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Ferroelectric Ceramics pp 213–239Cite as

Ferroelectric Thin Film Processing

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Part of the book series: Monte Verità ((MV))

Abstract

Technological and scientific activities in the synthesis of ferroelectric thin films have been in progress for approximately 35 years with some very notable achievements taking place along the way. The work started with the simple evaporation of BaTiO3 by Feldman (1955), and accelerated during the 1970’s with the advent of sputtering technologies. Since that time some totally new techniques and innovative processes have been introduced. The ability to routinely fabricate films having good ferroelectric properties in sub- micron thicknesses, and to demonstrate marketable products such as non-volatile memories and electro-optic switches has generated an immense interest in integrated ferroelectrics. Progress has been made in three areas: (1) theresearch and development of new processing technologies, (2) methods for accelerated testing and property measurement, and (3) the development of novel thin film devices utilizing the functional properties of ferroelectrics. Further advances in these areas are linked to an improved understanding of (1) the theory of nucleation and film growth related to composition, (2) the dependence of film properties on thickness, (3) concerns related to the compatibility of ferroelectrics with electrode materials, and (4) reliability issues.

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References

  • Adachi, H., T. Mitsuyu,, O. Omazaki, and K. Wasa, 1985: in Proceedings of the 9th Symposium on Ion sources and Ion assisted technology, Japan, Edited by T. Takagi, p.373.

    Google Scholar 

  • Adachi, H., T. Mitsuyu, O. Omazaki, and K. Wasa, 1985: Jpn. J. Appl. Phys., 24, 287.

    Google Scholar 

  • Adachi, H., T. Mitsuyu, O. Yamazaki, and K. Wasa, 1986: J. Appl. Phys., 60, 736.

    Article  Google Scholar 

  • Atkin, R. B., 1972: Ferroelectrics, 3, 213.

    Article  Google Scholar 

  • Bondurant, D. W., and F. P. Graninger, 1989: IEEE Spectrum, 26, 30.

    Article  Google Scholar 

  • Brierley, C. J., C. Trundle, L. Considine, R. W. Whatmore, and F. W. Ainger, 1989: Ferroelectrics, 91, 181.

    Article  Google Scholar 

  • Brucchaus, R., H. Huber, D. Pitzer, and W. Wersing, 1992: Ferroelectrics, 127, 1473.

    Google Scholar 

  • Burfoot, J. C., and J. R. Slack, 1970: J. Phys. Soc. Japan, 28, 417.

    Google Scholar 

  • Carim, A. H., B. A. Tuttle, D. H. Doughty, and S. Martinez, 1991: J. Am. Ceram. Soc., 74, 1455.

    Article  Google Scholar 

  • Castellano, R. N., 1977: Thin Solid Films, 46, 213.

    Article  Google Scholar 

  • Castellano R. N., and L. G. Feinstein, 1979: J. Appl. Phys., 50, 4406.

    Article  Google Scholar 

  • Chapman, D. W., 1969: J. Appl. Phys., 40, 2381.

    Article  Google Scholar 

  • Chapman, B., 1980: in “Glow Discharge Processes,” John Wiley and Sons, New York.

    Google Scholar 

  • Coburn, J. W., E. Tagluer, and E. Kay, 1974: Jpn. J. Appl. Phys., Suppl. 2, 501.

    Google Scholar 

  • Croteau, A., and M. Sayer, 1986: in Proceedings of 6th IEEE International Symposium on Applications of Ferroelectrics (ISAF), Bethlehem, Edited by V. E. Wood, IEEE — New York.

    Google Scholar 

  • Feldman, C., 1955: The Rev. of Sci. Instrum, 26, 463.

    Article  Google Scholar 

  • Francombe, M. H., 1972: Thin Solid Films, 13, 413.

    Article  Google Scholar 

  • Francombe, M.H., S. V. Krishnaswamy, 1990: J.Vac. Sci. Technol. A, 8, 1382.

    Article  Google Scholar 

  • Fukami, T., O. Teshima, 1986: in Proceedings of the 10th Symp. on Ion sources and Ion assisted Technology, Japan, p.413.

    Google Scholar 

  • Hadni, A., 1974: IEEE Trans. Microwave Theory and Techniques, MIT-22, 12, 287.

