Design of a Piezoresistive MEMS Resonator Operating Beyond 1 GHz

  • Vikrama Vamshi Pasula
  • Deleep R. Nair
  • Amitava DasGupta
Conference paper
Part of the Environmental Science and Engineering book series (ESE)


This paper focuses on design of Piezoresistive MEMS resonator for operation beyond 1 GHz, using FEM simulations. A method for simulation of transconductance of MEMS resonator is presented for first time. Lateral bulk acoustic mode of Twin beam resonator is simulated using the proposed method to get transconductance-frequency plot. Dimensions of the structure are optimized for best operation near 1.3 GHz. Design aspects of resonator including biasing effects, damping effects and anchoring variations are studied.


Piezoresistive MEMS resonator Simulation of transconductance 


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Authors acknowledge NPMASS (National program on micro and smart systems) of Govt. of India for providing necessary support and funds to purchase Coventorware software.


  1. 1.
    J. Wang, J. E. Butler, T. Feygelson, and C. T.-C. Nguyen,“1.51-GHz polydiamond micromechanical disk resonator with impedance-mismatched isolating support,” in Proc. IEEE Int.MEMS Conf., Maastricht, The Netherlands, Jan. 25–29,2004,pp. 641–644.Google Scholar
  2. 2.
    J.T.M. van Beek, G.J.A.M. Verheijden, G.E.J. Koops, K.L. Phan,C. van der Avoort, J. van Wingerden, D. Badaroglu Ernur, and J.J.M.Bontemps, “Scalable 1.1 GHz fundamental mode piezo-resistive silicon MEMS resonator”, IEEE International Electron DevicesMeeting, 2007, IEDM 2007., 10-12 Dec. 2007, pp. 411 - 414Google Scholar
  3. 3.
  4. 4.
    J. Kiihamaki, V. Kaajakari, H. Luoto, H.Kattelus, and M. Yli-Koski,“Fabrication of single crystal silicon resonators with narrow gaps”, proc. Transducers 2005, V.2, pp. 1354-1357Google Scholar
  5. 5.
    J.T.M. van Beek, P.G. Steeneken, and B. Giesbers, “A 10 MHz piezoresistive MEMS resonator with high Q”, proc. IEEE IFCS,1 3 2006, pp.475 – 480Google Scholar
  6. 6.
    Y.-H. Park and K. C. Park, “High-fidelity modeling of MEMS resonators– part I: anchor loss mechanisms through substrate,” J. Microelectromechanical Systems, vol. 13, no. 2, pp. 238–247, 2004.CrossRefGoogle Scholar

Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  • Vikrama Vamshi Pasula
    • 1
  • Deleep R. Nair
    • 1
  • Amitava DasGupta
    • 1
  1. 1.Microelectronics and MEMS Laboratory, Department of Electrical EngineeringIIT MadrasChennaiIndia

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