Skip to main content

Scattering Mechanisms

  • Chapter
  • First Online:
Transport of Energetic Electrons in Solids

Part of the book series: Springer Tracts in Modern Physics ((STMP,volume 271))

  • 524 Accesses

Abstract

This chapter is devoted to the main mechanisms of scattering (elastic, quasi-elastic, and inelastic) that are relevant to the description of the interaction of electron beams with solid targets.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 119.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 159.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. N.F. Mott, Proc. R. Soc. London Ser. 124, 425 (1929)

    ADS  Google Scholar 

  2. H. Fröhlich, Adv. Phys. 3, 325 (1954)

    Article  ADS  Google Scholar 

  3. H.A. Bethe, Ann. Phys. Leipzig 5, 325 (1930)

    Article  ADS  Google Scholar 

  4. R.O. Lane, D.J. Zaffarano, Phys. Rev. 94, 960 (1954)

    Article  ADS  Google Scholar 

  5. K. Kanaya, S. Okayama, J. Phys. D. Appl. Phys. 5, 43 (1972)

    Article  ADS  Google Scholar 

  6. R.H. Ritchie, Phys. Rev. 106, 874 (1957)

    Article  ADS  MathSciNet  Google Scholar 

  7. J.P. Ganachaud, A. Mokrani, Surf. Sci. 334, 329 (1995)

    Article  ADS  Google Scholar 

  8. J. Kessler, Polarized Electrons (Springer, Berlin, 1985)

    Book  Google Scholar 

  9. P.G. Burke, C.J. Joachain, Theory of Electron-Atom Collisions (Plenum Press, New York, 1995)

    Book  Google Scholar 

  10. P. Sigmund, Particle Penetration and Radiation Effects (Springer, Berlin, 2006)

    Book  Google Scholar 

  11. R.F. Egerton, Electron Energy-Loss Spectroscopy in the Electron Microscope, 3rd edn. (Springer, New York, 2011)

    Book  Google Scholar 

  12. R.F. Egerton, Rep. Prog. Phys. 72, 016502 (2009)

    Article  ADS  Google Scholar 

  13. A. Jablonski, F. Salvat, C.J. Powell, J. Phys. Chem. Data 33, 409 (2004)

    Article  ADS  Google Scholar 

  14. F. Salvat, A. Jablonski, C.J. Powell, Comp. Phys. Comm. 165, 157 (2005)

    Article  ADS  Google Scholar 

  15. M. Dapor, J. Appl. Phys. 79, 8406 (1996)

    Article  ADS  Google Scholar 

  16. M. Dapor, Electron-Beam Interactions with Solids: Application of the Monte Carlo Method to Electron Scattering Problems (Springer, Berlin, 2003)

    Book  Google Scholar 

  17. M.L. Jenkin, M.A. Kirk, Characterization of Radiation Damage by Electron Microscopy, IOP Series Microscopy in Materials Science (Institute of Physics, Bristol, 2001)

    Book  Google Scholar 

  18. G. Wentzel, Z. Phys. 40, 590 (1927)

    Article  ADS  Google Scholar 

  19. S. Taioli, S. Simonucci, L. Calliari, M. Filippi, M. Dapor, Phys. Rev. B 79, 085432 (2009)

    Article  ADS  Google Scholar 

  20. S. Taioli, S. Simonucci, M. Dapor, Comput. Sci. Discovery 2, 015002 (2009)

    Google Scholar 

  21. S. Taioli, S. Simonucci, L. Calliari, M. Dapor, Phys. Rep. 493, 237 (2010)

    Article  ADS  Google Scholar 

  22. D. Bohm, Quantum Theory (Dover, New York, 1989)

    MATH  Google Scholar 

  23. F. Salvat, R. Mayol, Comput. Phys. Commun. 74, 358 (1993)

    Article  ADS  Google Scholar 

  24. E. Reichert, Z. Phys. 173, 392 (1963)

    Article  ADS  Google Scholar 

  25. M. Dapor, Phys. Rev. B 46, 618 (1992)

    Article  ADS  Google Scholar 

  26. M. Dapor, Sci. Rep. 8, 5370 (2018)

    Article  ADS  Google Scholar 

  27. O. Berger, J. Kessler, J. Phys. B: Atom. Molec. Phys. 19, 3539 (1986)

    Article  ADS  Google Scholar 

  28. H. Cho, Y.S. Park, H. Tanaka, S.J. Buckman, J. Phys. B: At. Mol. Opt. Phys. 37, 625 (2004)

    Google Scholar 

  29. W.M. Johnstone, W.R. Newell, J. Phys. B: At. Mol. Opt. Phys. 24, 3633 (1991)

    Google Scholar 

  30. J. Llacer, E.L. Garwin, J. Appl. Phys. 40, 2766 (1969)

    Google Scholar 

  31. Report 49 of the International Commission on Radiation Units and Measurements, Stopping Powers and Ranges for Protons and Alpha Particles, Bethesda, Maryland, USA (1993)