    Google Scholar 

  • Haertling, G. H., 1986: in Ceramics Materials for Electronics-Processing Properties and Applications, Edited by R. C. Buchanan, Marcel and Dekker, New York, p. 139.

    Google Scholar 

  • Haertling, G. H., 1991: J. Vac. Sci. Technol.: A, 9, 413.

    Article  Google Scholar 

  • Hirano, S., K. Kikuta, and K. Kato, 1990: in Proceedings of the Materials Research Society Symposium, San Francisco, Edited by E. R. Myers and A. I. Kingon, 200, 3.

    Google Scholar 

  • Hren, P. D., S. H. Rou, H. A. Al-Shareef, S. Ameen, O. Auciello, A. I. Kingon, 1991: in Proceedings of the 3rd International Symposium on Integrated Ferroelectrics, Colorado, Edited by J. F. Scott and L. A. Paz de Araujo.

    Google Scholar 

  • Hulliger, J., and R. Gutmann, 1989: Thin Solid Films, 175, 201.

    Article  Google Scholar 

  • Iijima, K., Y. Tomita, R. Takayama, and I. Ueda, 1986: J. Appl. Phys., 60, 361.

    Article  Google Scholar 

  • Johnson, D. J., D. T. Amm, E. Griswold, K. Sreenivas, G. Yi, and M. Sayer, 1990: in Proceedings of the Materials Research Society Symposium, San Francisco, Edited by E. R. Myers, and A. I. Kingon, 200, 289

    Article  Google Scholar 

  • Kaufmann, H. R., 1974: Adv. Electr. Elec. Phys., 36, 265.

    Article  Google Scholar 

  • Kingon, A. I., O. Auciello, M. S. Ameen, S. H. Rou, and A. R. Krauss, 1989: Appl. Phys. Lett., 55, 301.

    Article  Google Scholar 

  • Krupanidhi, S. B., N. Maffei, M. Sayer, and K. El-Assal, 1983: J. Appl. Phys., 54, 6601.

    Article  Google Scholar 

  • Krupanidhi, S. B., H. Hu, and V. Kumar, 1992: J. Appl. Phys., 71, 4557.

    Article  Google Scholar 

  • Lure, M. S., E. I. Vasil’eva, and I. V. Ignat’eva I. V., 1960: Bull. Acad. Sci., U. S. S. R., 24, 1372.

    Google Scholar 

  • Malrick, B., S. Dallaire, K. El-Assal, 1987: Materials Letters, 5, 246.

    Article  Google Scholar 

  • Mansingh, A., and C. V. R. Vasant Kumar, 1988: J. Mat. Sci. Lett., 7, 1104.

    Article  Google Scholar 

  • Mansingh, A., 1990: Ferroelectrics, 102, 69.

    Article  Google Scholar 

  • Matsui, Y., M. Okuyama, N. Fujita, and Y. Hamakawa, 1981: J. Appl. Phys., 52, 5107.

    Article  Google Scholar 

  • Milne, S. J., and S. H. Pyke, 1991: J. Am. Ceram. Soc., 74, 1407.

    Article  Google Scholar 

  • Oikawa, M., and K. Toda, 1976: Appl. Phys. Lett., 29, 3343.

    Article  Google Scholar 

  • Okada, A., 1977: J. Appl. Phys., 48, 2905.

    Article  Google Scholar 

  • Parikh, R., J. Todd Stephen, M. L. Swanson, and E. R. Myers, 1990: in Proceedings of the Materials. Research Society Symposium, San Francisco, edited by E. R. Myers and A. I. KIngon, 200, 193.

    Article  Google Scholar 

  • Ramesh, R., A. Inam, W. K. Chan, K. Myers, K. Remshing, D. L. Hart, and J. M. Taracson, 1991: Science, 252, 944.

    Article  Google Scholar 

  • Roy, D., S. B. Krupanidhi, and J. P. Dougherty, 1991: J. Appl. Phys., 69, 7930.

    Article  Google Scholar 

  • Sankur, H., and R. Hall, 1985: Appl. Opt., 24, 3343.

    Article  Google Scholar 

  • Sayer, M., and K. Sreenivas, 1990: Science, 247, 1056.

