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Fundamentals of Laser-Assisted Micro- and Nanotechnologies pp 149–171Cite as

Laser-Induced Local Oxidation of Thin Metal Films: Physical Fundamentals and Applications

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Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 195))

Abstract

Local laser oxidation of thin metal films allows recording of an optical image on thin films with the highest resolution and high productivity at the same time, and without distortions specific to laser ablation. A technique for writing of diffractive optical elements was developed on the basis of this process. Laser-matter interaction physics and laser technology underlying this method are described in this chapter.

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Notes

  1. 1.

    The reader can now carry out this experiment independently; we repeated it 40 years later (1968–2008) and obtained the same result; however, this time a micrograph was taken with a high-magnification microscope (see Fig. 7.1).

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Acknowledgments

Authors wish to thank collaborators who have contributed to our research efforts in this field and, in particular, Dr. Elena A. Shakchno, Michail V. Yarchuk, Dmitry A. Sinev from St-Petersburg National Research University of Information Technologies, Mechanics and Optics, and Voldemar P. Koronkevich, Viktor P. Korolkov, Evgeny G. Churin, Vadim Cherkashin, Anatoly I. Malyshev from Institute of Automation and Electrometry , Russian Academy of Sciences, Siberian Branch.

This study was supported by the Russian Federation Presidential Grant for leading scientific school SS–619.2012.2 and the Russian Foundation for Basic Research Grants 12–02–00974a, No 12–02–01118a and No 13–02–00971.

Author information

Authors and Affiliations

  1. Mechanics and Optics Chair of Laser Technologies and Applied Ecology, St. Petersburg National Research University of Information Technologies, 49 Kronverksky pr., St. Petersburg, 197101, Russian Federation

    Vadim P. Veiko

  2. Institute of Automation and Electrometry Siberian Branch of Russian Academy of Science, Academician Koptug ave. 1, Novosibirsk, 630090, Russian Federation

    Alexander G. Poleshchuk

Authors
  1. Vadim P. Veiko
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  2. Alexander G. Poleshchuk
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Correspondence to Vadim P. Veiko .

Editor information

Editors and Affiliations

  1. Dept. Laser-based Technologies, NRU ITMO, St. Petersburg, Russia

    Vadim P. Veiko

  2. Natural Sciences Center, General Physics Institute RAS, Moscow, Russia

    Vitaly I. Konov

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Veiko, V.P., Poleshchuk, A.G. (2014). Laser-Induced Local Oxidation of Thin Metal Films: Physical Fundamentals and Applications. In: Veiko, V., Konov, V. (eds) Fundamentals of Laser-Assisted Micro- and Nanotechnologies. Springer Series in Materials Science, vol 195. Springer, Cham. https://doi.org/10.1007/978-3-319-05987-7_7

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