Abstract
This chapter begins by presenting the challenges imposed by technology scaling and justifying the need for new devices for ensuring the microelectronics advancement of sub-22nm nodes. FinFET devices were pointed out as the best candidate to maintain the technology scaling. Then, this chapter presents the main parameters, configurations, and properties of these devices. Then, this chapter discusses the semiconductor industrys advancement, highlighting the main achievements until now and the trends for the coming years. The next step is dedicated to presenting the layout issues for designs using FinFET technologies, showing the main differences of the planar node layouts. Finally, this chapter also details some characteristics of sub-22nm predictive models and process design kits available for academic use.
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References
Agostinelli, M., Alioto, M., Esseni, D., Selmi, L.: Design and evaluation of mixed 3t-4t FinFET stacks for leakage reduction. In: Svensson, L., Monteiro, J. (eds.) Integrated Circuit and System Design. Power and Timing Modeling, Optimization and Simulation, pp. 31–41. Springer, Berlin (2009)
Alioto, M.: Analysis of layout density in FinFET standard cells and impact of fin technology. In: Proceedings of 2010 IEEE International Symposium on Circuits and Systems, pp. 3204–3207 (2010)
Alioto, M.: Comparative evaluation of layout density in 3t, 4t, and MT FinFET standard cells. IEEE Trans. Very Large Scale Integr. Syst. 19(5), 751–762 (2011)
Anil, K.G., Henson, K., Biesemans, S., Collaert, N.: Layout density analysis of FinFETs. In: ESSDERC ’03. 33rd Conference on European Solid-State Device Research, 2003, pp. 139–142 (2003)
Auth, C.: 22-nm fully-depleted tri-gate CMOS transistors. In: Proceedings of the IEEE 2012 Custom Integrated Circuits Conference, pp. 1–6 (2012)
Autran, J., Munteanu, D.: Soft Errors: From Particles to Circuits. Devices, Circuits, and systems. CRC Press, Boca Raton (2015)
Bhanushali, K., Davis, W.R.: Freepdk15: An open-source predictive process design kit for 15nm FinFET technology. In: Proceedings of the 2015 Symposium on International Symposium on Physical Design, p. 165–170. Association for Computing Machinery, New York (2015)
Bhattacharya, D., Jha, N.K.: FinFETs: from devices to architectures. Adv. Electron. 2014, 1–21 (2014)
Borremans, J., Parvais, B., Dehan, M., Thijs, S., Wambacq, P., Mercha, A., Kuijk, M., Carchon, G., Decoutere, S.: Perspective of RF design in future planar and FinFET CMOS. In: 2008 IEEE Radio Frequency Integrated Circuits Symposium, pp. 75–78 (2008)
Boukortt, N., Hadri, B., Pataně, S., Caddemi, A., Crupi, G.: Electrical Characteristics of 8-nm SOI n-FinFETs. Springer, Berlin (2016)
Cartwright, J.: Intel Enters the Third Dimension (2011). https://www.nature.com/articles/news.2011.274
Chang, J.B., Guillorn, M., Solomon, P.M., Lin, C.., Engelmann, S.U., Pyzyna, A., Ott, J.A., Haensch, W.E.: Scaling of SOI FinFETs down to fin width of 4 nm for the 10nm technology node. In: 2011 Symposium on VLSI Technology - Digest of Technical Papers, pp. 12–13 (2011)
Chaudhuri, S., Mishra, P., Jha, N.K.: Accurate leakage estimation for FinFET standard cells using the response surface methodology. In: 2012 25th International Conference on VLSI Design, pp. 238–244 (2012)
Chauhan, Y.S., Lu, D.D., Vanugopalan, S., Khandelwal, S., Duarte, J.P., Paydavosi, N., Niknejad, A., Hu, C.: Chapter 11 - BSIM-CMG model parameter extraction. In: FinFET Modeling for IC Simulation and Design, pp. 231–243. Academic, Cambridge (2015)
