Abstract
In this chapter, the role of conductive oxides in the fabrication of flexible electronic devices and their applications are reported elaborately. Due to changes from the rigid electronic world to flexible electronics, the researchers have started working on the materials, deposition technologies, and device fabrication in connection to the fabrication of flexible electronic devices. Flexible and printed electronics are lightweight materials that support portable displays, curved displays, and flexible or roll-up designs that can be manufactured using a roll-to-roll manufacturing process. Limited products such as curved televisions, bendable displays, and flexible antennas are available in the markets, but still a lot of issues have to be overcome in order to fulfill the dream of a flexible electronic world. Conductive oxides, which are considered as a backbone of flexible electronic devices, have challenges such as low conductivity, poor adhesive, instability, and high-temperature deposition, which have to be addressed. In this connection, this chapter deals with the deposition of conductive oxides in the flexible substrate and their role in the application of flexible electronic devices. Also, the issues and challenges faced during the deposition of the conductive oxides on the flexible substrate are also discussed in detail.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Alzoubi K, Hamasha MM, Lu S, Sammakia B (2011) Bending fatigue study of sputtered ITO on flexible substrate. IEEE/OSA J Disp Technol 7:593–600. https://doi.org/10.1109/JDT.2011.2151830
Argoitia RWP (2005) Using vacuum roll coaters to produce anti-counterfeiting devices. In: 48th annual technical conference proceedings of the society of vacuum coaters, pp 145–152
Azarova NA, Owen JW, McLellan CA et al (2010) Fabrication of organic thin-film transistors by spray-deposition for low-cost, large-area electronics. Org Electron Phys Mater Appl 11:1960–1965. https://doi.org/10.1016/j.orgel.2010.09.008
Bae JW, Kim HJ, Kim JS et al (2000) Tin-doped indium oxide thin film deposited on organic substrate using oxygen ion beam assisted deposition. Surf Coat Technol 131:196–200
Barth S, CPFilms I, Martinsville V, Memarian H (2000) Solar control window films—a historical and technological perspective. In: 43rd annual technical conference proceedings of the society of vacuum coaters, pp 329–334
Bender M, Seelig W, Daube C et al (1998) Dependence of film composition and thicknesses on optical and electrical properties of ITO-metal-ITO multilayers. Thin Solid Films 326:67–71. https://doi.org/10.1016/S0040-6090(98)00520-3
Berggren M, Nilsson D, Robinson ND (2007) Organic materials for printed electronics. Nat Mater 6:3–5
Boscarino S, Crupi I, Mirabella S et al (2014) TCO/Ag/TCO transparent electrodes for solar cells application. Appl Phys A Mater Sci Process 116:1287–1291. https://doi.org/10.1007/s00339-014-8222-9
Cattin L, Lare Y, Makha M et al (2013) Effect of the Ag deposition rate on the properties of conductive transparent MoO3/Ag/MoO3 multilayers. Sol Energy Mater Sol Cells 117:103–109. https://doi.org/10.1016/j.solmat.2013.05.026
Cavallini M, Facchini M, Massi M, Biscarini F (2004) Bottom-up nanofabrication of materials for organic electronics. Synth Met 146:283–286
Chen CW, Hsieh PY, Chiang HH et al (2003) Top-emitting organic light-emitting devices using surface-modified Ag anode. Appl Phys Lett 83:5127–5129. https://doi.org/10.1063/1.1635076
Choi MC, Kim Y, Ha CS (2008) Polymers for flexible displays: from material selection to device applications. Prog Polym Sci 33:581–630
Chung W, Thompson MO, Wickboldt P et al (2004) Room temperature indium tin oxide by XeCl excimer laser annealing for flexible display. Thin Solid Films 460:291–294. https://doi.org/10.1016/j.tsf.2004.01.050
