Abstract
Surface micro-nano structures play an important role in realizing various functions at solid surfaces and interfaces. Ultrafast lasers, especially the new-generation high-repetition rate high-power ultrafast lasers, have been proven to be powerful and versatile tools in enabling the fabrication of surface micro-nano structures. Taking the antireflection property as the key and cut-in point, this chapter presents a brief overview on the state-of-the-art and current challenges on the fabrication of surface micro-nano structures. Special focus will be placed on our achievements in the recent years in developing ultrafast laser-based approaches for the general, scalable, and controllable construction of surface micro-nano functional structures, including nanoscale structures, micro-nano dual-scale structures, and macro-micronano-nanowire multiscale structures, and the unique antireflection performances realized by these surface micro-nano structures. This chapter intends to offer readers an integrated tour of ultrafast laser fabrication techniques for surface micro-nano structures and an outlook on their great application potentials.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Similar content being viewed by others
References
C. Neinhuis, W. Barthlott, Characterization and distribution of water-repellent, self-cleaning plant surfaces. Ann. Bot-Lond. 79, 667–677 (1997)
K. Liu, L. Jiang, Multifunctional integration: from biological to bio-inspired materials. ACS Nano 5(9), 6786–6790 (2011)
B. Dean, B. Bhushan, Shark-skin surfaces for fluid-drag reduction in turbulent flow: a review. Phil. Trans. R. Soc. A 368, 4775–4806 (2010)
X. Gao, L. Jiang, Water-repellent legs of water striders. Nature 432, 36 (2004)
K. Koch, W. Barthlott, Superhydrophobic and superhydrophilic plant surfaces: an inspiration for biomimetic materials. Phil. Trans. R. Soc. A 367, 1487–1509 (2009)
A.R. Parker, H.E. Townley, Biomimetics of photonic nanostructures. Nat. Nanotechnol. 2, 347–353 (2007)
P. Vukusic, J.R. Sambles, Photonic structures in biology. Nature 424, 852–855 (2003)
H.K. Raut, V.A. Ganesh, A.S. Nair et al., Anti-reflective coatings: a critical, in-depth review. Energy Environ. Sci. 4, 3779–3804 (2011)
L. Yao, J. He, Recent progress in antireflection and self-cleaning technology—from surface engineering to functional surfaces. Prog. Mater Sci. 61, 94–143 (2014)
A. Deinega, I. Valuev, B. Potapkin et al., Minimizing light reflection from dielectric textured surfaces. J. Opt. Soc. Am. A 28(5), 770–777 (2011)
S. Tsoi, E. Fok, J.C. Sit et al., Surface functionalization of porous nanostructured metal oxide thin films fabricated by glancing angle deposition. Chem Mater. 18, 5260–5266 (2006)
A. Nakajima, K. Hashimoto, T. Watanabe et al., Transparent superhydrophobic thin films with self-cleaning properties. Langmuir 16, 7044–7047 (2000)
P.L. Taberna, S. Mitra, P. Poizot et al., High rate capabilities Fe3O4-based Cu nano-architectured electrodes for lithium-ion battery applications. Nat. Mater. 5, 567–573 (2006)
T. Ito, S. Okazakl, Pushing the limits of lithography. Nature 406, 1027–1031 (2000)
L. Li, M.L. Hong, M. Schmidt et al., Laser nano-manufacturing—state of the art and challenges. CIRP Ann-Manuf. Technol. 60(2), 735–755 (2011)
T.C. Chong, M.H. Hong, L.P. Shi, Laser precision engineering from micro fabrication to nanoprocessing. Laser Photon. Rev. 4(1), 123–143 (2010)
M.J. Abere, M.L. Zhong, J. Kruger, J. Bonse, Ultrafast laser-induced morphological transformations. MRS Bull. 41(12), 969–974 (2016)
