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Design and Development of MEMS Pressure Sensor Characterization Setup with Low Interfacing Noise by Using NI-PXI System

  • Kulwant Singh
  • Sualeh Akhtar
  • Soney Varghese
  • J. Akhtar
Conference paper
Part of the Environmental Science and Engineering book series (ESE)

Abstract

In this paper, we present a self-contained automated MEMS pressure sensor testing system. The system is controlled by LabVIEW software, with a custom-designed menu-driven user interface in the OPEN-WIN window environment. It is capable of performing multi-parameter measurements including linearity, hysteresis, sensitivity and operating temperature. The built-in software package allows the user to perform statistical analysis with image capability. This system is applicable for device research, where, the “statistical” testing data provides the reliable experimental information and device mass production, where the interfacing noise free testing data and the generated graph can help in product sorting, quality control, and further processing. Fabrication and packaging issues of MEMS pressure sensor are also discussed in terms of device performance.

Keywords

MEMS Pressure sensor Device packaging LabVIEW Interfacing noise 

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Notes

Acknowledgments

The Director, CSIR-CEERI, Pilani, Dr. Chandra Shekhar is thanked for his constant support and encouragement and first author (KS) would like to thank Head of SNST, NIT Calicut, Dr. C. B. Sobhan for his consent to work in CSIR-CEERI, Pilani.

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Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  • Kulwant Singh
    • 1
    • 2
  • Sualeh Akhtar
    • 3
  • Soney Varghese
    • 1
  • J. Akhtar
    • 2
  1. 1.Nanomaterials and Device Research Laboratory, School of Nano Science and TechnologyNIT-CalicutCalicutIndia
  2. 2.Sensors and Nanotechnology GroupCSIR-Central Electronics Engineering Research InstitutePilaniIndia
  3. 3.School of Information Technology and EngineeringVIT UniversityVelloreIndia

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