Clark, L.T., Vashishtha, V., Shifren, L., Gujja, A., Sinha, S., Cline, B., Ramamurthy, C., Yeric, G.: ASAP7: A 7-nm FinFET predictive process design kit. Microelectron. J. 53, 105–115 (2016)
Colinge, J.P. (ed.): FinFETs and Other Multi-Gate Transistors. Springer, Berlin (2008)
Conley, A.: FinFET vs. FD-SOI: Key Advantages & Disadvantages (2014). http://www.chipex.co.il/_Uploads/dbsAttachedFiles/ChipExAMAT.pdf
Cui, T., Li, J., Wang, Y., Nazarian, S., Pedram, M.: An exploration of applying gate-length-biasing techniques to deeply-scaled FinFETs operating in multiple voltage regimes. IEEE Trans. Emerg. Topics Comput. 6(2), 172–183 (2018). https://doi.org/10.1109/TETC.2016.2640185
Cui, T., Xie, Q., Wang, Y., Nazarian, S., Pedram, M.: 7nm FinFET standard cell layout characterization and power density prediction in near- and super-threshold voltage regimes. In: International Green Computing Conference, pp. 1–7 (2014)
Dančak, C.: The FinFET: A Tutorial, pp. 37–69. Springer International Publishing, Cham (2018)
Datta, A., Goel, A., Cakici, R.T., Mahmoodi, H., Lekshmanan, D., Roy, K.: Modeling and circuit synthesis for independently controlled double gate FinFET devices. IEEE Trans. Comput. Aided Design Integr. Circuits Syst. 26(11), 1957–1966 (2007)
Ding, Y., Chu, C., Mak, W.: Detailed routing for spacer-is-metal type self-aligned double/quadruple patterning lithography. In: 2015 52nd ACM/EDAC/IEEE Design Automation Conference (DAC), pp. 1–6 (2015)
Doris, B., Cheng, K., Khakifirooz, A., Liu, Q., Vinet, M.: Device design considerations for next generation cmos technology: Planar FDSOI and FinFET (invited). In: 2013 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA), pp. 1–2 (2013)
Frank, D.J., Dennard, R.H., Nowak, E., Solomon, P.M., Taur, Y., Hon-Sum Philip Wong: Device scaling limits of Si MOSFETs and their application dependencies. Proc. IEEE 89(3), 259–288 (2001)
Frumusanu, A.: TSMC Details 3nm Process Technology: Full Node Scaling for 2h22 Volume Production (2020). https://www.anandtech.com/show/16024/tsmc-details-3nm-process-technology-details-full-node-scaling-for-2h22
Ghaida, R.S., Agarwal, K.B., Nassif, S.R., Yuan, X., Liebmann, L.W., Gupta, P.: Layout decomposition and legalization for double-patterning technology. IEEE Trans. Comput. Aided Design Integr. Circuits Syst. 32(2), 202–215 (2013)
Gu, J., Keane, J., Sapatnekar, S., Kim, C.H.: Statistical leakage estimation of double gate FinFET devices considering the width quantization property. IEEE Trans. Very Large Scale Integr. Syst. 16(2), 206–209 (2008)
Guillorn, M., Chang, J., Bryant, A., Fuller, N., Dokumaci, O., Wang, X., Newbury, J., Babich, K., Ott, J., Haran, B., Yu, R., Lavoie, C., Klaus, D., Zhang, Y., Sikorski, E., Graham, W., To, B., Lofaro, M., Tornello, J., Koli, D., Yang, B., Pyzyna, A., Neumeyer, D., Khater, M., Yagishita, A., Kawasaki, H., Haensch, W.: FinFET performance advantage at 22nm: An AC perspective. In: 2008 Symposium on VLSI Technology, pp. 12–13 (2008)
Hibben, M.: TSMC, Not Intel, has the Lead in Semiconductor Processes (2018). https://seekingalpha.com/article/4151376-tsmc-not-intel-lead-in-semiconductor-processes
Hisamoto, D., Kaga, T., Kawamoto, Y., Takeda, E.: A fully depleted lean-channel transistor (delta)-a novel vertical ultra thin SOI MOSFET. In: International Technical Digest on Electron Devices Meeting, pp. 833–836 (1989)
Hisamoto, D., Lee, W.-C., Kedzierski, J., Takeuchi, H., Asano, K., Kuo, C., Anderson, E., King, T.-J., Bokor, J., Hu, C.: FinFET-a self-aligned double-gate mosfet scalable to 20 nm. IEEE Trans. Electron Devices 47(12), 2320–2325 (2000)