Cormia RL, FennJr JB, Memarian H, Ringer G (1998) Roll-to-roll coating of indium tin oxide—a status report. In: 41st annual technical conference proceedings of the society of vacuum coaters, pp 452–456
Crawford GP (2005) Flexible flat panel displays
De Jong MP, Van Ijzendoorn LJ, De Voigt MJA (2000) Stability of the interface between indium-tin-oxide and poly(3,4-ethylenedioxythiophene)/poly(styrenesulfonate) in polymer light-emitting diodes. Appl Phys Lett 77:2255–2257. https://doi.org/10.1063/1.1315344
de Leeuw DM, Cantatore E (2008) Organic electronics: materials, technology and circuit design developments enabling new applications. Mater Sci Semicond Process 11:199–204. https://doi.org/10.1016/j.mssp.2008.10.001
Dhar A, Alford TL (2013) High quality transparent TiO2/Ag/TiO2 composite electrode films deposited on flexible substrate at room temperature by sputtering. APL Mater 1:012102. https://doi.org/10.1063/1.4808438
Ding X, Yan J, Li T, Zhang L (2012) Transparent conductive ITO/Cu/ITO films prepared on flexible substrates at room temperature. Appl Surf Sci 258:3082–3085. https://doi.org/10.1016/j.apsusc.2011.11.041
Dixon SC, Scanlon DO, Carmalt CJ, Parkin IP (2016) N-type doped transparent conducting binary oxides: an overview. J Mater Chem C 4:6946–6961
Ellmer K (2012) Past achievements and future challenges in the development of optically transparent electrodes. Nat Photonics 6:809–817
Fahland M, Karlsson P, Charton C (2001) Low resistivity transparent electrodes for displays on polymer substrates. Thin Solid Films 392:334–337. https://doi.org/10.1016/S0040-6090(01)01053-7
Fan JCC (1979) Preparation of Sn-doped In2O3(ITO) films at low deposition temperatures by ion-beam sputtering. Appl Phys Lett 34:515–517. https://doi.org/10.1063/1.90847
Gamota DR, Brazis P, Kalyanasundaram K, Zhang J (2004) Printed organic and molecular electronics
Ginley DS, Bright C (2000) Transparent conducting oxides. Mater Res Soc Bull August 200:15–18
Girtan M (2012) Comparison of ITO/metal/ITO and ZnO/metal/ZnO characteristics as transparent electrodes for third generation solar cells. Sol Energy Mater Sol Cells 100:153–161. https://doi.org/10.1016/j.solmat.2012.01.007
Granqvist CG (2007) Transparent conductors as solar energy materials: a panoramic review. Sol Energy Mater Sol Cells 91:1529–1598
Guillén C, Herrero J (2008) ITO/metal/ITO multilayer structures based on Ag and Cu metal films for high-performance transparent electrodes. Sol Energy Mater Sol Cells 92:938–941. https://doi.org/10.1016/j.solmat.2008.02.038
Hayashi K, Matsuishi S, Kamiya T et al (2002) Light-induced conversion of an insulating refractory oxide into a persistent electronic conductor. Nature 419:462–465. https://doi.org/10.1038/nature01053
Hedayati MK, Elbahri M (2016) Antireflective coatings: conventional stacking layers and ultrathin plasmonic metasurfaces, a mini-review. Materials (Basel) 9:497
Hong K, Kim K, Kim S et al (2011) Optical properties of WO 3 /Ag/WO 3 multilayer as transparent cathode in top-emitting organic light emitting diodes. J Phys Chem C 115:3453–3459. https://doi.org/10.1021/jp109943b
Hoshi Y, Ohki R (1999) Low energy rf sputtering system for the deposition of ITO thin films. Electrochim Acta 44:3927–3932. https://doi.org/10.1016/S0013-4686(99)00100-0
Huang X, Zeng Z, Fan Z et al (2012) Graphene-based electrodes. Adv Mater 24:5979–6004
Indluru A, Alford TL (2009) Effect of Ag thickness on electrical transport and optical properties of indium tin oxide-Ag-indium tin oxide multilayers. J Appl Phys 105:123528
Jeong JA, Kim HK (2009) Low resistance and highly transparent ITO-Ag-ITO multilayer electrode using surface plasmon resonance of Ag layer for bulk-heterojunction organic solar cells. Sol Energy Mater Sol Cells 93:1801–1809. https://doi.org/10.1016/j.solmat.2009.06.014
