Abstract
The concept of constructing of a radio frequency identification system at frequencies 6 GHz based on frequency coding using radio frequency identification tags on resonators on bulk acoustic waves with high Q factor is presented. The axially symmetric 3D structure of the film piezoelectric resonator with the quasi-single-crystal AlN film on the acoustic Bragg reflector which is formed from the alternating molybdenum and silicon oxide layers was considered. Optimization of the acoustoelectronic FBAR resonator design for the RFID tag in the frequency band 10–13 GHz was accomplished. The dependence of the top electrode thickness upon the required resonant frequency of the FBAR resonator was obtained. Design of the RFID tag in the frequency band 10–13 GHz was proposed. There are real technical possibilities for creating of the RFID system in the frequency band 6–30 GHz with the FBAR resonators. Such systems will be protected to electromagnetic fields and ionizing radiation and they will have the high temperature stability characteristic of the FBAR resonators.
This work was supported by the Ministry of Education and Science of Russia in the framework of project No. FSRR-2020-0005.
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Suchkov, S., Nikolaevtsev, V., Suchkov, D. (2020). Method of Frequency Coding in Microwave RFID. In: Vishnevskiy, V.M., Samouylov, K.E., Kozyrev, D.V. (eds) Distributed Computer and Communication Networks: Control, Computation, Communications. DCCN 2020. Communications in Computer and Information Science, vol 1337. Springer, Cham. https://doi.org/10.1007/978-3-030-66242-4_8
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