Abstract
In this paper, we propose a measurement system for three-dimensional microscope which is designed to move the objective lens in two directions polar and azimuth angle. By only two measurements of adjusting polar angle with the controller and measuring the length of the object through camera, we can get three-dimensional information of the object like height, step and angle. Servo-controllers, PC interface, image acquisition software and image processing software have been developed for this system and experimental results show the effectiveness of the proposed system.
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Acknowledgements
This research was supported by the MSIP (Ministry of Science, ICT and Future Planning), Korea, under the C-ITRC (Convergence Information Technology Research Center) support program (NIPA-2013-H0401-13-1006) supervised by the NIPA (National IT Industry Promotion Agency)
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© 2014 Springer International Publishing Switzerland
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Choi, YB., Nam, KJ., Kim, WJ., Jung, DH. (2014). Development of Measurement System for 3D Microscope. In: Tutsch, R., Cho, YJ., Wang, WC., Cho, H. (eds) Progress in Optomechatronic Technologies. Lecture Notes in Electrical Engineering, vol 306. Springer, Cham. https://doi.org/10.1007/978-3-319-05711-8_9
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DOI: https://doi.org/10.1007/978-3-319-05711-8_9
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