–6, pp. 1029–1040, New York (2007)
Haines, J., Cambon, O., Keen, D.A., Tucker, M.G., Dove, M.T.: Structural disorder and loss of piezoelectric properties in alpha-quartz at high temperature. Appl. Phys. Lett. 81(16), 2968–2970 (2002)
Krempl, P., Schleinzer, G., Wallnofer, W.: Gallium phosphate, GaPO4: a new piezoelectric crystal material for high-temperature sensorics. Sens. Actuators A Phys. 61(1–3), 361–363 (1997)
Fritze, H., Tuller, H.L.: Langasite for high-temperature bulk acoustic wave applications. Appl. Phys. Lett. 78(7), 976–977 (2001)
http://newpiezo.com/langasite.html. Accessed 28 Mar 2013
Yu, F.P., Zhang, S.J., Zhao, X.A., Yuan, D.R., Wang, Q.M., Shrout, T.R.: High temperature piezoelectric properties of yttrium calcium oxyborate single crystals. Phys. Status Solidi Rapid Res. Lett. 4(5–6), 103–105 (2010)
https://www.avl.com/pressure-sensors-for-combustion-analysis. Accessed 28 Mar 2013
Fritze, H.: High-temperature piezoelectric crystals and devices. J. Electroceram. 26(1–4), 122–161 (2011)
Jin, X.X., Huang, Y., Mason, A., Zeng, X.Q.: Multichannel monolithic quartz crystal microbalance gas sensor array. Anal. Chem. 81(2), 595–603 (2009)
Hung, V.N., Abe, T., Minh, P.N., Esashi, M.: Miniaturized, highly sensitive single-chip multichannel quartz-crystal microbalance. Appl. Phys. Lett. 81(26), 5069–5071 (2002)
Berg, S., Johannsmann, D.: High speed microtribology with quartz crystal resonators. Phys. Rev. Lett. 91(14), 145505 (2003)
Arlett, J.L., Myers, E.B., Roukes, M.L.: Comparative advantages of mechanical biosensors. Nat. Nanotechnol. 6(4), 203–215 (2011)
Squires, T.M., Messinger, R.J., Manalis, S.R.: Making it stick: convection, reaction and diffusion in surface-based biosensors. Nat. Biotechnol. 26(4), 417–426 (2008)
Rabe, J., Seidemann, V., Buettgenbach, S.: Monolithic fabrication of wireless miniaturized quartz crystal microbalance (QCM-R) arrays and their application for biochemical sensors. Sens. Mater. 15(7), 381–391 (2003)
O’Connell, A.D., Hofheinz, M., Ansmann, M., Bialczak, R.C., Lenander, M., Lucero, E., Neeley, M., Sank, D., Wang, H., Weides, M., Wenner, J., Martinis, J.M., Cleland, A.N.: Quantum ground state and single-phonon control of a mechanical resonator. Nature 464(7289), 697–703 (2010)
Teufel, J.D., Donner, T., Li, D.L., Harlow, J.W., Allman, M.S., Cicak, K., Sirois, A.J., Whittaker, J.D., Lehnert, K.W., Simmonds, R.W.: Sideband cooling of micromechanical motion to the quantum ground state. Nature 475(7356), 359–363 (2011)
Meystre, P.: Cool vibrations. Science 333(6044), 832–833 (2011)
Author information
Authors and Affiliations
Corresponding author
Glossary
- Variable
-
Definition (Comments)
- A
-
Effective area of the resonator plate
- c
-
Speed of propagation
- E
-
Energy
- f
-
As an index: film
- f r
-
Resonance frequency
- f 0
-
Resonance frequency at the fundamental (f 0 = Z q /(2m q ) = Z q /(2ρ q d q ))
- GL
-
As an index: Guiding Layer
- h
-
Planck constant
- M R
-
Mass of a resonator
- \( \tilde{r}_{q,S} \)
-
Reflectivity evaluated at the resonator surface
- Z q
-
Acoustic wave impedance of AT-cut quartz (Z q = 8.8 × 106 kg m−2 s−1)
- λ
-
Wavelength of sound
- Γ
-
Imaginary part of a resonance frequency
- κ R
-
Spring constant of a resonator
- ξ R
-
Drag coefficient of a resonator
- ω
-
Angular frequency
Rights and permissions
Copyright information
© 2015 Springer International Publishing Switzerland
About this chapter
Cite this chapter
Johannsmann, D. (2015). Other Surface-Acoustic-Wave Based Instruments. In: The Quartz Crystal Microbalance in Soft Matter Research. Soft and Biological Matter. Springer, Cham. https://doi.org/10.1007/978-3-319-07836-6_15
Download citation
DOI: https://doi.org/10.1007/978-3-319-07836-6_15
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-07835-9
Online ISBN: 978-3-319-07836-6
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)