Hu, C.: New sub-20nm transistors – why and how. In: 2011 48th ACM/EDAC/IEEE Design Automation Conference (DAC), pp. 460–463 (2011)
Intel: Intel’s 10nm Technology: Delivering the Highest Logic Transistor Density in the Industry Through the Use of Hyper Scaling (2017). https://newsroom.intel.com/newsroom/wp-content/uploads/sites/11/2017/09/10-nm-icf-fact-sheet.pdf
ITRS: The International Technology Roadmap for Semiconductors (2011). http://www.itrs2.net/2011-itrs.html
James, D.: Intel to present on 22-nm Tri-gate technology at VLSI symposium (2012). https://sst.semiconductor-digest.com/chipworks_real_chips_blog/2012/04/12/intel-to-present-on-22-nm-tri-gate-technology-at-vlsi-symposium/
Kawa, J.: FinFET design, manufacturability, and reliability (2013). https://www.synopsys.com/designware-ip/technical-bulletin/FinFET-design.html
King, T.-J.: FinFETs for nanoscale CMOS digital integrated circuits. In: ICCAD-2005. IEEE/ACM International Conference on Computer-Aided Design, 2005., pp. 207–210 (2005)
Kleeberger, V.B., Graeb, H., Schlichtmann, U.: Predicting future product performance: Modeling and evaluation of standard cells in FinFET technologies. In: 2013 50th ACM/EDAC/IEEE Design Automation Conference (DAC), pp. 1–6 (2013)
Kuhn, K.J., Giles, M.D., Becher, D., Kolar, P., Kornfeld, A., Kotlyar, R., Ma, S.T., Maheshwari, A., Mudanai, S.: Process technology variation. IEEE Trans. Electron Devices 58(8), 2197–2208 (2011)
Kumar, V., Kirubaraj, A.: Submicron 70nm CMOS logic design with FinFETs. Int. J. Eng. Sci. Technol. 2, 4751–4758 (2010)
Liu, Y., Li, Y.: Aspherical surfaces design for extreme ultraviolet lithographic objective with correction of thermal aberration. Optical Eng. 55(9), 1–6 (2016)
McLellan, P.: FinFET Custom Design (2014). https://semiwiki.com/semiconductor-manufacturers/tsmc/3327-FinFET-custom-design/
Meinhardt, C.: Variabilidade em FinFETs. Thesis (Doutorado em Ciência da Computação) – Instituto de Informática - UFRGS (2014)
Mentor: As Nodes Advance, So Must Power Analysis (2014). https://semiengineering.com/as-nodes-advance-so-must-power-analysis/
Mishra, P., Muttreja, A., Jha, N.K.: Nanoelectronic Circuit Design, pp. 23–54. Springer, New York (2011)
Moore, G.E.: Cramming more components onto integrated circuits, reprinted from electronics, volume 38, number 8, april 19, 1965, pp.114 ff. IEEE Solid-State Circuits Soc. Newslett. 11(3), 33–35 (2006)
Muttreja, A., Agarwal, N., Jha, N.K.: CMOS logic design with independent-gate FinFETs. In: 2007 25th International Conference on Computer Design, pp. 560–567 (2007)
Nowak, E.J., Aller, I., Ludwig, T., Kim, K., Joshi, R.V., Ching-Te Chuang, Bernstein, K., Puri, R.: Turning silicon on its edge [double gate CMOS/FinFET technology]. IEEE Circuits Devices Mag. 20(1), 20–31 (2004)
Nowak, E.J., Rainey, B.A., Fried, D.M., Kedzierski, J., Ieong, M., Leipold, W., Wright, J., Breitwisch, M.: A functional FinFET-DGCMOS sram cell. In: Digest. International Electron Devices Meeting, pp. 411–414 (2002)
Park, J.-T., Colinge, J., Diaz, C.H.: Pi-gate SOI MOSFET. IEEE Electron Device Lett. 22(8), 405–406 (2001)
Poljak, M., Jovanovic, V., Suligoj, T.: SOI vs. bulk FinFET: Body doping and corner effects influence on device characteristics. In: MELECON 2008 - The 14th IEEE Mediterranean Electrotechnical Conference, pp. 425–430 (2008)
Posser, G., Belomo, J., Meinhardt, C., Reis, R.: Performance improvement with dedicated transistor sizing for mosfet and FinFET devices. In: 2014 IEEE Computer Society Annual Symposium on VLSI, pp. 418–423 (2014)
Pradhan, K.P., Sahu, P.K., Ranjan, R.: Investigation on asymmetric dual-k spacer (ads) trigate wavy FinFET: A novel device. In: 2016 3rd International Conference on Devices, Circuits and Systems (ICDCS), pp. 137–140 (2016)