I. Etsion, State of the art in laser surface texturing. J. Tribol.-Trans. ASME 127(1), 248–253 (2005).
J.Y. Long, P.X. Fan, D.W. Gong et al., Superhydrophobic surfaces fabricated by femtosecond laser with tunable water adhesion: from lotus leaf to rose petal. ACS Appl. Mater. Interfaces 7, 9858–9865 (2015)
C. Kerse, H. Kalaycıoğlu, P. Elahi et al., Ablation-cooled material removal with ultrafast bursts of pulses. Nature 537, 84–89 (2016)
X. Liu, D. Du, G. Mourou, Laser ablation and micromachining with ultrashort laser pulses. IEEE J. Quantum Electron. 33(10), 1706–1716 (2002)
C. Wu, C.H. Crouch, L. Zhao et al., Near-unity below-band-gap absorption by microstructured silicon. Appl. Phys. Lett. 78(13), 1850–1852 (2001)
J. Escarré, K. Söderström, M. Despeisse et al., Geometric light trapping for high efficiency thin film silicon solar cells. Sol. Energy Mater. Sol. Cells 98, 185–190 (2012)
H. Xu, N. Lu, D. Qi et al., Biomimetic antireflective Si nanopillar arrays. Small 4(11), 1972–1975 (2008)
Y.F. Huang, S. Chattopadhyay, Y.J. Jen et al., Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures. Nat. Nanotechnol. 2, 770–774 (2007)
Y.M. Song, S.Y. Bae, J.S. Yu et al., Closely packed and aspect-ratio-controlled antireflection subwavelength gratings on GaAs using a lenslike shape transfer. Opt. Lett. 34(11), 1702–1704 (2009)
C.H. Chiu, P. Yu, H.C. Kuo et al., Broadband and omnidirectional antireflection employing disordered GaN nanopillars. Opt. Express 16(12), 8748–8754 (2008)
S.L. Diedenhofen, R.E. Algra, E.P.A.M. Bakkers, J.G.Rivas, Mimicking moth's eyes for photovoltaic applications with tapered GaP nanorods, in Proceedings of SPIE 7772, Next Generation (Nano) Photonic and Cell Technologies for Solar Energy Conversion, 77720M (2010)
A.Y. Vorobyev, C. Guo, Femtosecond laser blackening of platinum. J. Appl. Phys 104, 053516 (2008)
A.Y. Vorobyev, C. Guo, Colorizing metals with femtosecond laser pulses. Appl. Phys. Lett. 92, 041914 (2008)
T.Y. Hwang, A.Y. Vorobyev, C. Guo, Formation of solar absorber surface on nickel with femtosecond laser irradiation. Appl Phys a 108, 299–303 (2012)
A.Y. Vorobyev, A.N. Topkov, O.V. Gurin et al., Enhanced absorption of metals over ultrabroad electromagnetic spectrum. Appl. Phys. Lett. 95, 121106 (2009)
H. Huang, L.M. Yang, S. Bai, J. Liu, Blackening of metals using femtosecond fiber laser. Appl. Opt. 54, 324–333 (2015)
B. Zheng, W. Wang, G. Jiang, X. Mei, Fabrication of broadband antireflective black metal surfaces with ultra-light-trapping structures by picosecond laser texturing and chemical fluorination. Appl. Phys. B 122, 180 (2016)
V.V. Iyengar, B.K. Nayak, M.C. Gupta, Ultralow reflectance metal surfaces by ultrafast laser texturing. Appl. Optics 49(31), 5983–5988 (2010)
K. Paivasaari, J.J.J. Kaakkunen, M. Kuittinen et al., Enhanced optical absorptance of metals using interferometric femtosecond ablation. Opt. Express 15(21), 13838–13843 (2007)
J.J.J. Kaakkunen, K. Paivasaari, M. Kuittinen et al., Morphology studies of the metal surfaces with enhanced absorption fabricated using interferometric femtosecond ablation. Appl. Phys. A 94, 215–220 (2009)
G. Tang, A.C. Hourd, A. Abdolvand, Nanosecond pulsed laser blackening of copper. Appl. Phys. Lett. 101, 231902 (2012)
B. Dusser, Z. Sagan, H. Soder et al., Controlled nanostructures formation by ultrafast laser pulses for color marking. Opt. Express 18, 2913–2924 (2010)
M.A. Kats, R. Blanchard, P. Genevet, F. Capasso, Nanometre optical coatings based on strong interference effects in highly absorbing media. Nat. Mater. 12, 20–24 (2013)
J.Q. Xi, M.F. Schubert, J.K. Kim et al., Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection. Nat. Photon. 1, 176–179 (2007)
P. Spinelli, M.A. Verschuuren, A. Polman, Broadband omnidirectional antireflection coating based on subwavelength surface Mie resonators. Nat. Commun. 3, 692 (2012)
