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Concept of MEMS Vibrating Membrane as Particulate Matter (PM) Sensor

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Sensors and Microsystems (AISEM 2020)

Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 753))

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Abstract

This work shows experimental results obtained in testing a thin film piezo actuated silicon membrane in a controlled environment. The main aim of this work was to select humidity concentration as one of the most influencing factors on vibrating characteristic of the circular clamped membrane. Thanks to fine control of humidity and the parallel feedback due to calibrated sensors we established a precise correlation between humidity and resonant shift.

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References

  1. Zampetti E et al (2017) Exploitation of an integrated microheater on QCM sensor in particulate matter measurements. Sens Actuators A 264:205–211

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  2. Ismail AK (2006) The principle of a MEMS circular diaphragm mass sensor. J Micromech Microeng 16:1487–1493

    Article  MathSciNet  Google Scholar 

  3. Sun et al (2019) Self-powered multifunctional monitoring system using hybrid integrated triboelectric nanogenerators and piezoelectric microsensors. Nano Energy 58:612–623

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Author information

Authors and Affiliations

  1. STMicroelectronics, via Remo de Feo, 80022, Arzano (NA), Italy

    Francesco Foncellino

  2. Dipartimento di Fisica, Università degli Studi Napoli “Federico II, Naples, Italy

    Luigi Barretta

  3. ENEA, CR-Portici, P.le E. Fermi 1, 80055, Naples, Italy

    Ettore Massera

Authors
  1. Francesco Foncellino
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  2. Luigi Barretta
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  3. Ettore Massera
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Corresponding author

Correspondence to Francesco Foncellino .

Editor information

Editors and Affiliations

  1. ENEA, Portici, Italy

    Girolamo Di Francia

  2. Department of Electronic Engineering, University of Rome Tor Vergata, Roma, Italy

    Corrado Di Natale

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© 2021 The Author(s), under exclusive license to Springer Nature Switzerland AG

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Foncellino, F., Barretta, L., Massera, E. (2021). Concept of MEMS Vibrating Membrane as Particulate Matter (PM) Sensor. In: Di Francia, G., Di Natale, C. (eds) Sensors and Microsystems. AISEM 2020. Lecture Notes in Electrical Engineering, vol 753. Springer, Cham. https://doi.org/10.1007/978-3-030-69551-4_17

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  • DOI: https://doi.org/10.1007/978-3-030-69551-4_17

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-030-69550-7

  • Online ISBN: 978-3-030-69551-4

  • eBook Packages: EngineeringEngineering (R0)

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