Abstract
The application of optical fiber technology for sensing has undergone tremendous growth over the last years. Its use for imaging hard-to-reach locations and its property to conduct light to a remote convenient location make of it a suitable tool for in vivo sensing applications, such as endoscopy. Here, we present an optical fiber probe sensor for label-free biosensing based on SOI ring resonators. We describe the operating principle of the device, the technology used to integrate a Silicon-on-insulator (SOI) chip on a fiber facet and discuss some experimental results.
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References
J.P. Golden, C.R. Taitt, L.C. Shriver-Lake, Y.S. Shubin, F.S. Ligler, A portable automated multianalyte biosensor. Talanta 65(5), 1078−1085 (2005)
A. Leung, P.M. Shankar, R. Mutharasan, A review of fiber-optic biosensors. Sens. Actuators B 125(2), 688−703 (2007)
Elveflow, Microfluidic innovation center http://www.elveflow.com/microfluidic-reviews-and-tutorials/microfluidics-and-microfluidic-devices-a-review
A.D. Kersey, M.A. Davis, H.J. Patrick, M. LeBlanc, K.P. Koo, C.G. Askins, M.A. Putnam, E.J. Friebele, Fiber grating sensors. J. Lightwave Technol. 15(8), 1442−1463 (1997)
X.D. Fan, I.M. White, S.I. Shopoua, H.Y. Zhu, J.D. Suter, Y.Z. Sun, Sensitive optical biosensors for unlabeled targets: a review. Anal. Chim. Acta 620(1–2), 826 (2008)
A. Cusano, A. Cutola, A. Jaques, Fiber Bragg Grating Sensors: Research Advancements, Industrial Applications and Market Explotation (Bentham Science Publishers Ltd, 2011)
K. De Vos, Label-free silicon photonics biosensor platform with microring resonators, Ph.D. Dissertation, (Ghent University, 2010)
S.K. Selvaraja, P. Jaenen, W. Bogaerts, D. Van Thourhout, P. Dumon, R. Baets, Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193-nm optical lithography. J. Lightwave Technol. 27(18), 4076−4083 (2009)
W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, D. Van Thourhout, Nanophotonic waveguides in Silicon-on-insulator fabricated with CMOS technology. J. Lightwave Technol. 23(1), 401−412 (2005)
S.K. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, R.G. Baets, Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology. J. Sel. Top. Quantum Electron. 16(1), 316–324 (2010)
D. Taillaert, Grating couplers as Interface between Optical Fibres and Nanophotonic Waveguides, Ph.D. Dissertation, (Ghent University, 2004)
T. Tamir, S.T. Peng, Analysis and design of grating couplers. Appl. Phys. 14(3), 235−254 (1977)
D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, R. Baets, Grating couplers for coupling between optical fibers and nanophotonic waveguides. J. Appl. Phys. 45(1), 6071−6077 (2006)
F. Van Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. Van Thourhout, R. Baets, Compact focusing grating couplers for silicon-on-insulator integrated circuits. IEEE Photonics Technol. Lett. 19(23), 1919–1921 (2007)
F. Van Laere, W. Bogaerts, P. Dumon, G. Roelkens, D. Van Thourhout, R. Baets, Focusing polarization diversity grating couplers in silicon-on- insulator. J. Lightwave Technol. 27(5–8), 612−618 (2009)
D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, G. Roelkens, High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-Insulator platform. Opt. Express 18(17), 18278–18283 (2010)
Y. Tzeng, H. Lin, Dry etching of silicon materials in SF6-based plasmas. J. Electrochem. Soc. 134(9), 2304–2309 (1987)
H. Seidel, L. Csepregi, A. Heuberger, H. Baumgrtel, Anisotropic etching of crystalline silicon in alkaline solutions—orientation dependence and behavior of passivation layers. J. Electrochem. Soc. 137(11), 3612−3626 (1990)
K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, R. Baets, Silicon-on- Insulator microring resonator for sensitive and label-free biosensing. Opt. Express 15(12), 7610–7615 (2007)
R. Belda, J.V. Herraez, O. Diez, A study of the refractive index and surface tension synergy of the binary water/ethanol: influence of concentration. Phys. Chem. Liq. 43(1), 91–101 (2005)
G. Shambat, J. Provine, K. Rivoire, T. Sarmiento, J. Harris, J. Vuckovic, Optical fiber tips functionalized with semiconductor photonic crystal cavities. Appl. Phys. Lett. 99(19), 191102 (2011)
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Lerma Arce, C., De Vos, K., Claes, T., Komorowska, K., Bienstman, P. (2015). SOI Microring Resonator Sensor Integrated on a Fiber Facet. In: Cusano, A., Consales, M., Crescitelli, A., Ricciardi, A. (eds) Lab-on-Fiber Technology. Springer Series in Surface Sciences, vol 56. Springer, Cham. https://doi.org/10.1007/978-3-319-06998-2_3
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DOI: https://doi.org/10.1007/978-3-319-06998-2_3
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