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Integrated Ring Resonators pp 47–178Cite as

Materials, Fabrication and Characterization Methods

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Part of the Springer Series in Optical Sciences book series (SSOS,volume 127)

Abstract

Recently, advancing fabrication technologies enabled the realization of ring resonators in many material systems with excellent optical properties. In this chapter ring resonators made of different materials using corresponding manufacturing processes will be presented based on the current state-of-the-art in literature. Device performance details will be given in Chap. 5.

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Notes

  1. 1.

    ®™* Trademark of The Dow Chemical Company (“Dow”) or an affiliated company of Dow.

  2. 2.

    https://www.ioffe.ru/SVA/NSM/nk/Oxides/Gif/sio2.gif.

  3. 3.

    https://www.ioffe.ru/SVA/NSM/nk/Nitrides/Gif/si3n4.gif.

  4. 4.

    www.ibm.zurich.com.

  5. 5.

    https://www.ioffe.ru/SVA/NSM/nk/A3B5/Gif/inp.gif.

  6. 6.

    https://www.ioffe.ru/SVA/NSM/nk/A3B5/Gif/gaas.gif.

  7. 7.

    760 Torr = 1 atm = 101,325 kPa = 1013,25 h Pa = 101,325 bar.

  8. 8.

    Standard temperature and pressure. The volume measurement is made at or adjusted to a temperature of 0 °C and a pressure of 1 atmosphere, or 101.325 kPa.

  9. 9.

    Introduction of deuterium into the chemical compound.

  10. 10.

    Trademark of the Fraunhofer–Gesellschaft zur Forderung der angewandten Forschung e.V. München.

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  1. Department of Applied Chemistry, Process Analysis and Technology (PA&T), Reutlingen University, Reutlingen, Germany

    Dominik Gerhard Rabus

  2. Department of Physics and Astronomy “Galileo Galilei”, University of Padova, Padua, Italy

    Cinzia Sada

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Rabus, D.G., Sada, C. (2020). Materials, Fabrication and Characterization Methods. In: Integrated Ring Resonators. Springer Series in Optical Sciences, vol 127. Springer, Cham. https://doi.org/10.1007/978-3-030-60131-7_3

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