J. Escarré, K. Söderström, M. Despeisse et al., Geometric light trapping for high efficiency thin film silicon solar cells. Sol. Energy Mater. Sol. Cells. 98, 185–190 (2012)
C.F. Guo, T. Sun, F. Cao et al., Metallic nanostructures for light trapping in energy-harvesting devices. Light-Sci. Appl. 3, e161 (2014)
N.I. Landy, S. Sajuyigbe, J.J. Mock et al., Perfect metamaterial absorber. Phys. Rev. Lett. 100, 207402 (2008)
C.M. Watts, X. Liu, W.J. Padilla Metamaterial electromagnetic wave absorbers. Adv. Mater. 24, OP98-OP120 (2012)
T. Søndergaard, S.M. Novikov, T. Holmgaard et al., Plasmonic black gold by adiabatic nanofocusing and absorption of light in ultra-sharp convex grooves. Nat. Commun. 3, 969 (2012)
T.V. Teperik, F.J. GarcÃa de Abajo, A.G. Borisov et al., Omnidirectional absorption in nanostructured metal surfaces. Nat. Photon. 2, 299–301 (2008)
Y. Yao, J. Yao, V.K. Narasimhan et al., Broadband light management using low-Q whispering gallery modes in spherical nanoshells. Nat. Commun. 3, 664 (2012)
S.L. Diedenhofen, G. Vecchi, R.E. Algra et al., Broad-band and omnidirectional antireflection coatings based on semiconductor nanorods. Adv. Mater. 21, 973–978 (2009)
Z.P. Yang, L. Ci, J.A. Bur et al., Experimental observation of an extremely dark material made by a low-density nanotube array. Nano Lett. 8(2), 446–451 (2008)
K. Mizuno, J. Ishii, H. Kishida et al., A black body absorber from vertically aligned single-walled carbon nanotubes. PNAS 106(15), 6044–6047 (2009)
J.Y. Long, P.X. Fan, M.L. Zhong et al., Superhydrophobic and colorful copper surfaces fabricated by picosecond laser induced periodic nanostructures. Appl. Surf. Sci. 311, 461–467 (2014)
P.X. Fan, M.L. Zhong, L. Li et al., Angle-independent colorization of copper surfaces by simultaneous generation of picosecond-laser-induced nanostructures and redeposited nanoparticles. J. Appl. Phys. 115, 124302 (2014)
P.X. Fan, M.L. Zhong, B.F. Bai et al., Tuning the optical reflection property of metal surfaces via micro–nano particle structures fabricated by ultrafast laser. Appl. Surf. Sci. 359, 7–13 (2015)
P.X. Fan, M.L. Zhong, L. Li et al., Rapid fabrication of surface micro/nano structures with enhanced broadband absorption on Cu by picosecond laser. Opt. Express 21, 11628–11637 (2013)
P.X. Fan, M.L. Zhong, B.F. Bai et al., Large scale and cost effective generation of 3D self-supporting oxide nanowire architectures by a top-down and bottom-up combined approach. RSC Adv. 6, 45923–45930 (2016)
P.X. Fan, M.L. Zhong, L. Li et al., Sequential color change on copper surfaces via micro/nano structure modification induced by a picosecond laser. J. Appl. Phys. 114, 083518 (2013)
P.X. Fan, M.L. Zhong, C. Lin et al., Sequential colorization of steel surface by ps laser texturing. Int. Congr. Appl. Lasers Electro-Opt. 1, 700–705 (2013)
P.X. Fan, J.Y. Long, D.F. Jiang et al., Study on ultrafast laser fabrication of UV-FIR ultra-broad-band antireflection surface micro-nano structures and their properties. Chin. J. Lasers 42(8), 0806005 (2015)
P.X. Fan, B.F. Bai, J.Y. Long et al., Broadband high-performance infrared antireflection nanowires facilely grown on ultrafast laser structured Cu surface. Nano Lett. 15, 5988–5994 (2015)
P.X. Fan, H. Wu, M.L. Zhong et al., Large-scale cauliflower-shaped hierarchical copper nanostructures for efficient photothermal conversion. Nanoscale 8, 14617–14624 (2016)
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2020 Springer Nature Switzerland AG
About this chapter
Cite this chapter
Zhong, M., Fan, P. (2020). Ultrafast Laser Enabling Versatile Fabrication of Surface Micro-nano Structures. In: Hu, A. (eds) Laser Micro-Nano-Manufacturing and 3D Microprinting. Springer Series in Materials Science, vol 309. Springer, Cham. https://doi.org/10.1007/978-3-030-59313-1_2
Download citation
DOI: https://doi.org/10.1007/978-3-030-59313-1_2
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-030-59312-4
Online ISBN: 978-3-030-59313-1
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)