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Nonparametric Identification of a Nonlinear MEMS Resonator

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Advances in Nonlinear Dynamics


This work presents a nonparametric identification method applied to study the nonlinear response of an MEMS resonator. The MEMS resonator is a clamped-clamped microbeam fabricated for out-of-plane motion accounting for geometric nonlinearities due to midplane stretching while actuated by electrostatic forces. Experimental measurements show hardening behavior in the frequency-response of the first symmetric mode of the resonator due to the dominant cubic nonlinearity. Modeling the dynamics of the microbeam using a nonparametric identification method is shown to be very effective in capturing the characteristics of the complex nonlinear system at electrostatic AC and DC voltages.

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  1. J. He, B. Xu, S.F. Masri, Restoring force and dynamic loadings identification for a nonlinear chain-like structure with partially unknown excitations. Nonlinear Dyn. 69(1–2), 231–245 (2012)

    Article  Google Scholar 

  2. S.F. Masri, T. Caughey, A nonparametric identification technique for nonlinear dynamic problems. J. Appl. Mech. 46(2), 433–447 (1979)

    Article  Google Scholar 

  3. G. Birpoutsoukis, A. Marconato, J. Lataire, J. Schoukens, Regularized nonparametric Volterra kernel estimation. Automatica 82, 324–327 (2017)

    Article  MathSciNet  Google Scholar 

  4. R.A. Sandler, S.A. Deadwyler, R.E. Hampson, D. Song, T.W. Berger, V.Z. Marmarelis, System identification of point-process neural systems using probability based Volterra kernels. J. Neurosci. Methods 240, 179–192 (2015)

    Article  Google Scholar 

  5. G. Song, V. Chaudhry, C. Batur, A neural network inverse model for a shape memory alloy wire actuator. J. Intell. Mater. Syst. Struct. 14(6), 371–377 (2003)

    Article  Google Scholar 

  6. M.I. Younis, A.H. Nayfeh, A study of the nonlinear response of a resonant microbeam to an electric actuation. Nonlinear Dyn. 31(1), 91–117 (2003)

    Article  Google Scholar 

  7. A.M. Tusset, J.M. Balthazar, D.G. Bassinello, B.R. Pontes, J.L.P. Felix, Statements on chaos control designs, including a fractional order dynamical system, applied to a “MEMS” comb-drive actuator. Nonlinear Dyn. 69(4), 1837–1857 (2012)

    Article  MathSciNet  Google Scholar 

  8. A.Z. Hajjaj, N. Jaber, S. Ilyas, F.K. Alfosail, M.I. Younis, Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances. Inter J Non-Linear Mech 119, 103328 (2020)

    Article  Google Scholar 

  9. M.I. Younis, MEMS Linear and Nonlinear Statics and Dynamics (Springer Science and Business Media, New York, 2011)

    Book  Google Scholar 

  10. S. Saghir, M.L. Bellaredj, A. Ramini, M.I. Younis, Initially curved microplates under electrostatic actuation: Theory and experiment. J. Micromech. Microeng. 26(9), 095004 (2016)

    Article  Google Scholar 

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Correspondence to Mohammad I. Younis .

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Rocha, R.T., Alfosail, F., Zhao, W., Younis, M.I., Masri, S.F. (2022). Nonparametric Identification of a Nonlinear MEMS Resonator. In: Lacarbonara, W., Balachandran, B., Leamy, M.J., Ma, J., Tenreiro Machado, J.A., Stepan, G. (eds) Advances in Nonlinear Dynamics. NODYCON Conference Proceedings Series. Springer, Cham.

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  • Print ISBN: 978-3-030-81165-5

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