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Modeling Self-organization of Adsorbate at Chemical Vapor Deposition in Accumulative Ion Plasma Devices

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Nanooptics and Photonics, Nanochemistry and Nanobiotechnology, and Their Applications

Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 247))

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Abstract

We perform theoretical and numerical studies of nano-structured thin-film growth at condensation in a prototype model of ion plasma device. We construct an appropriate model of plasma-condensate system, by taking into account interactions of adsorbed particles and an influence of the electrical field near substrate, inducing anisotropy in transferring of adatoms between neighbor layers in multi-layer system. We analyze an influence of the electrical field strength onto realization of first-order phase transitions. We found the range of main system parameters responsible for pattern formation with realization of separated adsorbate islands on a substrate or separated holes inside adsorbate matrix during condensation. We discuss a possibility of the main system parameters, related to strength of the electrical field near substrate, interaction energy of adsorbate and adsorption coefficient, to control dynamics of adsorbate island formation, morphology of the surface and statistical properties of the surface structures. We will demonstrate that two-dimensional structures, obtained from the derived model for the intermediate level of growing thin film, can be represented as three-dimensional pyramidal-like structures. This study gives a better understanding detail of self-organization of adatoms into separated nano-sized islands in ion plasma devices.

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Acknowledgements

Support of this research by the Ministry of Education and Science of Ukraine, project No. 0117U003927, is gratefully acknowledged.

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Authors and Affiliations

  1. Institute of Applied Physics, National Academy of Sciences of Ukraine, 58 Petropavlovskaya St., Sumy, 40000, Ukraine

    Vasyl O. Kharchenko

  2. Sumy State University, 2 Rimskii-Korsakov St., Sumy, 40007, Ukraine

    Alina V. Dvornichenko

Authors
  1. Vasyl O. Kharchenko
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  2. Alina V. Dvornichenko
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Corresponding author

Correspondence to Vasyl O. Kharchenko .

Editor information

Editors and Affiliations

  1. Institute of Physics, National Academy of Sciences of Ukraine, Kyiv, Ukraine

    Olena Fesenko

  2. Institute of Physics, National Academy of Sciences of Ukraine, Kyiv, Ukraine

    Leonid Yatsenko

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Kharchenko, V.O., Dvornichenko, A.V. (2020). Modeling Self-organization of Adsorbate at Chemical Vapor Deposition in Accumulative Ion Plasma Devices. In: Fesenko, O., Yatsenko, L. (eds) Nanooptics and Photonics, Nanochemistry and Nanobiotechnology, and Their Applications . Springer Proceedings in Physics, vol 247. Springer, Cham. https://doi.org/10.1007/978-3-030-52268-1_8

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