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Responsivity and Sensitivity

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Fundamentals of Nanomechanical Resonators

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Abstract

A change of mass or temperature, or an applied force, causes a response of a mechanical resonator. The response can, e.g., be a change in frequency or vibrational amplitude. The responsivity of a mechanical resonator is the linear slope of the response to a particular stimulant. In case of a sensor application, the responsivity to the input parameter to be measured should be maximal. However, the responsivity to other inputs, such as a change in ambient temperature, should be minimal in order not to cause an unwanted cross response. In this chapter, the responsivities of micro- and nanomechanical resonators to mass (distributed and point masses), force gradients, temperature, and heating are discussed.

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Author information

Authors and Affiliations

  1. TU Wien, Vienna, Austria

    Silvan Schmid

  2. École Polytechnique Fédérale de, Lausanne, Switzerland

    Luis Guillermo Villanueva

  3. California Institute of Technology, Pasadena, CA, USA

    Michael Lee Roukes

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  1. Silvan Schmid
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  2. Luis Guillermo Villanueva
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  3. Michael Lee Roukes
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Schmid, S., Villanueva, L.G., Roukes, M.L. (2023). Responsivity and Sensitivity. In: Fundamentals of Nanomechanical Resonators. Springer, Cham. https://doi.org/10.1007/978-3-031-29628-4_6

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  • DOI: https://doi.org/10.1007/978-3-031-29628-4_6

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-031-29627-7

  • Online ISBN: 978-3-031-29628-4

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