PTM: Predictive Technological Model (2012). http://ptm.asu.edu/
Rainey, B.A., Fried, D.M., Ieong, M., Kedzierski, J., Nowak, E.J.: Demonstration of FinFET CMOS circuits. In: 60th DRC. Conference Digest Device Research Conference, pp. 47–48 (2002)
Ranjan, A.: Physical Verification of FinFET and FD-SOI Devices (2013). https://www.techdesignforums.com/practice/technique/physical-verification-design-FinFET-fd-soi/
Ranjan, A.: Micro-Architectural Exploration for Low Power Design (2015). https://semiengineering.com/micro-architectural-exploration-for-low-power-design/
Rieger, M.L.: Communication theory in optical lithography. J. Micro/Nanolith. MEMS MOEMS 11(1), 1–11 (2012)
Rostami, M., Mohanram, K.: Dual-v th independent-gate FinFETs for low power logic circuits. IEEE Trans. Computer-Aided Design Integr. Circuits Syst. 30(3), 337–349 (2011)
Roy, K., Mahmoodi, H., Mukhopadhyay, S., Ananthan, H., Bansal, A., Cakici, T.: Double-gate SOI devices for low-power and high-performance applications. In: 19th International Conference on VLSI Design Held Jointly with 5th International Conference on Embedded Systems Design (VLSID’06), pp. 8 pp.– (2006)
Saha, R., Bhowmick, B., Baishya, S.: Si and Ge step-FinFETs: work function variability, optimization and electrical parameters. Superlattices Microstruct. 107, 5–16 (2017)
Sairam, T., Zhao, W., Cao, Y.: Optimizing FinFET technology for high-speed and low-power design. In: Proceedings of the 17th ACM Great Lakes Symposium on VLSI, GLSVLSI ’07, p. 73–77. Association for Computing Machinery (2007)
Samsung: Samsung Launches Premium Exynos 9 Series Processor Built on the World’s First 10nm FinFET Process Technology (2017). https://news.samsung.com/global/samsung-launches-premium-exynos-9-series-processor-built-on-the-worlds-first-10nm-FinFET-process-technology
Seifert, N., Jahinuzzaman, S., Velamala, J., Ascazubi, R., Patel, N., Gill, B., Basile, J., Hicks, J.: Soft error rate improvements in 14-nm technology featuring second-generation 3d tri-gate transistors. IEEE Trans. Nuclear Sci. 62(6), 2570–2577 (2015)
Sekigawa, T., Hayashi, Y.: Calculated threshold-voltage characteristics of an XMOS transistor having an additional bottom gate. Solid State Electron. 27(8–9), 827–828 (1984)
Sicard, E.: Introducing 14-nm FinFET Technology in Microwind (2017). https://hal.archives-ouvertes.fr/hal-01541171/document
Simsir, M.O., Bhoj, A., Jha, N.K.: Fault modeling for FinFET circuits. In: 2010 IEEE/ACM International Symposium on Nanoscale Architectures, pp. 41–46 (2010)
Singh, N., Agarwal, A., Bera, L.K., Liow, T.Y., Yang, R., Rustagi, S.C., Tung, C.H., Kumar, R., Lo, G.Q., Balasubramanian, N., Kwong, D..: High-performance fully depleted silicon nanowire (diameter /spl les/ 5 nm) gate-all-around CMOS devices. IEEE Electron Device Lett. 27(5), 383–386 (2006)
Sinha, S., Yeric, G., Chandra, V., Cline, B., Cao, Y.: Exploring sub-20nm FinFET design with predictive technology models. In: DAC Design Automation Conference 2012, pp. 283–288 (2012)
Skotnicki, T., Hutchby, J.A., Tsu-Jae King, Wong, H..P., Boeuf, F.: The end of CMOS scaling: toward the introduction of new materials and structural changes to improve mosfet performance. IEEE Circuits Devices Mag. 21(1), 16–26 (2005)
Solomon, P.M., Guarini, K.W., Zhang, Y., Chan, K., Jones, E.C., Cohen, G.M., Krasnoperova, A., Ronay, M., Dokumaci, O., Hovel, H.J., Bucchignano, J.J., Cabral, C., Lavoie, C., Ku, V., Boyd, D.C., Petrarca, K., Yoon, J.H., Babich, I.V., Treichler, J., Kozlowski, P.M., Newbury, J.S., D’Emic, C.P., Sicina, R.M., Benedict, J., Wong, H..P.: Two gates are better than one [double-gate mosfet process]. IEEE Circuits Devices Mag. 19(1), 48–62 (2003)
