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Thermal Properties

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Gallium Oxide

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 293))

Abstract

In this chapter, an overview of the current research progress on the thermal properties of beta-gallium oxide (β-Ga2O3) is provided. Thermal properties of β-Ga2O3 are of great significance to the device reliability and performance in its potential applications. Previous research through both computational and experimental studies on β-Ga2O3 using various methods is reviewed. The most notable findings are the relatively low and highly anisotropic thermal conductivity . At room temperature, the [010] direction has the highest thermal conductivity of around 25 W/mK, while that in the [100] direction is measured to be the lowest, which is around 13 W/mK. We also make comparison between β-Ga2O3 and GaN , another widely used semiconductor for power electronics . The relatively low thermal conductivity of β-Ga2O3 compared to GaN may present a major challenge for its potential applications. Another important thermal property, heat capacity , of β-Ga2O3 at room temperature is measured to be 18.7 J/mol K. On the other hand, the effective thermal conductivity in β-Ga2O3 thin film is shown to be larger than other gate oxides, providing a possibility of using it as gate dielectrics in GaN device contacts. The thermal properties discussed in this chapter might be useful for thermal management and design of β-Ga2O3 devices.

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Author information

Authors and Affiliations

  1. Department of Aerospace and Mechanical Engineering, University of Notre Dame, Notre Dame, IN, 46615, USA

    Zeyu Liu

  2. Department of Aerospace and Mechanical Engineering, Department of Chemical and Biomolecular Engineering and Center for Sustainable Energy of Notre Dame (ND Energy), University of Notre Dame, Notre Dame, IN, 46615, USA

    Tengfei Luo

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  1. Zeyu Liu
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Correspondence to Tengfei Luo .

Editor information

Editors and Affiliations

  1. National Institute of Information and Communications Technology, Koganei, Tokyo, Japan

    Masataka Higashiwaki

  2. Graduate School of Engineering, Kyoto University, Katsura, Kyoto, Japan

    Shizuo Fujita

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Liu, Z., Luo, T. (2020). Thermal Properties. In: Higashiwaki, M., Fujita, S. (eds) Gallium Oxide. Springer Series in Materials Science, vol 293. Springer, Cham. https://doi.org/10.1007/978-3-030-37153-1_29

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