Abstract
While electromagnetic levitation systems are already available for ultra-precision applications, they are limited to inspection or measurement tasks and non-mechanical processing due to their severely limited stiffness. This contribution introduces a novel electromagnetic linear guide, which was specifically developed for use in ultra-precision high performance machining. The active guide system features a position noise and a mean positioning error in the low nanometer range. At the same time, it provides sufficient dynamic stiffness for diamond machining. Furthermore, the actuator and sensor capabilities of the electromagnetic linear guide are applied to increase motion dynamics while reducing dynamic disturbances in motion phases by up to \({75}{\%}\). The capability of the new electromagnetic linear guide is finally shown for a reference diamond machining process.
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References
Denkena, B., Kallage, F., Ruskowski, M., Popp, K., Tönshoff, H.K.: Machine tool with active magnetic guides. CIRP Ann. 53(1), 333–336 (2004). https://doi.org/10.1016/s0007-8506(07)60710-0
Denkena, B., Hackeloeer, F., Neuber, C.-C.: 5-DOF harmonic frequency control using contactless magnetic guides. CIRP J. Manuf. Sci. Technol. 2(1), 21–28 (2009). https://doi.org/10.1016/j.cirpj.2009.07.002
Denkena, B., Hackelo, F.L.: Multi-sensor disturbance force measurement for compliant mechanical structures. In:IEEE SENSORS. IEEE (2010). https://doi.org/10.1109/icsens.2010.5690446
Denkena, B., Guemmer, O., Floeter, F.: Evaluation of electromagnetic guides in machine tools. CIRP Ann. 63(1), 357–360 (2014). https://doi.org/10.1016/j.cirp.2014.03.130
Denkena, B., Dahlmann, D., Krueger, R.: Electromagnetic levitation guide for use in ultra-precision milling centres. Procedia CIRP 37, 199–204 (2015). https://doi.org/10.1016/j.procir.2015.08.008
Denkena, B., Dahlmann, D., and Krüger, R.: Control system for an ultraprecision electromagnetic linear guide. In: 16th Euspen International Conference & Exhibition. P. 2.16. May 30-June 3, Nottingham (2016)
Denkena, B., Dahlmann, D., Krüger, R. : Design and optimisation of an electromagnetic linear guide for ultra-precision high performance cutting. In: byWertheim, R., Ihlefeldt, S., Hochmuth, C., Putz, M. (eds.) Procedia CIRP, vol. 46. pp. 147–150 (2016). https://doi.org/10.1016/j.procir.2016.02.056
Denkena, B., Dahlmann, D., Krüger, R. : Experimental investigation of an electromagnetic linear guide for ultra-precision high performance machining. In: 17th Euspen International Conference & Exhibition. Hannover, GER, May 30–June 2, pp. 447–448 (2017)
Denkena, B., Bergmann, B., and Krüger, R.: LevitationHigh-performance machining. design & realisation – electromagnetic ultra–precision linear guide. In: Mikroniek, vol. 1, pp. 29–33 (2018)
Denkena, B., Bergmann, B., Krüger, R.: Enabling electromagnetic levitation technology for ultra-precision high performance machining’. In: 18th Euspen International Conference & Exhibition. P.2.15. Venice, IT, June 4-8, pp. 161–162 (2018)
Denkena, B., Bergmann, B., Krüger, R.: Elektromagnetische Linearführung für die hochpräzise Zerspanung. ZWF Zeitschrift für wirtschaftlichen Fabrikbetrieb 113(7–8), 443–447 (2018). https://doi.org/10.3139/104.111938
Kim, W.-J., Trumper, D.L.: High-precision magnetic levitation stage for photolithography. Precis. Eng. 22(2), 66–77 (1998). https://doi.org/10.1016/s0141-6359(98)00009-9
Lu, X., Dyck, M., Altintas, Y.: Magnetically levitated six degree of freedom rotary table. CIRP Ann. 64(1), 353–356 (2015). https://doi.org/10.1016/j.cirp.2015.04.107
Schönemann, L., et al..: Synergistic approaches to ultra-precision high performance cutting. CIRP J. Manuf. Sci. Technol. 28, 38–51 (2020). https://doi.org/10.1016/j.cirpj.2019.12.001
Stamann, M., Schallschmidt, T., Leidhold, R.: Electromagnetic rotary tables for mill and drill machining. WSEAS Trans. Syst. Control 9, 199–207 (2014)
Weck, M., Wahner, U.: Linear magnetic bearing and levitation system for machine tools. CIRP Ann. 47(1), 311–314 (1998). https://doi.org/10.1016/s0007-8506(07)62840-6
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Krüger, R., Bergmann, B., Denkena, B. (2022). Electromagnetic Ultra-Precision Linear Guide. In: Brinksmeier, E., Schönemann, L. (eds) Ultra-precision High Performance Cutting. Lecture Notes in Production Engineering. Springer, Cham. https://doi.org/10.1007/978-3-030-83765-5_4
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DOI: https://doi.org/10.1007/978-3-030-83765-5_4
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