Subramaniana, V., Parvais, B., Borremans, J., Mercha, A., Linten, D., Wambacq, P., Loo, J., Dehan, M., Collaert, N., Kubicek, S., Lander, R.J.P., Hooker, J.C., Cubaynes, F.N., Donnay, S., Jurczak, M., Groeseneken, G., Sansen, W., Decoutere, S.: Device and circuit-level analog performance trade-offs: A comparative study of planar bulk FETs versus FinFETs. In: IEEE International Electron Devices Meeting, 2005. IEDM Technical Digest., pp. 898–901 (2005)
Swahn, B., Hassoun, S.: Gate sizing: FinFETs vs 32nm bulk MOSFETs. In: 2006 43rd ACM/IEEE Design Automation Conference, pp. 528–531 (2006)
Tang, S.H., Chang, L., Lindert, N., Choi, Y.-K., Lee, W.-C., Huang, X., Subramanian, V., Bokor, J., King, T.-J., Hu, C.: FinFET-a quasi-planar double-gate MOSFET. In: 2001 IEEE International Solid-State Circuits Conference. Digest of Technical Papers. ISSCC (Cat. No.01CH37177), pp. 118–119 (2001)
Trivedi, V.P., Fossum, J.G., Zhang, W.: Threshold voltage and bulk inversion effects in nonclassical CMOS devices with undoped ultra-thin bodies. Solid State Electron. 51(1), 170–178 (2007)
Wambacq, P., Verbruggen, B., Scheir, K., Borremans, J., De Heyn, V., Van der Plas, G., Mercha, A., Parvais, B., Subramanian, V., Jurczak, M., Decoutere, S., Donnay, S.: Analog and RF circuits in 45 nm CMOS and below: Planar bulk versus FinFET. In: 2006 Proceedings of the 32nd European Solid-State Circuits Conference, pp. 54–57 (2006)
Wilson, D., Hayhurst, R., Oblea, A., Parke, S., Hackler, D.: Flexfet: Independently-double-gated SOI transistor with variable Vt and 0.5 V operation achieving near ideal subthreshold slope. In: 2007 IEEE International SOI Conference, pp. 147–148 (2007)
Wimer, S.: Planar CMOS to multi-gate layout conversion for maximal fin utilization. Integration 47(1), 115–122 (2014)
Yang, F.L., Chen, H.Y., Chen, F.C., Huang, C.C., Chang, C.Y., Chiu, H.K., Lee, C.C., Chen, C.C., Huang, H.T., Chen, C.J., Tao, H.J., Yeo, Y.-C., Liang, M.-S., Hu, C.: 25nm CMOS omega FETs. In: Digest. International Electron Devices Meeting, pp. 255–258 (2002)
Yu, B., Chang, L., Ahmed, S., Wang, H., Bell, S., Yang, C.-Y., Tabery, C., Ho, C., Xiang, Q., King, T.-J., Bokor, J., Hu, C., Lin, M.-R., Kyser, D.: FinFET scaling to 10 nm gate length. In: Digest. International Electron Devices Meeting, pp. 251–254 (2002)
Zarei, M.Y., Asadpour, R., Mohammadi, S., Afzali-Kusha, A., Seyyedi, R.: Modeling symmetrical independent gate FinFET using predictive technology model. In: Proceedings of the 23rd ACM International Conference on Great Lakes Symposium on VLSI, GLSVLSI ’13, p. 299–304. Association for Computing Machinery (2013)
Zhang, B.: FinFET standard cell optimization for performance and manufacturability. UT Electronic Theses and Dissertations (2012)
Zhang, W., Fossum, J.G., Mathew, L., Du, Y.: Physical insights regarding design and performance of independent-gate FinFETs. IEEE Trans. Electron Devices 52(10), 2198–2206 (2005)
Zhao, W., Cao, Y.: New generation of predictive technology model for sub-45nm design exploration. In: 7th International Symposium on Quality Electronic Design (ISQED’06), pp. 6 pp.–590 (2006)
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Zimpeck, A., Meinhardt, C., Artola, L., Reis, R. (2021). FinFET Technology. In: Mitigating Process Variability and Soft Errors at Circuit-Level for FinFETs. Springer, Cham. https://doi.org/10.1007/978-3-030-68368-9_2
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