The Effect of Hydrogen Plasma Treatment on the Field-Emission Characteristics of Silicon Nanowires

Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 293)


Silicon nanowires (SiNWs) were formed on nickel-coated silicon substrates by a solid–liquid-solid (SLS) growth mechanism. Effect of hydrogen plasma treatment on the field-emission characteristics of the silicon nanowires was investigated. The results show that hydrogen plasma treatment can enhance the field-emission characteristics of the SiNWs showing a decrease in turn-on field as well as an increase in field enhancement factor. It is believed that hydrogen plasma treatment plays an important role in the improvement of field-emission characteristics of silicon emitters.


Silicon nanowires (SiNWs) Field-emission Plasma treatment 


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Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  1. 1.Department of Electrical EngineeringDayeh UniversityChanghua CountyTaiwan, Republic of China
  2. 2.Department of Electronic EngineeringChung Chou University of Science and TechnologyChanghua CountyTaiwan, Republic of China

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