Abstract
Recently, there is a growing interest in piezoelectric layers and their application in micro – electro – mechanical systems (MEMS). MEMS containing piezoelectric layers are simple in build and easy to control. This paper focuses on application of two piezoelectric layers: AlN and (Sc) scandium doped AlN. Simulation results, measurements results, methodology of estimation piezoelectric parameters together with estimated values for both types of AlN layers are presented in this article.
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Ekwińska, M.A. et al. (2020). Advantages of Using Piezoelectric Materials in the MEMS Construction on the Example of AlN and Sc Doped AlN Layers. In: Szewczyk, R., Krejsa, J., Nowicki, M., Ostaszewska-Liżewska, A. (eds) Mechatronics 2019: Recent Advances Towards Industry 4.0. MECHATRONICS 2019. Advances in Intelligent Systems and Computing, vol 1044. Springer, Cham. https://doi.org/10.1007/978-3-030-29993-4_33
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DOI: https://doi.org/10.1007/978-3-030-29993-4_33
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