Abstract
This chapter summarizes the present status of bulk GaN crystals grown by ammonothermal basic and acidic methods, and reviews their intrinsic physical properties. Crystals with low dislocation densities, typically well below 105 cm−2, high crystal lattice flatness, and sharp X-ray rocking curves (typically below 20 arcsec) are reproducibly grown by both methods. High quality strain-free homoepitaxial films have been successfully deposited on both polar and non-polar ammonothermal substrates. Characteristics of testing devices produced using these epitaxial templates confirm the potential of ammonothermal substrates for fabrication of high performance and high yield devices.
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References
K. Byrappa, M. Yoshimura, Handbook of Hydrothermal Technology (Noyes Publications, Norwich, 2001)
M. Zając, R. Kucharski, K. Grabianska, A. Gwardys-Bak, A. Puchalski, J.Z. Domagala, R. Piotrzkowski, E. Litwin-Staszewska, D. Wasik, M. Bockowski, Prog. Cryst. Growth Charact. Mater. 64, 63 (2018)
R. Dwilinski, R. Doradzinski, J. Garczynski, L.P. Sierzputowski, A. Puchalski, Y. Kanbara, K. Yagi, H. Minakuchi, H. Hayashi, J. Cryst. Growth 310, 3911 (2008)
R. Dwilinski, R. Doradzinski, J. Garczynski, L.P. Sierzputowski, M. Rudzinski, M. Zajac, J. Cryst. Growth 311, 3058 (2009)
R. Dwilinski, R. Doradzinski, J. Garczynski, L. Sierzputowski, R. Kucharski, M. Zajac, M. Rudzinski, R. Kudrawiec, W. Strupinski, J. Misiewicz, Phys. Status Solidi (A) 208, 1489 (2011)
Y. Mikawa, T. Ishinabe, S. Kawabata, T. Mochuzuki, A. Kojima, Y. Kagamitani, H. Fujisawa, Proc. SPIE 9363, 936302-1 (2015). R. Kucharski, M. Zajac, M. Rudzinski, R. Kudrawiec, W. Strupinski, J. Misiewicz, Phys. Status Solidi (A) 208, 1489 (2011)
D. Ehrentraut, R.T. Pakalapati, D.S. Kamber, W. Jiang, D.W. Pocius, B.C. Downey, M. McLaurin, M.P. D’Evelyn, Jpn. J. Appl. Phys. 52, 08JA01 (2013)
W. Jiang, D. Ehrentraut, J. Cook, D.S. Kamber, R.T. Pakalapati, M.P. D’Evelyn, Phys. Status Solidi B 252, 1069 (2015)
T. Malkowski, J.S. Speck, S.P. DenBaars, S. Nakamura, J. Cryst. Growth 499, 85 (2018)
R. Dwilinski, A. Wysmolek, J. Baranowski, M. Kaminska, R. Doradzinski, J. Garczynski, L. Sierzputowski, Acta Phys. Pol. 88(5), 833 (1995)
D.R. Ketchum, J.W. Kolis, J. Cryst. Growth 222, 431 (2001)
A. Yoshikawa, E. Oshima, T. Fukuda, H. Tsuji, K. Oshima, J. Cryst. Growth 260, 67 (2004)
B. Wang, M.J. Callahan, Cryst. Growth Des. 6, 1227 (2006)
T. Hashimoto, K. Fujito, B.A. Haskell, P.T. Fini, J.S. Speck, S. Nakamura, J. Cryst. Growth 275, e525 (2005)
T. Hashimoto, K. Fujito, R. Sharma, E.R. Letts, P.T. Fini, J.S. Speck, S. Nakamura, J. Cryst. Growth 291, 100 (2006)