Kabele C (1953) Transistors. J Am Soc Nav Eng 65:707–714. https://doi.org/10.1111/j.1559-3584.1953.tb03937.x
Kaltenbrunner M, Sekitani T, Reeder J et al (2013) An ultra-lightweight design for imperceptible plastic electronics. Nature 499:458–463. https://doi.org/10.1038/nature12314
Kim D, Kim S (2003) AFM observation of ITO thin films deposited on polycarbonate substrates by sputter type negative metal ion source. Surf Coat Technol 176:23–29. https://doi.org/10.1016/S0257-8972(03)00514-0
Kim HW, Kim NH (2004) Growth of gallium oxide thin films on silicon by the metal organic chemical vapor deposition method. Mater Sci Eng B Solid-State Mater Adv Technol 110:34–37. https://doi.org/10.1016/j.mseb.2004.01.012
Kim YS, Park YC, Ansari SG et al (2003) Influence of O2 admixture and sputtering pressure on the properties of ITO thin films deposited on PET substrate using RF reactive magnetron sputtering. Surf Coat Technol 173:299–308. https://doi.org/10.1016/S0257-8972(03)00717-5
Kim DH, Park MR, Lee GH (2006) Preparation of high quality ITO films on a plastic substrate using RF magnetron sputtering. Surf Coat Technol 201:927–931. https://doi.org/10.1016/j.surfcoat.2006.01.004
Kim JH, Kang TW, Kwon SN et al (2017a) Transparent conductive ITO/Ag/ITO electrode deposited at room temperature for organic solar cells. J Electron Mater 46:306–311. https://doi.org/10.1007/s11664-016-4956-9
Kim TH, Park SH, Kim DH et al (2017b) Roll-to-roll sputtered ITO/Ag/ITO multilayers for highly transparent and flexible electrochromic applications. Sol Energy Mater Sol Cells 160:203–210. https://doi.org/10.1016/j.solmat.2016.10.033
Kopola P, Aernouts T, Sliz R et al (2011) Gravure printed flexible organic photovoltaic modules. Sol Energy Mater Sol Cells 95:1344–1347. https://doi.org/10.1016/j.solmat.2010.12.020
Krebs FC (2009) All solution roll-to-roll processed polymer solar cells free from indium-tin-oxide and vacuum coating steps. Org Electron Phys Mater Appl 10:761–768. https://doi.org/10.1016/j.orgel.2009.03.009
Kumar P, Bhowmick B (2018) Suppression of ambipolar conduction and investigation of RF performance characteristics of gate-drain underlap SiGe Schottky barrier field effect transistor. Micro Nano Lett 13:626–630. https://doi.org/10.1049/mnl.2017.0895
Kumar P, Chand S (2012) Recent progress and future aspects of organic solar cells. Prog Photovolt Res Appl 20:377–415
Kumar P, WasimArif, Bhowmick B (2018) Scaling of dopant segregation Schottky barrier using metal strip buried oxide MOSFET and its comparison with conventional device. Silicon 10:811–820. https://doi.org/10.1007/s12633-016-9534-5
Kwon SH, Kang YM, Cho YR et al (2010) Effect of TiO2 buffer layer thickness on properties of ITZO films deposited on flexible substrate. Surf Coat Technol 205:312–317. https://doi.org/10.1016/j.surfcoat.2010.08.019
Laskarakis A, Logothetidis S (2006) On the optical anisotropy of poly(ethylene terephthalate) and poly(ethylene naphthalate) polymeric films by spectroscopic ellipsometry from visible-far ultraviolet to infrared spectral regions. J Appl Phys 99:066101. https://doi.org/10.1063/1.2179193
Laskarakis A, Logothetidis S (2007) Study of the electronic and vibrational properties of poly(ethylene terephthalate) and poly(ethylene naphthalate) films. J Appl Phys 101:053503. https://doi.org/10.1063/1.2709572
Laskarakis A, Logothetidis S, Kassavetis S, Papaioannou E (2008) Surface modification of poly(ethylene terephthalate) polymeric films for flexible electronics applications. Thin Solid Films 516:1443–1448. https://doi.org/10.1016/j.tsf.2007.03.170
Lee JY, Yang JW, Chae JH et al (2009) Dependence of intermediated noble metals on the optical and electrical properties of ITO/metal/ITO multilayers. Opt Commun 282:2362–2366. https://doi.org/10.1016/j.optcom.2008.12.044
