Abstract
Improvement of performance and shrinkage of device sizes in microelectronics have been major driving forces for scientific and economic progress over the past 40 years. Developments in semiconductor processing and surface sciences have allowed precise control over critical dimensions with desirable properties for solid-state devices. In the past 30 years, there have been tremendous developments in micro- and nanoelectromechanical systems (MEMS and NEMS), microfluidics and nanofluidics, quantum structures and devices, photonics and optoelectronics, nanomaterials for molecular sensing and biomedical diagnosis, and scanning probe microscopy for measurement and manipulation at the molecular and atomic levels. This book was motivated by the need to understand the thermal phenomena and heat transfer processes in micro/nanosystems and at very short time scales for solving problems occurring in contemporary and future technologies. Since the first publication in 2007, many universities have offered micro/nanoscale heat transfer courses and used it as either the textbook or major reference. Significant progress has been made in the last decade and this second edition reflects a major update. This chapter gives an introduction of the thermal issues associated with nanotechnology and an outline of the rest of the chapters.
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Zhang, Z.M. (2020). Introduction. In: Nano/Microscale Heat Transfer. Mechanical Engineering Series. Springer, Cham. https://doi.org/10.1007/978-3-030-45039-7_1
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