M.P. D’Evelyn, H.C. Hong, D.-S. Park, H. Lu, E. Kaminsky, R.R. Melkote, P. Perlin, M. Leszczynski, S. Porowski, R.J. Molnar, J. Cryst. Growth 300, 11 (2007)
D. Bliss, B. Wang, M. Suscavage, R. Lancto, S. Swider, W. Eikenberry, C. Lynch, J. Cryst. Growth 312, 1069 (2010)
T. Hashimoto, E. Letts, M. Ikari, Y. Nojima, J. Cryst. Growth 312, 2503 (2010)
R. Dwilinski, R. Doradzinski, J. Garczynski, L. Sierzputowski, R. Kucharski, M. Zajac, M. Rudzinski, R. Kudrawiec, J. Serafinczuk, W. Strupinski, J. Cryst. Growth 312, 2499 (2010)
K. Fujii, G. Fujimoto, T. Goto, T. Yao, Y. Kagamitani, N. Hoshino, D. Ehrentraut, T. Fukuda, J. Cryst. Growth 310, 896–899 (2008)
Y. Kagamitani, D. Ehrentraut, A. Yoshikawa, N. Hoshino, T. Fukuda, H. Tsuji, K. Oshima, Jpn. J. Appl. Phys. 45, 4018 (2006)
T. Hashimoto, S. Hoff, D. Key, K. Male, M. Michaels, J. Cryst. Growth 403, 3 (2014)
E. Letts, D. Key, T. Hashimoto, J. Cryst. Growth 456, 27 (2016)
S. Pimputkar, S. Kawabata, J.S. Speck, S. Nakamura, J. Cryst. Growth 403, 7 (2014)
S. Pimputkar, J.S. Speck, S. Nakamura, J. Cryst. Growth 456, 15 (2016)
T.F. Malkowski, S. Pimputkar, J.S. Speck, S.P. DenBaars, S. Nakamura, J. Cryst. Growth 456, 21 (2016)
J. Hertrampf, N.S.A. Alt, E. Schlücker, M. Knetzger, E. Meissner, R. Niewa, J. Cryst. Growth 456, 2 (2016)
D. Tomida, Y. Kagamitani, Q. Bao, K. Hazu, H. Sawayama, S.F. Chichibu, C. Yokoyama, T. Fukuda, T. Ishiguro, J. Cryst. Growth 353, 59 (2012)
Q. Bao, M. Saito, K. Hazu, Y. Kagamitani, K. Kurimoto, D. Tomida, K. Qiao, T. Ishiguro, Ch. Yokoyama, S.F. Chichibu, J. Cryst. Growth 404, 168 (2014)
K. Yoshida, K. Aoki, T. Fukuda, J. Cryst. Growth 393, 93 (2014)
M. Saito, D.S. Kamber, T.J. Baker, K. Fujito, S.P. DenBaars, J.S. Speck, S. Nakamura, Appl. Phys. Express 1, 121103 (2008)
R.G. Wyckoff, Crystal Structures, vol. 1 (Wiley, New York, 1995), pp. 111–113
H. Schulz, K.H. Thiemann, Solid State Commun. 23, 815 (1977)
G.A. Jeffrey, G.S. Parry, R.L. Mozzi, J. Chem. Phys. 25, 1024 (1956)
N.A. Mahadik, S.B. Qadri, M.V. Rao, Thin Solid Films 516, 233 (2007)
M. Leszczynski, I. Grzegory, H. Teisseyre, T. Suski, M. Bockowski, J. Jun, J.M. Baranowski, S. Porowski, J.M. Domagala, Appl. Phys. Lett. 69, 73 (1996)
N.A. Mahadik, S.B. Qadri, J.A. Freitas Jr., Cryst. Growth Des. 15, 291 (2014)
L. Bergman, M. Dutta, R.J. Nemanich, Raman Scattering in Materials Science, Springer Series in Materials Science, vol. 42, ed. by W.H. Weber, R. Merlin (2000), p. 273
D. Gogova, P.P. Petrov, M. Buegler, M.R. Wagner, C. Nestiel, G. Callsen, M. Schmidbauert, R. Kucharski, M. Zajac, R. Dwilinski, M.R. Philips, A. Hoffmann, R. Fornari, J. Appl. Phys. 113, 203513 (2013)
P. Perlin, J. Camassel, W. Knap, T. Talercio, J.C. Chervin, T. Suski, I. Grzegory, S. Porowski, Appl. Phys. Lett. 67, 2524 (1995)