Lee SJ, Kim Y, Hwang JY et al (2017) Flexible indium-tin oxide crystal on plastic substrates supported by graphene monolayer. Sci Rep 7:3131. https://doi.org/10.1038/s41598-017-02265-3
Lewis JS, Weaver MS (2004) Thin-film permeation-barrier technology for flexible organic light-emitting devices. IEEE J Sel Top Quantum Electron 10:45–57. https://doi.org/10.1109/JSTQE.2004.824072
Lewis J, Grego S, Chalamala B et al (2004) Highly flexible transparent electrodes for organic light-emitting diode-based displays. Appl Phys Lett 85:3450–3452. https://doi.org/10.1063/1.1806559
Lim H, Bae CM, Kim YK et al (2003) Preparation and characterization of ITO-coated colorless polyimide substrates. Synth Met 135:49–50
Lin TC, Chang SC, Chiu CF (2006) Annealing effect of ITO and ITO/Cu transparent conductive films in low pressure hydrogen atmosphere. Mater Sci Eng B Solid-State Mater Adv Technol 129:39–42. https://doi.org/10.1016/j.mseb.2005.12.013
Liou JJ, Schwierz F (2003) RF MOSFET: recent advances, current status and future trends. Solid State Electron 47:1881–1895
Logothetidis S, Laskarakis A (2009) Towards the optimization of materials and processes for flexible organic electronics devices. Eur Phys J Appl Phys 46:12502. https://doi.org/10.1051/epjap/2009041
Melpignano P, Baron-Toaldo A, Biondo V et al (2005) Mechanism of dark-spot degradation of organic light-emitting devices. Appl Phys Lett 86:041105. https://doi.org/10.1063/1.1852706
Mouchaal Y, Louarn G, Khelil A et al (2015) Broadening of the transmission range of dielectric/metal multilayer structures by using different metals. Vacuum 111:32–41. https://doi.org/10.1016/j.vacuum.2014.09.013
Nomura K, Ohta H, Ueda K et al (2003) Thin-film transistor fabricated in single-crystalline transparent oxide semiconductor. Science (80- ) 300:1269–1272. https://doi.org/10.1126/science.1083212
Nordberg GF, Fowler BA, Nordberg M, Friberg LT (2007) Handbook on the toxicology of metals. Academic Press, Copyright © 2007 Elsevier Inc. All rights reserved. https://doi.org/10.1016/B978-0-12-369413-3.X5052-6, ISBN 978-0-12-369413-3
Novoselov KS, Fal’Ko VI, Colombo L et al (2012) A roadmap for graphene. Nature 490:192–200
Park SK, Han JI, Kim WK, Kwak MG (2001) Deposition of indium-tin-oxide films on polymer substrates for application in plastic-based flat panel displays. Thin Solid Films 397:49–55. https://doi.org/10.1016/S0040-6090(01)01489-4
Park SK, Mourey DA, Subramanian S et al (2008) High-mobility spin-cast organic thin film transistors. Appl Phys Lett 93:43301. https://doi.org/10.1063/1.2952769
Park HK, Kang JW, Na SI et al (2009a) Characteristics of indium-free GZO/Ag/GZO and AZO/Ag/AZO multilayer electrode grown by dual target DC sputtering at room temperature for low-cost organic photovoltaics. Sol Energy Mater Sol Cells 93:1994–2002. https://doi.org/10.1016/j.solmat.2009.07.016
Park Y-S, Park H-K, Jeong J-A et al (2009b) Comparative investigation of transparent ITO/Ag/ITO and ITO/Cu/ITO electrodes grown by dual-target DC sputtering for organic photovoltaics. J Electrochem Soc 156:H588. https://doi.org/10.1149/1.3131362
Park YS, Choi KH, Kim HK (2009c) Room temperature flexible and transparent ITO/Ag/ITO electrode grown on flexile PES substrate by continuous roll-to-roll sputtering for flexible organic photovoltaics. J Phys D Appl Phys 42:235109. https://doi.org/10.1088/0022-3727/42/23/235109
Park SH, Lee SM, Ko EH et al (2016) Roll-to-roll sputtered ITO/Cu/ITO multilayer electrode for flexible, transparent thin film heaters and electrochromic applications. Sci Rep 6. https://doi.org/10.1038/srep33868
Sahu DR, Lin SY, Huang JL (2008) Investigation of conductive and transparent Al-doped ZnO/Ag/Al-doped ZnO multilayer coatings by electron beam evaporation. Thin Solid Films 516:4728–4732. https://doi.org/10.1016/j.tsf.2007.08.089