    Article  Google Scholar 

  • Scott, J. F., H. M. Duiker, P. D. Beale, B. Pouligny, K. Dimmler, M. Partis, D. Butler, and S. Eaton, 1988: Physica B, 150, 160.

    Article  Google Scholar 

  • Scott, J. F., and L. A. Paz de Araujo, 1989: Science, 246, 1400.

    Article  Google Scholar 

  • Shintani, Y., K. Sato, M. Sakamoto, H. Fukuda, and O. Tada, 1978: Jpn. J. Appl. Phys., 17, 573.

    Article  Google Scholar 

  • Sinharoy, S., H. Buhay, M. H. Francombe, W. J. Takei, N. J. Doyle, and J. H. Reiger, 1991: J. Vac. Sci. Technol. A, 9, 409.

    Article  Google Scholar 

  • Smidt, F. A., 1990: Intl. Mat. Rev., 35, 61.

    Article  Google Scholar 

  • Spence, W., P. M. Miller, and N. Wu, 1973: Ferroelectrics, 5, 201.

    Article  Google Scholar 

  • Sreenivas, K., and M. Sayer, 1988: J. Appl. Phys., 64, 1484.

    Article  Google Scholar 

  • Sreenivas, K., M. Sayer, T. Laursen, J. L. Whitton, R. Pascual, D. J. Johnson, D. T. Amm, G. I. Sproule, D. F. Mitchell, M. J. Graham, S. C. Gujrathi, and K. Oxorn, 1990: in Proceedings of the Materials Research Society Symposium, San Francisco, Edited by E. R. Myers and A. I. Kingon, 200, 255.

    Google Scholar 

  • Takayama, R., Y. Tomita, K. Iijima, I. Ueda, 1987: J. Appl. Phys., 61, 411.

    Article  Google Scholar 

  • Takei, W. H., S. Y. Wu, and M. H. Francombe, 1975: J. Crystal Growth, 28, 188.

    Article  Google Scholar 

  • Thornton, J. A., 1981: Thin Solid Films, 80, 1.

    Article  Google Scholar 

  • Tuttle, B. A., 1987: Mater. Res. Bull. 40.

    Google Scholar 

  • Vasant Kumar, C. V. R., M. Sayer, R. Pascual, D. T. Amm, Z. Wu, D. M. Swanston, 1991: Appl. Phys. Lett., 58, 1162.

    Google Scholar 

  • Vasant Kumar, C. V. R., R. Pascual, and M. Sayer, 1992: J. Appl. Phys., 71, 864.

    Article  Google Scholar 

  • Vossen, J. L., 1971: J. Vac. Sci., Technol., 8, 512.

    Article  Google Scholar 

  • Wood, V. E., R. Busch, S. D. Ramamurthi, and S. L. Swartz, 1992: J. Appl. Phys., 71, 4557.

    Article  Google Scholar 

  • Yamaka, E., H. Watanabe, H. Kimura, H. Kanaya, and H. Okhuma, 1988: J. Vac. Sci. Technol: A., 6, 2921.

    Article  Google Scholar 

  • Yi, G., and M. Sayer, 1991: Ceramic Bulletin, 70, 1173.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Département des Matériaux, École Polytechnique Fédérale de Lausanne, CH-1015, Lausanne, Switzerland

    K. Sreenivas (Laboratoire de Céramique)

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  1. K. Sreenivas
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Editors and Affiliations

  1. Ecole Polytechnique Fédérale de Lausanne Lab. de Céramique, MX-D Ecublens, CH-1015, Lausanne, Switzerland

    N. Setter  & E. L. Colla  & 

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© 1993 Birkhäuser Verlag Basel

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Sreenivas, K. (1993). Ferroelectric Thin Film Processing. In: Setter, N., Colla, E.L. (eds) Ferroelectric Ceramics. Monte Verità. Birkhäuser Basel. https://doi.org/10.1007/978-3-0348-7551-6_8

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  • DOI: https://doi.org/10.1007/978-3-0348-7551-6_8

  • Publisher Name: Birkhäuser Basel

  • Print ISBN: 978-3-0348-7553-0

  • Online ISBN: 978-3-0348-7551-6

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