Abstract
Magnetometers are nowadays largely used for consumer, industrial, and automotive applications. Among consumer applications, the main use is for compass, which is fundamental for navigation and map heading. On the other hand, magnetometers are often included together with magnets in systems monitoring a position or an angle in industrial and automotive applications, such as ABS wheel speed monitoring, steering angle measurement, or electrical motor control. Finally, magnetometers can be used as current sensors, granting no insertion losses and electrical insulation between current line and sensing circuitry. Magnetometers can be based on different kinds of transduction mechanisms. In this chapter, the focus will be on sensors which can be integrated in silicon-based technology platforms, typically developed for semiconductor industry. Among this kind of transducers, it is possible to include devices based on Hall effect, magnetoresistance (AMR, TMR, and GMR), magnetoinductance, Lorentz force, and fluxgates. In the following paragraphs, different structures for magnetic sensing will be described, in particular, Anisotropic Magnetoresistance (AMR), as well as the key parameters in AMR sensors design.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Similar content being viewed by others
References
Popovic, R. S. (2003). Hall effect devices (IoP). CRC Press.
Osamu, O. (2007). Compound semiconductor bulk materials and characterizations. World Scientific Publishing.
Ausserlechner, U., Motz, M., & Holliber, M. (November 2007). Compensation of the piezo-hall effect in integrated hall sensors on (100)-Si. IEEE Sensors Journal, 7(11).
Huber, S., Schott, C., & Paul, O. (2013, August). Package stress monitor to compensate for the piezo-hall effect in CMOS hall sensors. IEEE Sensors Journal, 13(8).
Ausserlechner, U. (2004, October). The piezo-Hall effect in n-silicon for arbitrary crystal orientation. In Proceedings of the IEEE sensors, Vienna, Austria, vol. 3, pp. 1149–1152.
Schurig, E., Demierre, M., Schott, C., & Popovic, R. S. (2002). A vertical hall device in CMOS high-voltage technology. Sensors and Actuators A, 97–98, 47–53.
Bilotti, A., Monreal, G., & Vig, R. (June 1997). Monolithic magnetic hall sensor using dynamic quadrature offset cancellation. IEEE Journal of Solid-State Circuits, 32(6), 829–836.
Schott, C., Racz, R., & Huber, S. (2005). Smart CMOS sensors with integrated magnetic concentrators, IEEE Sensors, Irvine, CA.
Popovic, R. S., Randjelovic, Z., & Manic, D. (2001). Integrated hall-effect magnetic sensors. Sensors and Actuators A, 91, 46–50.
Langfelder, G., Buffa, C., Frangi, A., Tocchio, A., Lasalandra, E., & Longoni, A. (Sept. 2013). Z-Axis magnetometers for MEMS inertial measurement units using an industrial process. IEEE Transactions on Industrial Electronics, 60(9), 3983–3990.
Marra, C. R., Laghi, G., Gadola, M., Gattere, G., Paci, D., Tocchio, A., & Langfelder, G. 100 nT/√Hz, 0.5 mm2 monolithic, multi-loop low-power 3-axis MEMS magnetometer. In Proceedings of the 2018 IEEE Micro Electro Mechanical Systems (MEMS), 2018 (IEEE Journals & Magazines), pp. 748–758.
Tumanski, S. (2007). Induction coil sensors – A review. Measurement Science and Technology, 18, R31–R46.
Drljaca, P. M., Kejik, P., Vincent, F., Piguet, D., & Popovic, R. S. (October 2005). Low-power 2-D fully integrated CMOS fluxgate magnetometer. IEEE Sensors Journal, 5(5).
Osborn, J. A. (June 1945). Demagnetizing factors of the general ellipsoid. Physical Review, 67(11–12).
Tumanski, S. (2001). Thin film magnetoresistive sensors (IoP). CRC Press.
Tumanski, S. (2011). Handbook of magnetic measurements (IoP). CRC Press.
Stutzke, N. A., Russek, S. E., & David, P. (2005). Pappas: Low-frequency noise measurements on commercial magnetoresistive magnetic field sensors. Journal of Applied Physics, 97.
Bonin, R., Schneidera, M. L., Silva, T. J., & Nibarger, J. P. (2005). Dependence of magnetization dynamics on magnetostriction in NiFe alloys. Journal of Applied Physics, 98.
Jury, J. C., Klaassen, K. B., van Peppen, J. C. L., & Wang, S. X. (Sept. 2002). Measurement and analysis of noise sources in giant magnetoresistive sensors up to 6 GHz. IEEE Transactions on Magnetics, 38(5), 3545–3555.
Klaassen, K. B. (2007, February). Electrical low-frequency noise in tunneling Magnetoresistive heads: Phenomena and origins. IEEE Transactions on Magnetics, 43(2).
Spinelli, A. S., Minotti, P., Laghi, G., Langfelder, G., Lacaita, A. L., Paci, D. Simple model for the performance of realistic AMR magnetic field sensors. In Proceedings of the 2015 transducers – 2015 18th international conference on solid-state sensors, actuators and microsystems (TRANSDUCERS), 2015 (IEEE Journals & Magazines), pp. 2204–2207.
Kuijk, K., van Gestel, W., & Gorter, F. (September 1975). The barber pole, a linear magnetoresistive head. IEEE Transactions on Magnetics, 11(5), 1215–1217.
Hauser, H., Fulmek, P. L., Haumer, P., Vopalensky, M., & Ripka, P. (2003). Flipping field and stability in anisotropic magnetoresistive sensors. Sensors and Actuators A, 106, 121–125.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2022 Springer Nature Switzerland AG
About this chapter
Cite this chapter
Paci, D., Cantoni, A., Allegato, G. (2022). Magnetometers. In: Vigna, B., Ferrari, P., Villa, F.F., Lasalandra, E., Zerbini, S. (eds) Silicon Sensors and Actuators. Springer, Cham. https://doi.org/10.1007/978-3-030-80135-9_14
Download citation
DOI: https://doi.org/10.1007/978-3-030-80135-9_14
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-030-80134-2
Online ISBN: 978-3-030-80135-9
eBook Packages: EngineeringEngineering (R0)