H.-Y. Kim, J.A. Freitas Jr., J. Kim, Electrochem. Solid State Lett. 14, H5 (2011)
J.A. Freitas Jr., J.C. Culbertson, N.A. Mahadik, M.J. Tadjer, S. Wu, B. Raghothamachar, M. Dudley, T. Sochacki, M. Bockowski, J. Cryst. Growth 500, 104 (2018)
M. Dudley, Encyclopedia of Advanced Materials, vol. 4 (Pergamon Press, NY, 1994), p. 2950
M.J. Hordon, B.L. Averbach, Acta Metall. 9, 231 (1961)
P. Gay, P.B. Hirsch, A. Kelly, Acta Metall. 1, 315 (1953)
R. Kucharski, K. Grabianska, A. Gwardys-Bak, M. Zajac, A. Puchalski, J.Z. Domagala, T. Sochacki, M. Bockowski, Presented at International Workshop on Nitride Semiconductors, Kanazawa, Japan, 11–16 Nov 2018
X. Bilaj, Dudley et al., to be published
S. Sintonen, M. Rudzinski, S. Suihkonen, H. Jussila, M. Knetzger, E. Meissner, A. Danilewsky, T.O. Tuomi, H. Lipsanen, J. Appl. Phys. 116, 083504 (2014)
T. Hashimoto, F. Wu, M. Saito, K. Fujitu, J.S. Speck, S. Nakamura, J. Cryst. Growth 310, 876 (2008)
J. Bai, M. Dudley, B. Raghothamachar, P. Gouma, B.J. Shromme, L. Chen, P.J. Hartileb, M. Michaels, J.W. Kolis, Appl. Phys. Lett. 84, 17 (2004)
K. Horibuchi, S. Yamaguchi, Y. Kimoto, K. Nishikawa, T. Kachi, Semicond. Sci. Technol. 31, 034002 (2016)
L.J. Cheng, C.K. Yet, Sol. State. Commun. 12, 529 (1973)
P.U. Arifov, N.Y. Arutyunov, A.Z. Iliyasov, Sov. Phys. Semicond. 11, 907 (1977)
F. Tuomisto, I. Makkonen, Rev. Mod. Phys. 85, 1583 (2013)
K. Saarinen, T. Laine, S. Kuisma, J. Nissila, P. Hautojarvi, L. Dobrzynski, J.M. Baranowski, K. Pakula, R. Stepniewski, M. Wojdak, A. Wysmolek, T. Suski, M. Leszczynski, I. Grzegory, S. Porowski, Phys. Rev. Lett. 79, 3030 (1997)
K. Saarinen, in III-nitrides Semiconductors: Electrical, Structural and Defects Properties, ed. by O. Manasreh (Elsevier, Amsterdam, 2000), pp. 109–149
F. Tuomisto, J.-M. Mäki, M. Zajac, J. Cryst. Growth 312, 2620 (2010)
F. Tuomisto, T. Kuittinen, M. Zajac, R. Doradzinski, D. Wasik, J. Cryst. Growth 403, 114 (2014)
C. Van de Walle, Phys. Rev. B 56, R10020 (1997)
S. Suihkonen, S. Pimputkar, J.S. Speck, S. Nakamura, Appl. Phys. Lett. 108, 202105 (2016)
A. Uedono, Y. Tsukada, Y. Mikawa, T. Mochizuki, H. Fujisawa, H. Ikeda, K. Kurihara, S. Terada, S. Ishibashi, S.F. Chichibu, J. Cryst. Growth 448, 117 (2016)
W. Jiang, M. Nolan, D. Ehrentraut, M.P. D’Evelyn, Appl. Phys. Express 10, 075506 (2017)
J.L. Lyons, A. Alkauskas, A. Janotti, C.G. Van de Walle, Phys. Status Solid 252, 900 (2015)
C. Persson, A.F. da Silva, Optoelectronic Devices: III-Nitrides, ed. by M. Razeghi, M. Henini (Elsevier, Amsterdam, 2004), pp. 518–559
