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Growth and Characterization of Nitrogen Incorporated Amorphous Carbon Films Having Embedded Nanocrystallies

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Physics of Semiconductor Devices

Part of the book series: Environmental Science and Engineering ((ENVENG))

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Abstract

This paper reports the growth and characterization of nitrogen incorporated amorphous carbon films having embedded nanocrystallites deposited by filtered anodic jet carbon arc technique. The films are characterized by X-ray diffraction, scanning electron microscopy, atomic force microscopy, Raman, residual stress and nanoindentation. The properties are found to depend on the substrate bias. The film deposited at −60 V substrate bias shows maximum hardness of 24 GPa and elastic modulus of 215 GPa.

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Acknowledgments

The authors are grateful to Prof. R. C. Budhani, Director, CSIR-National Physical Laboratory, New Delhi (India) for his kind permission to publish this work. We thank to Mr. K. N. Sood for providing SEM micrograph, to Dr. V. P. S. Awana for providing XRD patterns, to Mr. Sandeep for providing AFM micrograph and to Dr. Sushil Kumar for useful discussion. Mr. R. K. Tripathi is grateful to the Ministry of Science and Technology and Ministry of New and Renewable Energy, Government of India for providing financial assistant.

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Authors and Affiliations

  1. Polymorphic Carbon Thin Films Group, Physics of Energy Harvesting Division, CSIR-National Physical Laboratory, Dr. K. S. Krishnan Road, New Delhi, 110012, India

    R. K. Tripathi, O. S. Panwar & Sreekumar Chockalingam

  2. Department of Physics and Astrophysics, University of Delhi, Delhi, India

    Ishpal

Authors
  1. R. K. Tripathi
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  2. O. S. Panwar
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  3. Ishpal
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  4. Sreekumar Chockalingam
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Corresponding author

Correspondence to O. S. Panwar .

Editor information

Editors and Affiliations

  1. Amity Institute for Advanced Research and Studies (Meterials & Devices), Amity University, Noida, Uttar Pradesh, India

    V. K. Jain

  2. Amity Institute for Advanced Research and Studies (Meterials & Devices), Amity University, Noida, Uttar Pradesh, India

    Abhishek Verma

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Tripathi, R.K., Panwar, O.S., Ishpal, Chockalingam, S. (2014). Growth and Characterization of Nitrogen Incorporated Amorphous Carbon Films Having Embedded Nanocrystallies. In: Jain, V., Verma, A. (eds) Physics of Semiconductor Devices. Environmental Science and Engineering(). Springer, Cham. https://doi.org/10.1007/978-3-319-03002-9_176

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