Abstract
Due to their high stiffness, compact dimensions, and extremely high positioning resolution, piezoelectric actuators are used exclusively in the vast majority of nanopositioning systems. This chapter introduces piezoelectric actuators and describes their electromechanical properties, with a focus on those that are relevant in nanopositioning applications.
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Notes
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Pierre Curie was born in 1859 and died of an accident with a horse carriage in 1906. Jacques was born in 1855 and lived till 1941. The discovery of the piezoelectric effect was made in Jacques’ laboratory (Mason 1981).
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Fleming, A.J., Leang, K.K. (2014). Piezoelectric Transducers. In: Design, Modeling and Control of Nanopositioning Systems. Advances in Industrial Control. Springer, Cham. https://doi.org/10.1007/978-3-319-06617-2_2
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