Shape from SEM Image Using Fast Marching Method and Intensity Modification by Neural Network

  • Yuji Iwahori
  • Kazuhiro Shibata
  • Haruki Kawanaka
  • Kenji Funahashi
  • Robert J. Woodham
  • Yoshinori Adachi
Chapter

Abstract

This chapter proposes a new approach to recover 3-D shape from a Scanning Electron Microscope (SEM) image. When an SEM image is used to recover 3-D shape, one can apply the algorithm based on the solving the Eikonal equation with Fast Marching Method (FMM). However, when the oblique light source image is observed, the correct shape cannot be obtained by the usual one-pass FMM. The approach proposes a method to modify the original SEM image with intensity modification by introducing a Neural Network (NN). Correct 3-D shape could be obtained using FMM and NN learning without iterations. The proposed approach is demonstrated through computer simulation and validate through experiment.

Keywords

Scanning Electron Microscope Intensity Modification RBF Neural Network Fast Marching Method 

References

  1. 1.
    Pentland, A.: Linear shape from shading. Int. J. Comput. Vision 4, 153–162 (1990)CrossRefGoogle Scholar
  2. 2.
    Ikeuchi, K., Horn, B.K.P.: Numerical shape from shading and occluding boundaries. Artif. Intell. 17, 141–184 (1981)CrossRefGoogle Scholar
  3. 3.
    Laurentini, A.: How far 3D shapes can be understood from 2D silhouettes. IEEE Trans. Pattern Anal. Mach. Intell. 17(2), 188–195 (Feb 1995)CrossRefGoogle Scholar
  4. 4.
    Lu, J., Little, J.: Surface reflectance and shape from images using a collinear light source. Int. J. Comput. Vision 32(3), 213–240 (Aug 1999)CrossRefGoogle Scholar
  5. 5.
    Iwahori, Y., Woodham, R.J., Ozaki, M., Tanaka, H., Ishii, N.: Neural network based photometric stereo with a nearby rotational moving light source. IEICE Trans. Info. Syst. E80-D(9), 948–957 (1997)Google Scholar
  6. 6.
    Iwahori, Y., Kawanaka, H., Fukui, S., Funahashi, K.: Obtaining shape from scanning electron microscope using hopfield neural network. J. Intell. Manuf. 16(6), 715–725 (2005)CrossRefGoogle Scholar
  7. 7.
    Hopfield, J.J., Tank, D.W.: “Neural” computation of decisions in optimization problems. Biol. Cybern. 52, 141–152 (1985)Google Scholar
  8. 8.
    Iwahori, Y., Nakagawa, T., Woodham, R.J., Kawanaka, H., Fukui, S.: Shape from self-calibration and fast marching method. In: 19th International Conference on Pattern Recognition (ICPR 2008), pp. 1–4 (2008)Google Scholar
  9. 9.
    Ojima, H., Murakami, Y., Otsuka, H., Sasamoto, Y., Zhou, L., Shimizu, J., Eda, H.: 3D data acquisition and reconstruction from SEM stereo pairs (in Japanese), J. Jpn. Soc. Precis Eng. 75(6), 773–777 (2009)Google Scholar
  10. 10.
    Jiang, J., Sakai, S.: 3-Dimensional measurement of fracture surface using SEM via the combination of stereo matching and integrating secondary electron intensity (in Japanese). J. Jpn. Soc. Mech. Eng. 68(666), 300–306 (2002)Google Scholar
  11. 11.
    Kamata, K.: 3D Shape Recovery From SEM Image Using Shading Information (in Japanese), 21st Sens. Forum. C, pp. 279–284 (2004)Google Scholar
  12. 12.
    Ding, Y., Iwahori, Y., Nakamura, T., Lifeng He, Woodham, R.J., Itoh, H.: Neural network implementation of image rendering via self-calibration. J. Adv. Comput. Intell. Intell. Inform. 14(4) 344–352 (2010)Google Scholar
  13. 13.
    Tankus, A., Sochen. N., Yeshurun. Y.: Shape-from-Shading By Iterative Fast Marching For Vertical and Oblique Light Sources. Geom. Prop. Incomplete Data, pp. 237–258 (2005)Google Scholar
  14. 14.
    Sethian, J.A.: A fast marching level set method for monotonically advancing fronts. Proc. Nat. Acad. Sci. 93(1), 5–28 (1998)Google Scholar
  15. 15.
    Kimmel, R., Sethian, J.A.: Optimal algorithm for shape from shading and path planning. JMIV 14, 237–244 (2001)MathSciNetCrossRefMATHGoogle Scholar
  16. 16.
    Chen, S., Cowan, C.F.N., Grant, P.M.: Orthogonal least squares learning algorithm for radial basis function networks. IEEE Trans. on Neural Networks 2(2), 302–309 (1991)CrossRefGoogle Scholar

Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  • Yuji Iwahori
    • 1
  • Kazuhiro Shibata
    • 1
  • Haruki Kawanaka
    • 2
  • Kenji Funahashi
    • 3
  • Robert J. Woodham
    • 4
  • Yoshinori Adachi
    • 5
  1. 1.Departement of Computer ScienceChubu University KasugaiJapan
  2. 2.School of Information Science and TechnologyAichi Prefectural UniversityNagakute-shiJapan
  3. 3.Department of Computer ScienceNagoya Institute of TechnologyShowa-kuJapan
  4. 4.Department of Computer ScienceUniversity of British ColumbiaVancouverCanada
  5. 5.College of Business Administration and Information ScienceChubu UniversityKasugaiJapan

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