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Transport of Energetic Electrons in Solids

Part of the book series: Springer Tracts in Modern Physics ((STMP,volume 271))

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Abstract

In this chapter we will discuss some important applications of the Monte Carlo method. We will describe, in particular, (1) the line-scan calculations of resist materials with given geometrical cross-sections deposited on silicon substrates; (2) the energy selective SEM for image contrast in silicon p-n junctions; (3) the density of energy radially deposited by secondary electrons around the tracks of ions through polymers and bio-molecular systems.

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Authors and Affiliations

  1. European Centre for Theoretical Studies in Nuclear Physics and Related Areas, Trento, Italy

    Maurizio Dapor

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  1. Maurizio Dapor
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Correspondence to Maurizio Dapor .

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Dapor, M. (2020). Applications. In: Transport of Energetic Electrons in Solids. Springer Tracts in Modern Physics, vol 271. Springer, Cham. https://doi.org/10.1007/978-3-030-43264-5_11

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