Abstract
Pressure sensors are present since the very beginning of the MEMS history, and they have featured an important technological development. In this chapter, an overview of the evolution of the technology will be presented, with a primary focus on piezoresistive and capacitive technologies. Key figures of both technologies will be introduced, with a comparison of the advantages and disadvantages between them. Moreover, the key technological modules of ST pressure sensors will be introduced: The VENSEN technology, which enables the large-scale fabrication of monocrystalline silicon membranes above an air cavity; or the BASTILLE technology, which suspends the pressure sensing element with an architecture based on springs to decouple it mechanically from package-related stress.
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Duqi, E., Allegato, G., Azpeitia, M. (2022). Pressure Sensors. In: Vigna, B., Ferrari, P., Villa, F.F., Lasalandra, E., Zerbini, S. (eds) Silicon Sensors and Actuators. Springer, Cham. https://doi.org/10.1007/978-3-030-80135-9_16
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DOI: https://doi.org/10.1007/978-3-030-80135-9_16
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