Abstract
The performance of the burs and tools coated with diamond depend on the properties of the films deposited including the structure, morphology and adhesion onto the substrate material. These film characteristics are in turn controlled by a number of factors including the VFCVD reactor parameters such as substrate temperature, substrate bias, pressure, methane concentration, plasma characteristics and affinity of the substrate for diamond nucleation. In this chapter the effects of process parameters on the structure and morphology of the films deposited and therefore control of the film properties.
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Ahmed, W. et al. (2014). Controlling Structure and Morphology. In: Chemical Vapour Deposition of Diamond for Dental Tools and Burs. SpringerBriefs in Materials. Springer, Cham. https://doi.org/10.1007/978-3-319-00648-2_7
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DOI: https://doi.org/10.1007/978-3-319-00648-2_7
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