Authors and Editors of the LB Volumes III/17A-22A-41A1b, Gallium nitride (GaN), effective masses, g-factors, deformation potentials, in Group IV Elements, IV-IV and III-V Compounds. Part B—Electronic, Transport, Optical and Other Properties. Landolt-Börnstein—Group III Condensed Matter (Numerical Data and Functional Relationships in Science and Technology), vol. 41A1b, ed. by O. Madelung, U. Rössler, M. Schulz (Springer, Berlin, Heidelberg)
J. Neugebauer, C.G. Van de Walle, Phys. Rev. B 50, 8067 (1994)
J. Neugebauer, C.G. Van de Walle, Appl. Phys. Lett. 68, 1829 (1996)
J. Neugebauer, C.G. Van de Walle, Appl. Phys. Lett. 69, 503 (1996)
P. Boguslawski, E.L. Briggs, J. Bernholc, Phys. Rev. B 51, 17255 (1995)
T. Mattila, R.M. Nieminen, Phys. Rev. B 55, 9571 (1997)
I. Gorczyca, A. Svane, N.E. Christensen, Phys. Rev. B 60, 8147 (1999)
S. Limpijumnong, C.G. Van de Walle, Phys. Rev. B 69, 035207 (2004)
H. Wan, A.-B. Chen, J. Appl. Phys. 87, 7859 (2000)
F. Mireles, S.E. Ulloa, Phys. Rev. B 58, 3879 (1998)
W. Gotz, N.M. Johnson, J. Walker, D.P. Bour, R.A. Street, Appl. Phys. Lett. 68, 667 (1996)
J.A. Freitas Jr., W.J. Moore, B.V. Shanabrook, G.C.B. Braga, S.K. Lee, S.S. Park, J.Y. Han, Phys. Rev. B. 66(2002), 233311 (2002)
E. Burstein, Phys. Rev. 93, 632 (1954)
R. Doradzinski, R. Dwilinski, J. Garczynski, L.P. Sierzputowski, Y. Kanbara, in Technology of Gallium Nitride Crystal Growth, ed. by D. Ehrentraut, E. Meissener, M. Bockowski (Springer, Cham, 2010), pp. 137–159, Chapter 7
D.O. Demchenko, I.C. Diallo, M.A. Rashchikov, Phys. Rev. Lett. 110, 087404 (2013)
J.A. Freitas Jr., B.N. Feigelson, T.J. Anderson, Appl. Phys. Express 6, 111001 (2013)
M. Ilegems, R. Dingle, R.A. Logan, J. Appl. Phys. 43, 3797 (1972)
M. Sakai, H. Ishikawa, T. Egawa, T. Jimbo, M. Umemo, T. Shibata, K. Asai, S. Sumiya, Y. Kuraoka, M. Tanaka, O. Oda, J. Cryst. Growth 244, 6 (2002)
S. Addachi, Properties of Group-IV, III-V and II-VI Semiconductors (Wiley, Chichester, 2005)
D. Ehrentraut, T. Fukuda, Proc. IEEE 98, 1316 (2010)
W. Jiang, D. Ehrentraut, B.C. Downey, D.S. Kamber, R.T. Pakalapati, H.D. Yoo, M.P. D’Evelyn, J. Cryst. Growth 403, 18 (2014)
S. Nakamura, T. Mukai, M. Senoh, N. Iwasa, Jpn. J. Appl. Phys. 31, L139 (1991)
D.I. Florescu, V.M. Asnin, F.H. Pollak, R.J. Molnar, C.E.C. Wood, J. Appl. Phys. 88, 3295 (2000)
G.A. Slack, L.J. Schowalter, J.A. Freitas Jr., J. Cryst. Growth 246, 287 (2002)
A. Jezowski, B.A. Denilchenko, M. Bockowski, I. Grzegory, S. Krukowski, T. Suski, T. Paszkiewicz, Solid State Commun. 128, 69 (2003)
D.I. Florescu, V.M. Asnin, F.H. Pollak, A.M. Jones, M.J. Schurman, I. Fergunson, Appl. Phys. Lett. 77, 1464 (2000)
J. Zou, D. Kotchetkov, A.A. Baladin, D.I. Florescu, F.H. Pollack, J. Appl. Phys. 92, 2534 (2002)
W. Liu, A.A. Baladin, C. Lee, H. Lee, Phys. Status Solidi A 179, R135 (2005)
D.I. Florescu, F.H. Pollak, T. Paskova, B. Monemar, Compound Semicond. 7, 62 (2001)
