Skip to main content

SOI Microring Resonator Sensor Integrated on a Fiber Facet

  • Chapter
  • First Online:
Book cover Lab-on-Fiber Technology

Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 56))

Abstract

The application of optical fiber technology for sensing has undergone tremendous growth over the last years. Its use for imaging hard-to-reach locations and its property to conduct light to a remote convenient location make of it a suitable tool for in vivo sensing applications, such as endoscopy. Here, we present an optical fiber probe sensor for label-free biosensing based on SOI ring resonators. We describe the operating principle of the device, the technology used to integrate a Silicon-on-insulator (SOI) chip on a fiber facet and discuss some experimental results.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 84.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Hardcover Book
USD 109.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. J.P. Golden, C.R. Taitt, L.C. Shriver-Lake, Y.S. Shubin, F.S. Ligler, A portable automated multianalyte biosensor. Talanta 65(5), 1078−1085 (2005)

    Article  Google Scholar 

  2. A. Leung, P.M. Shankar, R. Mutharasan, A review of fiber-optic biosensors. Sens. Actuators B 125(2), 688−703 (2007)

    Article  Google Scholar 

  3. Elveflow, Microfluidic innovation center http://www.elveflow.com/microfluidic-reviews-and-tutorials/microfluidics-and-microfluidic-devices-a-review

  4. A.D. Kersey, M.A. Davis, H.J. Patrick, M. LeBlanc, K.P. Koo, C.G. Askins, M.A. Putnam, E.J. Friebele, Fiber grating sensors. J. Lightwave Technol. 15(8), 1442−1463 (1997)

    Article  ADS  Google Scholar 

  5. X.D. Fan, I.M. White, S.I. Shopoua, H.Y. Zhu, J.D. Suter, Y.Z. Sun, Sensitive optical biosensors for unlabeled targets: a review. Anal. Chim. Acta 620(1–2), 826 (2008)

    Google Scholar 

  6. A. Cusano, A. Cutola, A. Jaques, Fiber Bragg Grating Sensors: Research Advancements, Industrial Applications and Market Explotation (Bentham Science Publishers Ltd, 2011)

    Google Scholar 

  7. K. De Vos, Label-free silicon photonics biosensor platform with microring resonators, Ph.D. Dissertation, (Ghent University, 2010)

    Google Scholar 

  8. S.K. Selvaraja, P. Jaenen, W. Bogaerts, D. Van Thourhout, P. Dumon, R. Baets, Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193-nm optical lithography. J. Lightwave Technol. 27(18), 4076−4083 (2009)

    Article  ADS  Google Scholar 

  9. W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, D. Van Thourhout, Nanophotonic waveguides in Silicon-on-insulator fabricated with CMOS technology. J. Lightwave Technol. 23(1), 401−412 (2005)

    Article  ADS  Google Scholar 

  10. S.K. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, R.G. Baets, Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology. J. Sel. Top. Quantum Electron. 16(1), 316–324 (2010)

    Article  Google Scholar 

  11. D. Taillaert, Grating couplers as Interface between Optical Fibres and Nanophotonic Waveguides, Ph.D. Dissertation, (Ghent University, 2004)

    Google Scholar 

  12. T. Tamir, S.T. Peng, Analysis and design of grating couplers. Appl. Phys. 14(3), 235−254 (1977)

    Article  ADS  Google Scholar 

  13. D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, R. Baets, Grating couplers for coupling between optical fibers and nanophotonic waveguides. J. Appl. Phys. 45(1), 6071−6077 (2006)

    Article  Google Scholar 

  14. F. Van Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. Van Thourhout, R. Baets, Compact focusing grating couplers for silicon-on-insulator integrated circuits. IEEE Photonics Technol. Lett. 19(23), 1919–1921 (2007)

    Article  ADS  Google Scholar 

  15. F. Van Laere, W. Bogaerts, P. Dumon, G. Roelkens, D. Van Thourhout, R. Baets, Focusing polarization diversity grating couplers in silicon-on- insulator. J. Lightwave Technol. 27(5–8), 612−618 (2009)

    Article  ADS  Google Scholar 

  16. D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, G. Roelkens, High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-Insulator platform. Opt. Express 18(17), 18278–18283 (2010)

    Article  ADS  Google Scholar 

  17. Y. Tzeng, H. Lin, Dry etching of silicon materials in SF6-based plasmas. J. Electrochem. Soc. 134(9), 2304–2309 (1987)

    Article  Google Scholar 

  18. H. Seidel, L. Csepregi, A. Heuberger, H. Baumgrtel, Anisotropic etching of crystalline silicon in alkaline solutions—orientation dependence and behavior of passivation layers. J. Electrochem. Soc. 137(11), 3612−3626 (1990)

    Article  Google Scholar 

  19. K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, R. Baets, Silicon-on- Insulator microring resonator for sensitive and label-free biosensing. Opt. Express 15(12), 7610–7615 (2007)

    Article  ADS  Google Scholar 

  20. R. Belda, J.V. Herraez, O. Diez, A study of the refractive index and surface tension synergy of the binary water/ethanol: influence of concentration. Phys. Chem. Liq. 43(1), 91–101 (2005)

    Article  Google Scholar 

  21. G. Shambat, J. Provine, K. Rivoire, T. Sarmiento, J. Harris, J. Vuckovic, Optical fiber tips functionalized with semiconductor photonic crystal cavities. Appl. Phys. Lett. 99(19), 191102 (2011)

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Cristina Lerma Arce .

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 2015 Springer International Publishing Switzerland

About this chapter

Cite this chapter

Lerma Arce, C., De Vos, K., Claes, T., Komorowska, K., Bienstman, P. (2015). SOI Microring Resonator Sensor Integrated on a Fiber Facet. In: Cusano, A., Consales, M., Crescitelli, A., Ricciardi, A. (eds) Lab-on-Fiber Technology. Springer Series in Surface Sciences, vol 56. Springer, Cham. https://doi.org/10.1007/978-3-319-06998-2_3

Download citation

Publish with us

Policies and ethics