Synchronization in Coupled MEMS Resonators
In this paper, the experimental results of a MEMS resonator with hard-spring response are shown. Under specific excitation conditions, the resonator shows an extension of the hysteresis during upsweep and downsweep of the excitation frequency. The extension of the hysteresis can be tuned by changing the excitation voltage. Sensitivity in regards to change in excitation conditions including ac voltage, dc bias, and pressure is demonstrated. Furthermore a unidirectionally coupled system consisting of the above nonlinear resonators is also characterized.
KeywordsCoupling Strength Excitation Signal Micro Electro Mechanical System Excitation Voltage Nonlinear Resonance
This work was supported in part by Global Center of Excellence (GCOE) program at Kyoto University, Kyoto Environmental Nanotechnology Cluster, Regional Innovation Cluster Program 2010, and Ministry of Education, Culture, Sports, Science and Technology (MEXT). The authors would like to acknowledge valuable help and advice from Dr. Patrick Longhini (SSC-Pacific), Dr. Huy Vu (San Diego State University), Dr. Antonio Palacios (San Diego State University), and Dr. Visarath In (SSC-Pacific).
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