R.B. Simon, J. Anaya, M. Kubal, Appl. Phys. Lett. 105, 202105 (2014)
C. Mion, J.F. Muth, E.A. Preble, D. Hanser, Appl. Phys. Lett. 89, 092123 (2006)
R. Rounds, B. Sarkar, T. Sochacki, M. Bockowski, M. Imanishi, Y. Mori, R. Collazo, Z. Sitar, J. Appl. Phys. 124, 105106 (2018)
A. Witek, Diamond Relat. Mater. 7, 962 (1998)
Y. Oshima, T. Suzuki, T. Eri, Y. Kawaguchi, K. Watanabe, M. Shibata, T. Mishima, J. Appl. Phys. 98, 103509 (2005)
I. Grzegory, J. Jun, M. Bockowski, M. Wrobleski, B. Lucznik, S. Porowski, J. Phys. Chem. Solids 56, 639 (1995)
D.D. Koleske, A.E. Wickenden, R.L. Henry, M.E. Twigg, J.C. Culbertson, R.J. Gorman, Appl. Phys. Lett. 73, 2018 (1998). Erratum, Appl. Phys. Lett. 75, 1646 (1999)
M. Amilusik, T. Sochacki, B. Lucznik, M. Bockowski, B. Sadovyi, A. Presz, I. Dziecielewski, I. Grzegory, J. Cryst. Growth 380, 99 (2013)
T. Sochacki, M. Amilusik, B. Lucznik, M. Fijakowski, J.L. Weyher, B. Sadovyi, G. Kamler, G. Nowak, E. Litwin-Staszewska, A. Khachapuridze, I. Grzegory, R. Kucharski, M. Zajac, R. Doradzinski, M. Bockowski, Jpn. J. Appl. Phys. 53, 05FA04 (2014)
T. Sochacki, Z. Bryan, M. Amilusik, R. Collazo, B. Lucznik, J.L. Weyher, G. Nowak, B. Sadovyi, R. Kucharski, M. Zajac, R. Doradzinski, R. Dwilinski, I. Grzegory, M. Bockowski, Z. Sitar, Appl. Phys. Express 6, 075504 (2013)
H. Fujikura, T. Yoshida, M. Shibata, Y. Otoki, Proceedings of SPIE, vol. 10104, 1010403-1 (2017)
P. Perlin, L. Marona, K. Holc, P. Wisniewski, T. Suski, M. Leszczynski, R. Czarnecki, S. Najda, M. Zajac, R. Kucharski, Appl. Phys. Express 4, 062103 (2011)
P. Perlin, S. Stanczyk, A. Kafar, A. Bojarska, L. Marona, R. Czarnecki, G. Targowski, G. Muziol, H. Turski, E. Grzanka, S. Grzanka, S. Najda, P. Wisniewski, T. Czyszanowski, M. Leszczynski, C. Skierbiszewski, M. Zajac, R. Kucharski, T. Suski, Photonics Lett. Pol. 6, 32 (2014)
Y. Hatakeyama, K. Nomoto, N. Kaneda, T. Kawano, T. Mishima, T. Nakamura, IEEE Electron Device Lett. 32, 1674 (2011)
I.C. Kizilyalli, A.P. Edward, H. Nie, D. Bour, T. Prunty, D. Disney, IEEE Electron Device Lett. 35, 247 (2014)
B.S. Kang, F. Ren, Y. Irokawa, K.W. Baik, S.J. Pearton, C.-C. Pan, G.-T. Chen, J.-I. Chyi, H.-J. Ko, H.-Y. Lee, J. Vac. Sci. Technol. B: Micronelectron. Process. Phenom. 22(2), 710 (2004)
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This research was supported by the Office of Naval Research.
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Freitas, J.A., Zając, M. (2021). Properties of Ammonothermal Crystals. In: Meissner, E., Niewa, R. (eds) Ammonothermal Synthesis and Crystal Growth of Nitrides. Springer Series in Materials Science, vol 304. Springer, Cham. https://doi.org/10.1007/978-3-030-56305-9_16
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