The Effect of Hydrogen Plasma Treatment on the Field-Emission Characteristics of Silicon Nanowires
Silicon nanowires (SiNWs) were formed on nickel-coated silicon substrates by a solid–liquid-solid (SLS) growth mechanism. Effect of hydrogen plasma treatment on the field-emission characteristics of the silicon nanowires was investigated. The results show that hydrogen plasma treatment can enhance the field-emission characteristics of the SiNWs showing a decrease in turn-on field as well as an increase in field enhancement factor. It is believed that hydrogen plasma treatment plays an important role in the improvement of field-emission characteristics of silicon emitters.
KeywordsSilicon nanowires (SiNWs) Field-emission Plasma treatment
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