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Design Aspects of a MEMS Based Bi-axial Mirror

  • Aklesh Kumar Meena
  • Ranvir Singh
  • Yashoda Parmar
  • Vinita Gond
  • M. Islam
  • Amita Gupta
Conference paper
Part of the Environmental Science and Engineering book series (ESE)

Abstract

MEMS based bi-axial mirrors have become important because of their application in the field of projection display systems. Here, design aspects of a MEMS based bi-axial mirror are presented and discussed.

Keywords

MEMS Frequency Scanner DMD 

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Notes

Acknowledgments

Authors are thankful to Director, SSPL for support & permission to publish this paper.

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Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  • Aklesh Kumar Meena
    • 1
  • Ranvir Singh
    • 1
  • Yashoda Parmar
    • 1
  • Vinita Gond
    • 1
  • M. Islam
    • 1
  • Amita Gupta
    • 1
  1. 1.Solid State Physics LaboratoryDelhiIndia

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