Abstract
The nature of technical relevant surfaces is often as complex as measurement of their properties cannot be carried out with a metrology tool with one or two specialized sensors. Instead, the industry increasingly looks for flexible and future-safe metrology tools that allow managing various measuring tasks or enable measuring various parameters of the same surface or workpiece.
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Quinten, M. (2019). Multisensor – Systems – A Versatile Approach to Surface Metrology. In: A Practical Guide to Surface Metrology. Springer Series in Measurement Science and Technology. Springer, Cham. https://doi.org/10.1007/978-3-030-29454-0_7
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DOI: https://doi.org/10.1007/978-3-030-29454-0_7
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Publisher Name: Springer, Cham
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Online ISBN: 978-3-030-29454-0
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