    Google Scholar 

  32. R.H. Ritchie, A. Howie, Philos. Mag. 36, 463 (1977)

    Google Scholar 

  33. F. Yubero, S. Tougaard, Phys. Rev. B 46, 2486 (1992)

    Google Scholar 

  34. H. Raether, Excitation of Plasmons and Interband Transitions by Electrons (Springer, Berlin, 1982)

    Google Scholar 

  35. A. Cohen-Simonsen, F. Yubero, S. Tougaard, Phys. Rev. B 56, 1612 (1997)

    Google Scholar 

  36. J.J. Ritsko, L.J. Brillson, R.W. Bigelow, T.J. Fabish, J. Chem. Phys. 69, 3931 (1978)

    Google Scholar 

  37. B.L. Henke, P. Lee, T.J. Tanaka, R.L. Shimabukuro, B.K. Fujikawa, At. Data Nucl. Data Tables 27, 1 (1982)

    Google Scholar 

  38. B.L. Henke, P. Lee, T.J. Tanaka, R.L. Shimabukuro, B.K. Fujikawa, At. Data Nucl. Data Tables 54, 181 (1993)

    Google Scholar 

  39. U. Buechner, J. Phys. C: Solid State Phys. 8, 2781 (1975)

    Google Scholar 

  40. D.R. Penn, Phys. Rev. B 35, 482 (1987)

    Google Scholar 

  41. J.C. Ashley, J. Electron Spectrosc. Relat. Phenom. 46, 199 (1988)

    Google Scholar 

  42. J.C. Ashley, J. Electron Spectrosc. Relat. Phenom. 50, 323 (1990)

    Google Scholar 

  43. Z. Tan, Y.Y. Xia, X. Liu, M. Zhao, Microelectron. Eng. 77, 285 (2005)

    Article  Google Scholar 

  44. J.C. Ashley, V.E. Anderson, IEEE Trans. Nucl. Sci. NS28, 4132 (1981)

    Google Scholar 

  45. S. Tanuma, C.J. Powell, D.R. Penn, Surf. Interface Anal. 17, 911 (1991)

    Google Scholar 

  46. D. Emfietzoglou, I. Kyriakou, R. Garcia-Molina, I. Abril, J. Appl. Phys. 114, 144907 (2013)

    Google Scholar 

  47. R. Garcia-Molina, I. Abril, C.D. Denton, S. Heredia-Avalos, Nucl. Instrum. Methods Phys. Res. B 249, 6 (2006)

    Google Scholar 

  48. R. Garcia-Molina, I. Abril, I. Kyriakou, D. Emfietzoglou, Surf. Interface Anal. (2016). https://doi.org/10.1002/sia.5947

  49. M. Dapor, Front. Mater. 2, 27 (2015)

    Google Scholar 

  50. I. Abril, R. Garcia-Molina, C.D. Denton, F.J. Pérez-Pérez, N.R. Arista, Phys. Rev. A 58, 357 (1998)

    Google Scholar 

  51. N.D. Mermin, Phys. Rev. B 1, 2362 (1970)

    Google Scholar 

  52. W. de la Cruz, F. Yubero, Surf. Interface Anal. 39, 460 (2007)

    Google Scholar 

  53. S. Tanuma, C.J. Powell, D.R. Penn, Surf. Interface Anal. 21, 165 (1994)

    Google Scholar 

  54. M. Dapor, Nucl. Instrum. Methods Phys. Res. B 352, 190 (2015)

    Google Scholar 

  55. V.I. Ochkur, Soviet Phys. J.E.T.P. 18, 503 (1964)

    Google Scholar 

  56. J.M. Fernández-Varea, R. Mayol, D. Liljequist, F. Salvat, J. Phys.: Condens. Matter 5, 3593 (1993)

    ADS  Google Scholar 

  57. P. de Vera, I. Abril, R. Garcia-Molina, J. Appl. Phys. 109, 094901 (2011)

    Google Scholar 

  58. J.D. Bourke, Phys. Rev. B 100, 184311 (2019)

    Google Scholar 

  59. C.J. Powell, J.B. Swann, Phys. Rev. 115, 869 (1959)

    Google Scholar 

  60. Y.F. Chen, C.M. Kwei, Surf. Sci. 364, 131 (1996)

    Google Scholar 

  61. Y.C. Li, Y.H. Tu, C.M. Kwei, C.J. Tung, Surf. Sci. 589, 67 (2005)

    Article  ADS  Google Scholar 

  62. M. Dapor, L. Calliari, S. Fanchenko, Surf. Interface Anal. 44, 1110 (2012)

    Google Scholar 

  63. A. Jablonski, C.J. Powell, Surf. Sci. 551, 106 (2004)

    Google Scholar 

  64. I. Kyriakou, D. Emfietzoglou, R. Garcia-Molina, I. Abril, K. Kostarelos, J. Appl. Phys. 110, 054304 (2011)

    Google Scholar 

  65. M. Azzolini, O.Y. Ridzel, P.S. Kaplya, V. Afanas’ev, N.M. Pugno, S. Taioli, M. Dapor, Comp. Mat. Sci. 173, 109420 (2020)

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Maurizio Dapor .

Rights and permissions

Reprints and permissions

Copyright information

© 2020 Springer Nature Switzerland AG

About this chapter

Check for updates. Verify currency and authenticity via CrossMark

Cite this chapter

Dapor, M. (2020). Scattering Mechanisms. In: Transport of Energetic Electrons in Solids. Springer Tracts in Modern Physics, vol 271. Springer, Cham. https://doi.org/10.1007/978-3-030-43264-5_4

Download citation

Publish with us

Policies and ethics