Salaneck WR, Clark D., Samuelsen E. (1990) Science and applications of conducting polymers. In: Proceedings of the sixth euro physics industrial workshop, Lofthus, Norway
Scott JC, Malliaras GG, Chen WD et al (1999) Hole limited recombination in polymer light-emitting diodes. Appl Phys Lett 74:1510–1512
Shanmuga Sundar D, Sivanantharaja A (2013) High efficient plastic substrate polymer white light emitting diode. Opt Quant Electron 45:79–85. https://doi.org/10.1007/s11082-012-9604-x
Shanmuga Sundar D, Sivanantha Raja A, Sanjeeviraja C, Jeyakumar D (2016a) Highly transparent flexible polydimethylsiloxane films – a promising candidate for optoelectronic devices. Polym Int 65:535–543. https://doi.org/10.1002/pi.5088
Shanmuga Sundar D, Sivanantharaja A, Sanjeeviraja C, Jeyakumar D (2016b) Synthesis and characterization of transparent and flexible polymer clay substrate for OLEDs. Mater Today Proceed 3:2409–2412
Sibin KP, Srinivas G, Shashikala HD et al (2017) Highly transparent and conducting ITO/Ag/ITO multilayer thin films on FEP substrates for flexible electronics applications. Sol Energy Mater Sol Cells 172:277–284. https://doi.org/10.1016/j.solmat.2017.08.001
Smith J, Zhang W, Sougrat R et al (2012) Solution-processed small molecule-polymer blend organic thin-film transistors with hole mobility greater than 5 cm 2/Vs. Adv Mater 24:2441–2446. https://doi.org/10.1002/adma.201200088
Stewart R, Chiang A, Hermanns A et al (2002) Rugged low-cost display systems. Proc SPIE – Int Soc Opt Eng 4712:350–356
Sundar DS, Raja AS, Sanjeeviraja C, Jeyakumar D (2016) High temperature processable flexible polymer films. Int J Nanosci 16:1650038. https://doi.org/10.1142/s0219581x16600383
Wang S, Liu Y, Huang X et al (2003) Phthalocyanine monolayer-modified gold substrates as efficient anodes for organic light-emitting diodes. J Phys Chem B 107:12639–12642. https://doi.org/10.1021/jp035534b
Wu WF, Chiou BS (1994) Properties of radio-frequency magnetron sputtered ITO films without in-situ substrate heating and post-deposition annealing. Thin Solid Films 247:201–207. https://doi.org/10.1016/0040-6090(94)90800-1
Yaglioglu B, Huang YJ, Yeom HY, Paine DC (2006) A study of amorphous and crystalline phases in In2O 3–10 wt.% ZnO thin films deposited by DC magnetron sputtering. Thin Solid Films 496:89–94
Yoo K-J, Lee S-H, Lee A-S et al (2005) 38.2: 302-ppi high-resolution AMOLED using laser-induced thermal imaging. SID Symp Dig Tech Pap 36:1344. https://doi.org/10.1889/1.2036255
Yoshino K, Tada K, Fujii A et al (1997) Novel photovoltaic devices based on donor-acceptor molecular and conducting polymer systems. IEEE Trans Electron Devices 44:1315–1324. https://doi.org/10.1109/16.605474
Acknowledgments
The authors (Shanmuga Sundar Dhanabalan and Marcos Flores Carrasco) would like to thank the Conicyt FONDECYT (Fondo Nacional de Desarrollo Científico y Tecnológico) Project No. 3180089 and Millennium Nucleus MULTIMAT for funding and support.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2021 The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Switzerland AG
About this chapter
Cite this chapter
Dhanabalan, S.S. et al. (2021). Conductive Oxides Role in Flexible Electronic Device Applications. In: Rajendran, S., Qin, J., Gracia, F., Lichtfouse, E. (eds) Metal and Metal Oxides for Energy and Electronics. Environmental Chemistry for a Sustainable World, vol 55. Springer, Cham. https://doi.org/10.1007/978-3-030-53065-5_4
Download citation
DOI: https://doi.org/10.1007/978-3-030-53065-5_4
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-030-53064-8
Online ISBN: 978-3-030-53065-5
eBook Packages: Earth and Environmental ScienceEarth and Environmental Science (R0)