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Nonparametric Identification of a Nonlinear MEMS Resonator

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Advances in Nonlinear Dynamics

Abstract

This work presents a nonparametric identification method applied to study the nonlinear response of an MEMS resonator. The MEMS resonator is a clamped-clamped microbeam fabricated for out-of-plane motion accounting for geometric nonlinearities due to midplane stretching while actuated by electrostatic forces. Experimental measurements show hardening behavior in the frequency-response of the first symmetric mode of the resonator due to the dominant cubic nonlinearity. Modeling the dynamics of the microbeam using a nonparametric identification method is shown to be very effective in capturing the characteristics of the complex nonlinear system at electrostatic AC and DC voltages.

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Correspondence to Mohammad I. Younis .

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Rocha, R.T., Alfosail, F., Zhao, W., Younis, M.I., Masri, S.F. (2022). Nonparametric Identification of a Nonlinear MEMS Resonator. In: Lacarbonara, W., Balachandran, B., Leamy, M.J., Ma, J., Tenreiro Machado, J.A., Stepan, G. (eds) Advances in Nonlinear Dynamics. NODYCON Conference Proceedings Series. Springer, Cham. https://doi.org/10.1007/978-3-030-81166-2_36

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  • DOI: https://doi.org/10.1007/978-3-030-81166-2_36

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-030-81165-5

  • Online ISBN: 978-3-030-81166-2

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